• Proceedings of the KSME Conference
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• 2007.05b
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• pp.3178-3182
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• 2007

The interferometer method with nano-scale spatial resolution has been developed in this study. To enhance the accuracy of the previous developed method, the 14 bit cooled CCD camera with 1280 by 980 spatial resolution was applied to the measurement. And optical alignment has been carried out on the highly accurate position sensors with 500nm resolution so as to be able to calibrate the detected interference image with the field of view. Also the measurements were applied to the ultra thin oil film between the Al coated cylinder mirror with 38.1mm radius and 0.5mm cover glass to verify the developed method. The measured result showed the good agreement with the used cylinder curvature with ${\pm}$5.18run uncertainty.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.128-131
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• 2002

Three Dimensional measuring system using optical interference is greatly needed for semiconductor surface or optical surface. The application of this system are : MEMS product, semiconductor surfaces, optical components, precise machined surface, etc. In this paper, Interferometry based measurement system is introduced, which is nondestructive and noncontact inspection system. This system have relatively many advantage, compared with AFM/STM, SEM, Stylus, etc. The developed system can measure the surface topography with high precision and resolution, and with few seconds. And the associated software algorithm is also developed for the ultra precision 3D measuring surface. Various samples that is measured using this system is showed in the latter of this paper.

• Journal of the Optical Society of Korea
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• v.17 no.6
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• pp.481-485
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• 2013

A method for the measurement of the concentration of methane is experimentally demonstrated. The wavelength filter and gas cell are combined by using one Fabry-Perot etalon, which is filmed with the reflectivity of 96%. The optical broadband source is not only filtered to match the absorption wavelength of methane, but also absorbed by the methane in the same Fabry-Perot etalon. The concentration of the methane can be detected directly by measuring the transmission intensity. Compared with the conventional method, the proposed method possesses low costand high stability.

• Journal of the Optical Society of Korea
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• v.17 no.1
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• pp.50-56
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• 2013

Optical-fiber electronic speckle pattern interferometry (ESPI) is a non-contact, non-destructive examination technique with the advantages of rapid measurement, high accuracy, and full-field measurement. The optical-fiber ESPI system used in this study was compact and portable with the advantages of easy set-up and signal acquisition. By suitably configuring the optical-fiber ESPI system, producing an image signal in a charge-coupled device camera, and periodically modulating beam phases, we obtained phase information from the speckle pattern using a four-step phase shifting algorithm. Moreover, we compared the actual defect size with that of interference fringes which appeared on a screen after calculating the pixel value according to the distance between the object and the CCD camera. Conventional methods of measuring defects are time-consuming and resource-intensive because the estimated values are relative. However, our simple method could quantitatively estimate the defect length by carrying out numerical analysis for obtaining values on the X-axis in a line profile. The results showed reliable values for average error rates and a decrease in the error rate with increasing defect length or pressure.

• International Journal of Precision Engineering and Manufacturing
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• v.8 no.4
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• pp.22-26
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• 2007

We describe a new way of implementing absolute displacement measurements by exploiting the optical comb of a femtosecond pulse laser as a wavelength ruler, The optical comb is stabilized by locking both the repetition rate and the carrier offset frequency to an Rb clock of frequency standard. Multiwavelength interferometry is then performed using the quasi-monochromatic beams of well-defined generated wavelengths by tuning an external cavity laser diode consecutively to preselected light modes of the optical comb. This scheme of wavelength synthesizing allows the measurement of absolute distances with a high precision that is traceable to the definition of time. The achievable wavelength uncertainty is $1.9{\times}10^{-10}$, which allows the absolute heights of gauge blocks to be determined with an overall calibration uncertainty of 15 nm (k = 1). These results demonstrate a successful industrial application of an optical frequency synthesis employing a femtosecond laser, a technique that offers many possibilities for performing precision length metrology that is traceable to the well-defined international definition of time.

• Journal of the Institute of Convergence Signal Processing
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• v.4 no.4
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• pp.40-46
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• 2003

In this research, we accomplished the interpreting about the vibration of the object, which is the out of plane displacement in the Electronic Speckle Pattern Interferometry(ESPI), one of the optical measuring technique. The vibrating object has a inherent nodal line, therefore we can get the information about the vibration of the object by interpreting it. we used a speaker and a cantilever plate for a measurement object, and interpreted it qualitatively by using the Time-Average ESPI. In this experimental result, the speaker has the lower mode of fringe at 550Hz, 570mV, and the higher mode of fringe at 950Hz, 570mV This ESPI is a non-destructive test, and because of using the laser at measuring, it has a high resolution. The ESPI can test vibration mode regardless of the test object size, because the area which illuminated laser is the test area.

• Journal of the Korean Society for Precision Engineering
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• v.29 no.8
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• pp.906-912
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• 2012

This paper presents the new method for a six-degree-of-freedom (DOF) motion measurement and those dynamic characterizations in an ultraprecision linear stage using angle sensor-implemented grating interferometry. It consists of a diffractive optical element, a corner cube, four separate two-dimensional position sensitive detectors, four photodiodes and auxiliary optics components. From the previous study, it was confirmed that the proposed optical system could measure a six-DOF motion error in a linear stage. In this article, six-DOF motion dynamic characteristics of the stage were investigated through the step response and with respect to the conditions with a different speed of a slide table. As a result, the natural frequency and damping ratio according to a six-DOF direction was obtained. Also, it was seen that the speed of slide table had an significant effect on a six-DOF displacement motion, especially, X, which was considered as the effect of friction mechanism and local elastic mechanical deformation in a slide guide.

• Publications of The Korean Astronomical Society
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• v.32 no.1
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• pp.363-365
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• 2017

The telescope to be onboard SPICA (Space Infrared Telescope for Cosmology and Astrophysics) has an aperture diameter of 2.5 m and its imaging performance is to be diffraction-limited at a wavelength of $20{\mu}m$ at the operating temperature of <8 K. Because manufacturing precise autocollimating flat mirrors (ACFs) with sizes comparable to the SPICA telescope is not technically feasible, we plan to use sub-aperture stitching interferometry through ACFs for optical testing of the telescope. We have verified the applicability of the sub-aperture stitching technique to the SPICA telescope by performing stitching experiments in a vacuum at a room temperature, using the 800-mm telescope and a 300-mm ACF. We have also developed a new method to reduce uncertainties possibly caused by cryogenic and gravitational deformations of ACFs.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.26 no.2
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• pp.217-224
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• 2002

It is very important to measure and visualize the changes in the physical properties of fluid flow because this is the foundation of measurement techniques used in aerodynamics, heat transfer, plasma diagnostics, and stress analysis of transparent models. The optical methods are advantageous over probe-based techniques in the optical methods are of high speed, non-contact and are capable of providing full-field results with high spatial resolution. Therefore we propose the electronic speckle pattern interferometry(ESPI) that gives us a solution to overcome those limitations. In this paper the experimental results show qualitative and quantitative visualization of changes in the physical properties of the candle and alcohol lamp with 3D plotting. And we obtained the refractive index, mass density and temperature distribution of fluids. The results clearly show the process of flow phenomena and give the feasibility of quantitative interpretation of gasdynamics.

• Journal of the Optical Society of Korea
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• v.17 no.5
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• pp.415-422
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• 2013

White-light phase-shifting interferometry (WLPSI) is widely recognized as a standard method to measure shapes with high resolution over a long distance. In practical applications, WLPSI, however, is associated with some degree of ambiguity of its phase, which occurs due to a phase delay, which is the offset between the phase of the fringes and the fringe envelope peak position. In this paper, a new algorithm is proposed for the determination of a fringe order suitable for samples in which the phase delay mainly occurs due to noise, diffraction and a steep angle. The concepts of the decouple factor and the connectivity are introduced and a method for calculating the decouple factor and the connectivity is developed. With the phase-unwrapping procedure which considers these values, it is demonstrated that our algorithm determines the correct fringe order. To verify the performance of the algorithm, a simulation was performed with the virtual step height under noise. Some specimens such as step height standard and a column spacer with a steep angle are also measured with a Mirau interference microscope, after which the algorithm is shown to be effective and robust.