• Transactions of the Korean Society of Mechanical Engineers B
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• v.34 no.1
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• pp.73-76
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• 2010

The issue of inspection and characterization of microstructures has emerged as a major consideration in design, fabrication, and detection of MEMS devices. However, the conventional measurement techniques, including scanning electron microscopy (SEM) imaging, atomic force microscopy (AFM) scanning, and mechanical surface profiler, require often destructive process or may be difficult to measure with a wafer scale. In this paper, we characterize the surface profiles of microstructures using an optical scanner based on a DVD pick-up module. Scanning images of the microstructures are successfully generated using the intensity of reflected light from different depths of the surface profiles, based on the focus error signal (FES) from photodiodes. It is shown that the proposed optical scanner can be used as an alternative measurement system with high performance and low cost, compared to conventional measurement techniques.

• Korean Journal of Optics and Photonics
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• v.27 no.4
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• pp.133-142
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• 2016

This paper presents the design and simulation of a three-dimensional pixel-by-pixel scanning light detection and ranging (LIDAR) system with a microelectromechanical system (MEMS) scanning mirror and direct sequence optical code division multiple access (DS-OCDMA) techniques. It measures a frame with $848{\times}480$ pixels at a refresh rate of 60 fps. The emitted laser pulse waves of each pixel are coded with DS-OCDMA techniques. The coded laser pulse waves include the pixel's position in the frame, and a checksum. The LIDAR emits the coded laser pulse waves periodically, without idle listening time to receive returning light at the receiver. The MEMS scanning mirror is used to deflect and steer the coded laser pulse waves to a specific target point. When all the pixels in a frame have been processed, the travel time is used by the pixel-by-pixel scanning LIDAR to generate point cloud data as the measured result.

• Journal of Sensor Science and Technology
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• v.30 no.3
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• pp.170-174
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• 2021

As the rising attention to the medical and healthcare issue, Bio-MEMS (Micro electro mechanical systems) platform such as bio sensor, cell culture system, and microfluidics device has been studied extensively. Bio-MEMS platform mostly has high resolution structure made by biocompatible material such as polydimethylsiloxane (PDMS). In addition, three dimension structure has been applied to the bio-MEMS. Lithography can be used to fabricate complex structure by multiple process, however, non-rectangular cross section can be implemented by introducing optical apparatus to lithography technic. X-ray lithography can be used even for sub-micron scale. Here in, we demonstrated lines with round shape cross section using the tilted gold absorber which was deposited on the oblique structure as the X-ray mask. This structure was used as a mold for PDMS. Molded PDMS was applied to the cell culture platform. Moreover, molded PDMS was bonded to flat PDMS to utilize to the sub-micro channel. This work has potential to the large area bio-MEMS.

• Smart Structures and Systems
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• v.1 no.1
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• pp.63-82
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• 2005

This paper introduces a technology for robust and low maintenance cost sensor network capable to detect accelerations below a micro-g in a wide frequency bandwidth (above 1,000 Hz). Sensor networks with such performance are critical for navigation, seismology, acoustic sensing, and for the health monitoring of civil structures. The approach is based on the fabrication of an array of high sensitivity accelerometers, each utilizing Fabry-Perot cavity with wavelength-dependent reflectivity to allow embedded optical detection and serialization. The unique feature of the approach is that no local power source is required for each individual sensor. Instead one global light source is used, providing an input optical signal which propagates through an optical fiber network from sensor-to-sensor. The information from each sensor is embedded onto the transmitted light as an intrinsic wavelength division multiplexed signal. This optical "rainbow" of data is then assessed providing real-time sensing information from each sensor node in the network. This paper introduces the Fabry-Perot based accelerometer and examines its critical features, including the effects of imperfections and resolution estimates. It then presents serialization techniques for the creation of systems of arrayed sensors and examines the effects of serialization on sensor response. Finally, a fabrication process is proposed to create test structures for the critical components of the device, which are dynamically characterized.

• Journal of Sensor Science and Technology
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• v.21 no.3
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• pp.217-222
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• 2012

Optical coherence tomography(OCT) is a noninvasive optical imaging tool for biomedical applications. OCT can provide depth resolved two/three dimensional morphological images on biological samples. In this paper, we integrated an OCT system that was composed of an SLED(Superluminescent Light Emitting Diode, ${\lambda}_0$=1305 nm bandwith= 141 nm), a reference arm adopting a rapid scanning optical delay line(RSOD) to get high speed imaging, and a sample arm that used a micro electro mechanical systems(MEMS) scanning mirror. The sample arm contained a compact probe for imaging dental structures. The performance of the system was evaluated by imaging in-vivo human teeth with dental calculus, and the results indicated distinct appearance of dental calculus from enamel, gum or decayed teeth. The developed probe and system could successfully confirm the presence of dental calculus with a very high spatial resolution($6{\mu}m$).

• Journal of the Korea Society of Computer and Information
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• v.10 no.5 s.37
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• pp.123-132
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• 2005

In this Paper, we present an improvement of switch node for wavelength multiplex optical network. Currently because of quick increase of internet traffic a big network capacity is demanded. Wavelength multiplex optical network Provides the data transfer of high speed and the transparent characteristic of the data. Therefore optic network configuration is the most powerful technology in the future. It will be able to control the massive traffic from the optical network in order to transmit the multimedia information of very many quantify. Consequently the node where the traffic control is Possible, is demanded. The optical switch node which manages efficiently the multiple wavelength was Proposed. This switch is composed of a optical switch module for switching and a wavelength converter module for wavelength conversion. It will be able to compose the switch fabric without optical/electro or electro/optical conversion using optical MEMS(Micro Electro Mechanical Switches) module. Finally, we present the good test result regarding the operational qualify of the switch fabric and the performance of optical signal from the switch node. The proposed switch node of the optic network will be able to control the massive traffic with all optical.

• The Optical Journal
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• v.14 no.4 s.80
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• pp.56-58
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• 2002

최근들어 FPD(평판 디스플레이), MEMS, 반도체, 광부품 등의 분야에서 극미세화의 경향이 보이고 있다. 이들의 가공기술과 더불어 검사장비 역시 2차원 마이크로미터의 수준에서 3차원 나노미터 정밀도를 갖는 장비로 급속도로 교체되고 있는 것이 현실이다. 본 고에서는 반도체에 이어 한국의 기술력을 세계 1위로 끌어올린 FPD 분야에서 3차원 검사장비의 활용을 중심적으로 기술 및 시장동향을 살펴보고자 한다.

• Ceramist
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• v.7 no.3
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• pp.10-14
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• 2004

최근 광 네트워크 기술은 놀라운 발전을 거듭하고 있다. 이러한 이유는 광섬유(optical fiber)가 일반 케이블에 비해서 탁월한 장점들이 있기 때문인데, 예를 들면 넓은 대역폭, 낮은 손실, 케이블간의 전자기적인 간섭(electromagnetic interference)에 자유로운 점, 그리고 특히 WDM(Wavelength Division Multiplexing)에 의한 네트워크 용량의 증가는 광섬유가 가지고 있는 가장 큰 매력일 것이다. (중략)

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.04a
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• pp.454-459
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• 2013

For the purpose of rapid development and superior design quality assurance, sophisticated finite element model for SOM(Spatial Optical Modulator) piezo actuator of MOEMS device has been developed and evaluated for the accuracy of dynamics and residual stress analysis. Parametric finite element model is constructed using ANSYS APDL language to increase the design and analysis performance. Geometric dimensions, mechanical material properties for each thin film layer are input parameters of FE model and residual stresses in all thin film layers are simulated by thermal expansion method with psedu process temperature. $6^{th}$ mask design samples are manufactured and $1^{st}$ natural frequency and 10V PZT driving displacement are measured with LDV. The results of experiment are compared with those of the simulation and validate the good agreement in $1^{st}$ natural frequency within 5% error. But large error over 30% occurred in 10V PZT driving displacement because of insufficient PZT constant $d_{31}$ measurement technology.

• Proceedings of the Optical Society of Korea Conference
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• 2003.02a
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• pp.308-309
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• 2003

최근 광통신의 발전은 광 통신 소자의 제작시 집적화, 소형화, 경량화 그리고 저가격화를 원하게 되었다. 이러한 문제점을 해결하기 위해, 기판 위에 광소자를 집적하는 미세 광학 벤치 (Micro Optical Bench)에 대한 많은 연구가 진행되고 있는 중이다. MEMS(Micro Electro Mechanical System) 공정기술인 벌크(bulk) 마이크로 머시닝 기술을 이용함으로서 하나의 기판 위에 광소자들을 조립하는 미세 광학 벤치를 구현 할 수 있다. (중략)