• Journal of the Semiconductor & Display Technology
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• v.20 no.2
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• pp.19-24
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• 2021

As the size of semiconductor devices decreases, the etching pattern becomes very narrow and a deep high aspect ratio process becomes important. The cryogenic etching process enables high aspect ratio etching by suppressing the chemical reaction of reactive ions on the sidewall while maintaining the process temperature of -100℃. ESC is an important part for temperature control in cryogenic etching equipment. Through the cooling path inside the ESC, liquid nitrogen is used as cooling water to create a cryogenic environment. And since the ESC directly contacts the wafer, it affects the temperature uniformity of the wafer. The temperature uniformity of the wafer is closely related to the yield. In this study, the cooling path was designed and analyzed so that the wafer could have a uniform temperature distribution. The optimal cooling path conditions were obtained through the analysis of the shape of the cooling path and the change in the speed of the coolant. Through this study, by designing ESC with optimal temperature uniformity, it can be expected to maximize wafer yield in mass production and further contribute to miniaturization and high performance of semiconductor devices.

• Journal of the Korean Data and Information Science Society
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• v.15 no.4
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• pp.935-943
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• 2004

Most of the accelerated life tests deal with tests that use only one accelerating variable and no other explanatory variables. Frequently, however, there is a test to use more than one accelerating or other experimental variables, such as, for examples, a test of capacitors at higher than usual conditions of temperature and voltage, a test of circuit boards at higher than usual conditions of temperature, humidity and voltage. A accelerated life test is extended to M-level stress accelerated life test with k-stress variables. The optimal design for Weibull distribution is studied with k-stress variables.

• Proceedings of the KSR Conference
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• 2005.05a
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• pp.225-230
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• 2005

This paper describes determination of optimal lubricant quantity for driving gear unit. The purpose of selecting optimal lubricant quantity is to evaluate durability of driving gear unit. Lubricant quantity of driving gear unit is important factor affecting durability. The determination methode of lubricant quantity evaluation is used calculation necessary lubricant quantity first, then selection of optimal oil quantity as a base for moving of oil temperature according to changing oil quantity.

• Journal of the Korean Data and Information Science Society
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• v.17 no.1
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• pp.13-18
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• 2006

The purpose of this paper is to identify optimal designs of server port connections between two server system for 200-300 user group. Given 3 empirical models as user and port parallel server types under some conditions of 100 Mbps and optimal CPU temperature suggested by Lee and Kim(2005), our results are shown; port parallel model was optimal when traffic processing times measured, and 250 traffics was jumping point as a critical point in our cases.

• Journal of the Korean Society for Geothermal and Hydrothermal Energy
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• v.3 no.2
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• pp.31-37
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• 2007

The fuzzy control algorithm for HVAC system has been developed for minimizing energy consumption while maintaining the comfort of indoor thermal environment in terms of the environmental variables such as time varying indoor cooling load and outdoor temperatures. The optimal set-points of control parameters with fuzzy control are supply air temperature, chilled water temperature and condenser temperature. This study has been done by using TRNSYS program in order to analyze the HVAC system response. As a result, the fuzzy control algorithm with PID algorithm shows good energy performance in comparison with conventional one.

• Journal of the Semiconductor & Display Technology
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• v.14 no.1
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• pp.39-43
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• 2015

This paper is to derive information about the optimal shape of the pack has a minimum temperature range of a Li-ion battery equipped with a module. We selected the shape of the pack in order to reduce the temperature deviation between the batteries as a variable. And we derived the experimental points with a minimum of DOE by D-optimal. We analyzed the temperature and the flow within the battery pack by using a numerical analysis verified in previous studies. We derive the equation for the temperature variation in the objective function using the RSM and performed optimization. As a result, it was confirmed that with the variation in the $1.706e-4^{\circ}C$ when to apply an optimized shape.

• Proceedings of the Korean Institute of Intelligent Systems Conference
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• 2003.09a
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• pp.358-363
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• 2003

Optimal tuning plays an important role in operations or tuning of the complex process such as the main steam temperature of the thermal power plant. However, it is very difficult to maintain the steam temperature of power plant using conventional optimization methods, since these processes have the time delay and the change of the dynamic characteristics in the reheater. Up to the present time, the Pm controller has been used. However, it is not easy to achieve an optimal PID gain with no experience, since the gain of the PID controller has to be manually tuned by trial and error. This paper suggests immune algorithm based tuning technique for PID Controller on steam temperature process with long dead time and its results are compared with genetic algorithm based tuning technique.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.21 no.4
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• pp.593-600
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• 2012

Thixomolding of Mg-alloy is a semi-solid injection molding process utilizing thixotropic phenomenon. Using this process, higher strength, thinner wall section and tighter tolerance without porosity are obtained. It has been applied for production of near-net-shape magnesium component. To design optimal thixomolding process of Mg-alloy part, molding conditions such as slurry temperature, mold temperature and injection time should be determined properly. Selection of these parameters has been dependent upon engineers' experience and intuitiveness. In this paper, to improve mechanical properties of the thixomolded product, optimal selection of process variables such as injection velocity, barrel temperature and die temperature in the process has been studied through microstructural analysis and Taguchi method. Performance of the process is verified through experiments.

• Textile Coloration and Finishing
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• v.32 no.2
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• pp.80-88
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• 2020

Supercritical fluid dyeing is a new alternative to the conventional aqueous process because of its environmental benefits. In this study, dyeing properties of Nylon 6 fabrics were investigated depending on dyeing temperature and pressure in supercritical CO₂ fluid dyeing system. In order to select the optimal condition for supercritical fluid dyeing of Nylon 6 fabrics, dyeing temperature and pressure were varied from 100, 110, 120℃, 200, 230, 260bar, respectively. The results of K/S values and levelling properties showed that the optimal dyeing condition for Nylon 6 fabrics was 110℃ and 230bar in the supercritical CO₂ fluid dyeing system. The washing fastness ratings of the dyed Nylon 6 fabrics under supercritical medium were good for both fading and staining except for staining on nylon.

• Proceedings of the Korean Society of Crop Science Conference
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• 2017.06a
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• pp.222-222
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• 2017

This study aimed to determine an optimal temperature of root zone for the chive cultivation in a greenhouse during the winter season that may raise the possibility of chive (Allium schoenoprasum L.) harvest any time year-round by reducing energy consumption. The maximum and minimum temperatures of root zone were 26.8 and $19.8^{\circ}C$ for the R-Z20, 28.3 and $23.6^{\circ}C$ for the R-Z25 and 22.4 and $14.3^{\circ}C$ for the control. The highest fresh weights of shoot and root, plant height, root length and stem diameter were observed in the R-Z20 treatment. There was no significant difference in the growth between the R-Z25 and control treatment. These results suggest that the optimal temperature of root zone is $20^{\circ}C$ for the chive cultivation in the greenhouse during winter season.