• JSTS:Journal of Semiconductor Technology and Science
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• v.17 no.3
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• pp.319-325
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• 2017

Through silicon via (TSV) technology is extensively used in 3D IC integrations. The special structure of the TSV is realized by CMP (Chemically Mechanical Polishing) process with a high Cu removal rate and, low dishing, yielding fine topography without defects. In this study, we investigated the electrochemical behavior of copper slurries with various inhibitors in the Cu CMP process for advanced TSV applications. One of the slurries was carried out for the most promising process with a high removal rate (${\sim}18000{\AA}/Min$ @ 3 psi) and low dishing (${\sim}800{\AA}$), providing good microstructure. The effects of pH value and $H_2O_2$ concentration on the slurry corrosion potential and Cu static etching rate (SER) were also examined. The slurry formula with a pH of 6 and 2% $H_2O_2$, hadthe lowest SER (${\sim}75{\AA}/Min$) and was the best for TSV CMP. A novel Cu TSV CMP process was developed with two CMPs and an additional annealing step after some of the bulk Cu had been removed, effectively improving the condition of the TSV Cu surface and preventing the formation of crack defects by variations in wafer stress during TSV process integration.

• Korean Journal of Materials Research
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• v.25 no.9
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• pp.462-467
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• 2015

Pellicle is defined as a thin transparent film stretched over an aluminum (Al) frame that is glued on one side of a photomask. As semiconductor devices are pursuing higher levels of integration and higher resolution patterns, the cleaning of the Al flame surface is becoming a critical step because the contaminants on the Al flame can cause lithography exposure defects on the wafers. In order to remove these contaminants from the Al frame, a highly concentrated nitric acid ($HNO_3$) solution is used. However, it is difficult to fully remove them, which results in an increase in the Al surface roughness. In this paper, the pellicle frame cleaning is investigated using various cleaning solutions. When the mixture of sulfuric acid ($H_2SO_4$), hydrofluoric acid (HF), hydrogen peroxide ($H_2O_2$), and deionized water with ultrasonic is used, a high cleaning efficiency is achieved without $HNO_3$. Thus, this cleaning process is suitable for Al frame cleaning and it can also reduce the use of chemicals.

• Journal of the Korean Society of Surveying, Geodesy, Photogrammetry and Cartography
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• v.33 no.5
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• pp.427-436
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• 2015

This study aims to select an optimal site for the development of small-scaled artificial ground water recharge system with the purpose of 50ton/day pumping in dry season. First of all, the topography shape satisfying the numerous factors of a hydraulic model experiment is defined and an appropriate pumping efficiency is calculated through the model experiment of injection and pumping scenario. In next step, GIS(Geographic Information System) database are constructed by processing several geospatial data to explore the optimal site. In detail, watershed images are generated from DEM(Digital Elevation Model) with 5m cell size, which is set for the minimum area of the optimal site selection. Slope maps are made from DEM to determine the optimal hydraulic gradient to procure the proper aquifer undercurrent period. Finally, the suitable site for artificial recharge system is selected using an integration of overall data, such as an alluvial map, DEM, orthoimages, slope map, and watershed images.

• Journal of the Computational Structural Engineering Institute of Korea
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• v.16 no.3
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• pp.311-319
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• 2003

This paper aims at investigating the exact dynamic response of the system undergoing a exponential impact force from the viewpoints of conservations of momentum and energy. The midpoint method applied in the Newmark's family algorithm is found to be identical to the case of the application of the trapezoidal method which provides conservations of momentum and energy. For the linear impact force the mid point, the trapezoidal and the (n+1) point method exactly meet the conservation characteristics independent of the size of integration interval. On the other hand, constants for the dynamic motion resulting from the nonlinear impact are underestimated or overestimated by these method mentioned above. To overcome this indispensible error, the Simpson 1/3 method as one of multi step methods whose advantages is to use longer time interval with the same number of evaluation functions is adopted for the exact conservations of momentum and energy. Moreover, the suggested method is expected to expand the similar algorithm for the general dynamic motion including finite rotations.

• Journal of the Society of Naval Architects of Korea
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• v.38 no.1
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• pp.1-8
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• 2001

The computations of the turbulent flow around the ship models with the free-surface effects were carried out. Incompressible Reynolds-Averaged Navier-Stokes equations were solved by using an explicit finite-difference method with the nonstaggered grid system. The method employed second-order finite differences for the spatial discretization and a four-stage Runge-Kutta scheme for the temporal integration. For the turbulence closure, a modified Baldwin-Lomax model was exploited. The location of the free surface was determined by solving the equation of the kinematic free-surface condition using the Lax-Wendroff scheme and a free-surface conforming grid was generated at each time step so that one of the grid boundary surfaces always coincides with the free surface. An inviscid approximation of the dynamic free-surface boundary condition was applied as the boundary conditions for the velocity and pressure on the free surface. To validate the computational method developed in the present study, the computations were carried out for beth Wigley and Series 60 $C_B=0.6$ ship model and the computational results showed good agreements with the experimental data.

• Nuclear Engineering and Technology
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• v.52 no.2
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• pp.230-237
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• 2020

In this part, an implicit time dependent solution is presented for the Boltzmann transport equation discretized by the analytic coarse mesh finite difference method (ACMFD) over the spatial domain as well as the simplified P₃ (SP₃) for the angular variable. In the first part of this work we proposed a SP₃-ACMFD approach to solve the static eigenvalue equations which provide the initial conditions for temp dependent equations. Having solved the 3D multi-group SP₃-ACMFD static equations, an implicit approach is resorted to ensure stability of time steps. An exponential behavior is assumed in transverse integrated equations to establish a relationship between flux moments and currents. Also, analytic integration is benefited for the time-dependent solution of precursor concentration equations. Finally, a multi-channel one-phase thermal hydraulic model is coupled to the proposed methodology. Transient equations are then solved at each step using the GMRES technique. To show the sufficiency of proposed transient SP₃-ACMFD approximation for a full core analysis, a comparison is made using transport peers as the reference. To further demonstrate superiority, results are compared with a 3D multi-group transient diffusion solver developed as a byproduct of this work. Outcomes confirm that the idea can be considered as an economic interim approach which is superior to the diffusion approximation, and comparable with transport in results.

• Journal of the HCI Society of Korea
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• v.4 no.1
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• pp.29-34
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• 2009

The food culture has been advanced with technical developments. The technical advances of food refrigeration and refrigerated transport system enable people to enjoy raw and fresh foods in the middle of dessert and in current days the development of information technology helps people to get variable information as like the information of food stuffs, freshness, the history of cooking, other useful information. We need to research the information architecture of food culture, which means Information technology grafts on the food culture, to provide diverse services that information technology utilized. As the first step of our research, we define the context of food culture for integration of food culture and Information technology, and find out the relationships between each factors. This research is considered the food culture as a medium between human to human relationships and the food, and redefined it with a relationship viewpoint. We've selected Yam cha that is one of the famous foods in southern China as a research item and referenced data that we researched with students in Guangzhou College of Art, China.

• Genomics & Informatics
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• v.4 no.3
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• pp.110-117
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• 2006

In microarray technology, many diverse experimental features can cause biases including RNA sources, microarray production or different platforms, diverse sample processing and various experiment protocols. These systematic effects cause a substantial obstacle in the analysis of microarray data. When such data sets derived from different experimental processes were used, the analysis result was almost inconsistent and it is not reliable. Therefore, one of the most pressing challenges in the microarray field is how to combine data that comes from two different groups. As the novel trial to integrate two data sets with batch effect, we simply applied standardization to microarray data before the significant gene selection. In the gene selection step, we used new defined measure that considers the distance between a gene and an ideal gene as well as the between-slide and within-slide variations. Also we discussed the association of biological functions and different expression patterns in selected discriminative gene set. As a result, we could confirm that batch effect was minimized by standardization and the selected genes from the standardized data included various expression pattems and the significant biological functions.

• Journal of Digital Convergence
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• v.9 no.3
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• pp.213-223
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• 2011

Today, information resource management is key task in the data-centre as like as NCIA(National computing integration Agency of Korea). In IRM, the server's performance is one of the core elements, it must be importantly managed during whole of system life cycle. As first step of such management is in purchase phase, it is very important that the optimum specification is determined. The server's specification contains such as performance of core, criteria for performance verification, minimum cores, etc. There is constant controversy concerning the minimum cores. In this article, we present criteria for determination of the minimum cores that considered three aspects: (1) Costly aspect as TCO(Total Cost of Ownership, (2) Environmental aspect as Green IT (3) Technical aspect as RAS(Reliability, Availability, Serviceability) functionality. Finally, we propose scheme to ideally determinate the minimum cores.

• Journal of Information Science Theory and Practice
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• v.8 no.1
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• pp.56-67
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• 2020

Over the years, cultural mapping methods have been used in several applications and contexts, for diverse cultural assets and to create new conditions for the development of local and regional resources. These methods were inspired by the development of big urban centres and regions, which have been the great engine of cultural mapping growth. The main objectives of the present paper are to provide a literature review on cultural mapping methodologies and to develop exploratory research on crowdsource tools on creative tourism which were applied to one Portuguese municipality in 2017. The research was supported by the implementation and integration of geographic information systems (GIS) and web mapping, which will become part of the solution for the growth of less developed territories and to make more interactive tourist activities. Web mapping's contribution to enhance crowd participation was measured via analysis of 12 digital photos shared through crowdsourcing. The originality of this research lies in the attempt to develop a new model for creative tourism, trying to extend the implementation of Web Mapping crowdsourcing to deprived low density territories. Results show how public participation can be amplified for the tourism market by crowdsourcing tools. These tools look very promising since they can help several members of the public at different ages to contribute to territorial knowledge, engage in activities, and collaborate through digital tools. It is a step to fulfil the lack of studies in this subject and it contributes to the way we think about future studies.