• The Transactions of the Korean Institute of Electrical Engineers C
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• v.51 no.6
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• pp.240-245
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• 2002

In this paper, a novel optical measuring system for the measurement of nonuniform electric field was proposed. The electric field distorted by the discharges was detected through proposed optical measuring system based on the Pockets effect and Mach-Zehnder interferometer. In order to produce distorted electric field, corona discharge was generated from needle-plane electrode in air and detected by optical measuring system. This optical measuring system is constructed by He-Ne laser, single mode optical fiber, $2{\times}2$ 50/50 beam splitter, $LiNbO_3$ Pockets cell, photo detector and PC. In this system, output signal of Pockels sensor is measured by digital oscilloscope and transferred to the PC for recording and statistical processing. Through this paper, a promising possibilities of proto-type optical measuring system were evinced.

• Journal of the Semiconductor & Display Technology
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• v.18 no.2
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• pp.58-62
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• 2019

Diffractive Optical Elements(DOEs) diffracts incident light using the diffraction phenomenon of light to generate a desired diffraction image. In recent years, the use of diffraction optics, which can replace existing refractive optical elements with flat plates, has been increased by implementing various optical functions that could not be implemented in refractive optical devices and by becoming miniaturized and compacted optical elements. Direct laser lithography is typically used to effectively fabrication such a diffractive optical element in a large area with a low process cost. In this study, the process conditions for fabricating patterns of diffractive optical elements in various shapes were found using direct laser lithographic system, and optical performance evaluation was performed through fabrication.

• Journal of Advanced Marine Engineering and Technology
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• v.37 no.7
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• pp.778-783
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• 2013

Measurement of liquid level in storage and processing vessels, tanks, wells, reservoirs and hoppers is commonly needed. The several different ways to measure the liquid level of oil or water tank have been provided such as an electrostatic capacity, a supersonic waves and an optical science etc. In the study, we have constructed the stable and efficient measurement system to measure the level of liquid at real-time and to get accurate measurement of the maximum and minimum level of the tank. For this purpose, we suggest double sensing methods by adopting both capacitive and optical sensing. The experimental results, presented in this paper, illustrate the effectiveness of the proposed method under different sensing methods.

• Journal of the Korean Society for Precision Engineering
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• v.17 no.1
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• pp.129-137
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• 2000

In this paper, a new method of noncontact measurement has been developed for a 3 dimensional topography in semiconductor wafer, implementing a new optical probe based on the precision defocus measurement. The developed technique consists of the new optical probe, precision stages, and the measurement/control system. The basic principle of the technique is to use the reflected slit beam from the specimen surface, and to measure the deviation of the specimen surface. The defocusing distance can be measured by the reflected slit beam, where the defocused image is measured by the proposed optical probe, giving very high resolution. The distance measuring formula has been proposed for the developed probe, using the laws of geometric optics. The precision calibration technique has been applied, giving about 10 nanometer resolution and 72 nanometer of four sigma uncertainty. In order to quantitize the micro pattern in the specimen surface, some efficient analysis algorithms have been developed to analyse the 3D topography pattern and some parameters of the surface. The developed system has been successfully applied to measure the wafer surface, demonstrating the line scanning feature and excellent 3 dimensional measurement capability.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2003.04a
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• pp.265-271
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• 2003

This study is for the stable optical source in order to get the precision measurement, which contributes to help the laser frequency and the output to be settled. The laser optical frequency is changed by the length of resonance cavity. The length variation of the laser resonance amplitude is affected by the thermal expansion of that system. So, we try not only to adjust the temperature of the laser tube using the heater for fine length of resonance cavity, but also to maintain the fixed temperature of the resonance cavity for outputting the safe laser optical frequency. Therefore, we must take materials with the thermal expansion of the supporting system, which is closer to it of the laser resonance cavity. Using the materials, we can promote to stabilize the temperature of it. In advance, we also plan to get the settlement of the laser frequency and the output in the long km, optimizing and stabilizing the system.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.8
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• pp.40-47
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• 2001

Optical measurement methods make it possible to detect object displacements with high resolution and noncontact measurements. Also, they are very robust against EMI noises and have long operation range. An optical triangulation sensor is one of widely used displacement measurement sensors for its sub-micron resolution, fast response, simple structure, and low cost. However. there are several errors caused by inclinations of a surface. speckle effects, power fluctuations of light sources, and noises of detectors. In this paper, in order to minimize error effects, we performed error analysis and proposed a new structure. Then, we setup a new modeling method and verify it through simulations and experiments. Based on the new model. we propose a new sensor structure and establish design criteria. Finally, we design a signal processing system to overcome a resolution-limited problem of light detectors. The resolution of the proposed system is 0.2${\mu}{\textrm}{m}$ in 5mm operating range.

• Journal of Sensor Science and Technology
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• v.31 no.6
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• pp.441-447
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• 2022

This study describes a novel method for detecting and measuring partial discharge (PD) on an electrical facility such as an insulated power cable or switchgear using fiber optic sensing technology, and a distributed acoustic sensing (DAS) system. This method has distinct advantages over traditional PD sensing techniques based on an electrical method, including immunity to electromagnetic interference (EMI), long range detection, simultaneous detection for multiple points, and exact location. In this study, we present a DAS system for PD detection with performance evaluation and experimental results in a simulated environment. The results show that the system can be applied to PD detection.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.375-378
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• 1995

Although laser interferometer measurement system has the advantage of range and accuracy, the traditional error measurement methods for geometric errors(two straightness and three angular errors) of a machine tool measures error components one at a time. It may also create an optical path difference and affect the measurement accuracy. In order to identify and compensate for geometric error of a moving body, an on-line measurement system for simultaneous detection of the five error components of a moving axis is required. An on-line measurement system with 5 degrees of freedom was developed for geometric error detection. Performance verification of the system was performed on an error generating mechanism. Experimental results show the feasibility of this system for identifying geometric errors of a side of machine tool.

• Journal of Astronomy and Space Sciences
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• v.27 no.4
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• pp.337-343
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• 2010

Optical observation system provides angle-only measurement for orbit determination of space object. Range measurement can be directly acquired using laser ranging or tone ranging system. Initial orbit determination (IOD) by using angle- only data set shows discrepancy according to the measurement time interval. To solve this problem, range measurement data should be added for IOD. In this study, two-site optical observation was used to derive the range information. We have observed nine geostationary earth orbit satellites by using two-site optical observation system. The determination result of the range shows the accuracy over 99.5% compared to the results from the satellite tool kit simulation. And we confirmed that the orbit determination by the Herrick-Gibbs method with the range information obtained from the two-site observation is more accurate than the orbit determination by Gauss method with the one-site observation. For more accurate two-site optical observation, a baseline should satisfy an optimal condition of length and more precise observation system needed.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.4
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• pp.107-113
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• 2009

In this paper, we studied of measurement the vibration of natural frequency using optical fiber sensor. The boring bar for measurement of vibration in use optical fiber sensor has the advantage of direct measure for the frequency than accelerometer. Because it deal with output value on electrical signal of optical fiber in physical disturbance when it measures the frequency of vibration. The optical fiber sensor measured the vibration of boring bar by the gap in sensing jig while optical fiber just kept contact with boring bar. A prototype system was composed of jig part with gap and optical system part. In this paper, we found out the possibility to measurement of vibration by the gap in use optical fiber.