Deposition and Optimization of Al-doped ZnO Thin Films Fabricated by In-line Sputtering System (인라인 스퍼터를 이용한 알루미늄 도핑된 산화아연 박막의 증착 및 특성 최적화 연구)
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- The Transactions of The Korean Institute of Electrical Engineers
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- v.66 no.8
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- pp.1236-1241
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- 2017