• Journal of Electrical Engineering and Technology
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• 제5권2호
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• pp.337-341
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• 2010

In this paper, an extremely low voltage operated micro corner cube retroreflector (CCR) was fabricated for free-space optical communication applications by using bulk silicon micromachining technologies. The CCR was comprised of an orthogonal vertical mirror and a horizontal actuated mirror. For low voltage operation, the horizontal actuated mirror was designed with two PZT cantilever actuators, torsional bars, hinges, and a mirror plate with a size of $400{\mu}m{\times}400{\mu}m$. In particular, the torsional bars and hinges were carefully simulated and designed to secure the flatness of the mirror plate by using a finite element method (FEM) simulator. The measured tilting angle was approximately $2^{\circ}$ at the applied voltage of 5 V. An orthogonal vertical mirror with an extremely smooth surface texture was fabricated using KOH wet etching and a double-SOI (silicon-on-insulator) wafer with a (110) silicon wafer. The fabricated orthogonal vertical mirror was comprised of four pairs of two mutually orthogonal flat mirrors with $400{\mu}m4 (length) $\times400{\mu}m$ (height) $\times30{\mu}m$ (thickness). The cross angles and surface roughness of the orthogonal vertical mirror were orthogonal, almost $90^{\circ}$ and 3.523 nm rms, respectively. The proposed CCR was completed by combining the orthogonal vertical and horizontal actuated mirrors. Data transmission and modulation at a frequency of 10 Hz was successfully demonstrated using the fabricated CCR at a distance of approximately 50 cm.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2007년도 춘계학술대회A
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• pp.1613-1616
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• 2007

A microgripper using thermal actuator and SU-8 polymer was designed and fabricated to manipulate cells and microparts. A chip size of a microgripper was 3 mm ${\times}$ 5 mm. The thermally actuated microgripper consisted of two couples of hot and cold arm actuators. The high thermal expansion coefficient, 52 $ppm/^{\circ}C$, of SU-8 compared to silicon and metals, allows the actuation of the microgripper. Thickness and width of SU-8 as an end-effector were 26 ${\mu}m$ and 80 ${\mu}m$, respectively. Initial gap between left jaw and right jaw was 120 ${\mu}m$. The ANSYS program as FEM tool was introduced to analyze the thermal distribution and displacement induced by thermal actuators. $XeF_2$ gas was used for isotropic silicon dry etching process to release SU-8 end-effector. Mechanical displacements of the fabricated microgripper were measured by optical microscopy in the range of input voltage from 0 V to 2.5 V. The maximum displacement between two jaws of a microgripper Type OG 1_1 was 22.4 ${\mu}m$ at 2.5 V.

• Journal of the korean society of oceanography
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• 제34권4호
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• pp.200-206
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• 1999

Seawater sampling is the primary task for the study of the marine environmental parameters that require shipboard or laboratory experiments for their analyses, and is also required for the calibration of some instruments for in situ measurement. A new automatic bottle (AUTTLE) is developed for seawater sampling at any desired time and water depth by self-triggering. Both any type of single or assembled mooring for 15 days and manual actuation by using a remote messenger as existing instantaneous single point water samplers are possible. Its sampling capacity and the resolution of time setting are 2 liters and 1 second, respectively. The result of a field experiment with an optical backscattering sensor (OBS) and a total of 14 AUTTLES for the in situ calibration of the OBS shows that the AUTTLE must improve our understanding on the behavior of the sand/mud mixtures in the environments with high waves and strong tides. The AUTTLE will serve as a valuable instrument in the various fields of oceanography, especially where synchronized seawater sampling at several sites is required and/or the information in storm period is important.

• International Journal of Aeronautical and Space Sciences
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• 제4권1호
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• pp.75-87
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• 2003

The primary objective of this study is to demonstrate ground-based experiment for the attitude control of spacecraft. A two-axis rotational simulator with a flexible ann is constructed with on-off air thrusters as actuators. The simulator is also equipped with payload pointing capability by simultaneous thruster and DC servo motor actuation. The azimuth angle is controlled by on-off thruster command while the payload elevation angle is controlled by a servo-motor. A thruster modulation technique PWM(Pulse Width Modulation) employing a time-optimal switching function plus integral error control is proposed. An optical camera is used for the purpose of pointing as well as on-board rate sensor calibration. Attitude control performance based upon the new closed-loop control law is demonstrated by ground experiment. The modified switching function turns out to be effective with improved pointing performance under external disturbance. The rate sensor calibration technique by Kalman Filter algorithm led to reduction of attitude error caused by the bias in the rate sensor output.

• 정보저장시스템학회:학술대회논문집
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• 정보저장시스템학회 2005년도 추계학술대회 논문집
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• pp.190-194
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• 2005

There is a great demand of micro-actuators for mobile information devices such as SFF optical drives and mobile camera phones. However, conventional magnetic coils of electromagnetic motors are a major obstacle for miniaturization because of their complicated structures and large power consumption. In this paper, a linear ultrasonic motor to actuate focusing lens of mobile devices is proposed. The new actuator uses a ring type bimorph piezoelectric material, and $d_{31}$ mode is adopted for applying linear motion. The interaction between inertia force and friction force makes linear motion by high-frequency saw signal input. The saw signal gives steady forces on the one direction by asymmetric inclination property of the signal itself on time domain. A commercial FEM (ANSYS) was used in this investigation for simulating structural analysis, identification of dynamic property, such as resultant displacement and coupled analysis with piezoelectric material. To evaluate the performance of the new design, a prototype was manufactured and experiments were carried out. Experimental results show the actuator motion of 1.52 mm/s at 10 kHz input signal in 5 V.

• 정보저장시스템학회논문집
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• 제2권4호
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• pp.251-256
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• 2006

There is a great demand of micro-actuators for mobile information devices such as SFF optical drives and mobile phone cameras. However, the magnetic coils used in conventional electromagnetic motors are a major obstacle for the miniaturization because of their complicated structures and large power consumption. In this paper, a linear ultrasonic motor to actuate focusing lens of mobile devices is proposed. The new actuator uses a ring type bimorph piezoelectric material, and $d_{31}$ mode is adopted for applying linear motion. The interaction between inertia force and friction force makes linear motion by high-frequency saw signal input. The saw signal gives steady forces on the one direction by asymmetric inclination property of the signal itself on time domain. A commercial FEM(ANSYS) was used in this investigation for simulating structural analysis, identification of dynamic property, such as resultant displacement and coupled analysis with piezoelectric material. To evaluate the performance of the new design, a prototype was manufactured and experiments were carried out. Experimental results show the actuator motion of 5.4 mm/s at 10V saw signal of 41 kHz.

• 항공우주기술
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• 제10권2호
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• pp.121-127
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• 2011

추력기 기반 자세제어계 제어기 설계에서 인공위성의 관성모멘트는 중요한 설계 요소이다. 설계 과정에서 불확실성을 고려하기는 하지만 큰 규모의 태양전지판과 같은 유연 구조물을 가지는 정지궤도 위성의 경우 추력기의 작동 제어주기와 유연모드의 간섭을 피하기 위해 정확한 관성모멘트의 측정이 요구된다. 천리안 위성의 경우 전이궤도에서 임무궤도로 전환하기 전에 관성모멘트의 측정이 수행되었는데, 본 논문에서는 천리안위성의 관성모멘트 측정 방법을 유추해서 기술하고, 실제 궤도상 시험에서 측정된 관성모멘트 값과 비교하였다. 이를 통해, 자세제어계 상세 설계 단계에서 고려된 불확실성 범위 내에 관성모멘트 값이 유지되었음을 확인하여 설계의 적합성을 검증하였다.

• 대한기계학회논문집A
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• 제36권5호
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• pp.481-486
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• 2012

본 논문에서는 대변위 구동이 가능한 구동기의 설계를 위해 기존의 전자기력 구동기에 비해 낮은 스프링 상수를 갖는 굴곡형 스프링을 적용하고, 변위가 발생하는 방향으로만 로렌츠힘이 생기도록 굴곡형 스프링의 일부분만 자기장에 노출시키는 구동기를 제안한다. 굴곡형 스프링의 양쪽 부재가 자기장에 노출된 구조(prototype F)와 굴곡형 스프링의 한쪽 부재만을 자기장에 노출시킨 구조(prototype P)를 설계하고, 제작하여 실험한 결과 prototype P 가 굴곡형 스프링의 양쪽 부재를 자기장에 노출시킨 prototype F의 구동성능에 비해 $16.9{\pm}1.2%$의 진폭 증가를 보임을 실험적으로 검증하였다. 제안된 구동기는 제한된 면적 내에서 작은 전류(<50mA)와 작은 자기장(<0.3T)으로 대변위 구동을 가능케 하여 광 스위치 또는 광 단속기 등에 응용이 가능하다.

• 대한기계학회논문집A
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• 제34권5호
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• pp.557-560
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• 2010

본 논문에서는 4 비트 디지털구동기를 가변초점 유체렌즈에 적용하였다. 4 비트 디지털구동기는 총 16 단계로 렌즈곡면을 조절하여 렌즈의 초점을 변화시킨다. 본 가변초점 유체렌즈는 별도의 정밀 압력 및 유체량 제어기 없이 디지털구동기의 On/Off 제어만으로 렌즈곡면을 ${\pm}200nm$ 의 정밀도로 제어하여 초점거리를 3.63mm에서 38.6mm 까지 조절할 수 있다.