• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.599-603
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• 2003

This paper present an error compensation system and On-Machine Measurement(OMM) system for improving the machining accuracy of ultra-precision lathe. The Fast-Tool-Servo(FTS) driven by a piezoelectric actuator is applied for error compensation system. The controller is implemented on the 32bit DSP for feedback control of piezoelectric actuator. The control system is designed to compensates three kinds of machining errors such as the straightness error of X-axis slide, the thermal growth error of the spindle. and the squareness between spindle and X-axis slide. OMM is preposed to measure the finished profile of workpiece on the machine-tool using capacitive sensor with highly accurate ruby tip probe guided by air bearing. The data acquisition system is linked to the CNC controller to get the position of each axis in real-time. Through the experiments, it is founded that the thermal growth of spindle and tile squareness error between spindle and X-axis slide influenced to machining error more than straightness error of X-axis slide in small travel length. These errors were simulated as a sinusoidal signal which has very low frequency and the FTS could compensate the signal less than 30 m. The implemented OMM system has been tested by measuring flat surface of 50 mm diameter and shows measurement error less than 400 mm

• Journal of the Korean Society for Precision Engineering
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• v.25 no.8
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• pp.21-28
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• 2008

Fizeau interferometer is used for inspecting the lens surface profile accurately. This study is focused on the design and optical measuring techniques for large optical components, such as a reflection mirror for large area lithography or astronomical purpose. A tower type Fizeau interferometer is designed and set up in horizontally with a 45$^{\circ}$ fold mirror which makes easy to align the optical path of heavy interferometer system. To align the optical path, a five-axes stage for the interferometer is required. This study shows a method of the 45$^{\circ}$ fold mirror alignment by using a three-axis stage instead of adjusting the interferometer itself or measuring object. This system will be installed on the large optics polishing machine during the manufacturing process as an on-machine inspection system.

• Journal of Mechanical Science and Technology
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• v.18 no.8
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• pp.1358-1367
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• 2004

As a part II of theis research, new local inspection planning strategy is proposed in this paper based on the proposed inspection feature extraction method. In the local inspection planning stage, each feature is decomposed into its constituent geometric elements for more effective inspection planning. The local inspection planning for the decomposed features are performed to determine: (1) the suitable number of measuring points, (2) their locations, and (3) the optimum probing paths to minimize measuring errors and times. The fuzzy set theory, the Hammersley's algorithm and the TSP method are applied for the local inspection planning. Also, a new collision checking algorithm is proposed for the probe and/or probe holder based on the Z-map concept. Finally, the results are simulated and analyzed to verify the effectiveness of the proposed methods.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.287-292
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• 2002

This paper presents a reverse engineering method for compound surfaces using vision system. A CNC machining center is used as a measuring station, which is equipped with slit beam generator and vision probe. Since obtained data using slit beam or laser scanner may have much data loss along the edge of compound surfaces, an algorithm is presented in this study to recover missing geometric data at such region. First, b-spline interpolation is applied to extract edge information of the surface, and as a next step, b-spline approximation is applied to recover the missing geometric data. Finally, b-spline skinning method is applied to regenerate the surface information. Appropriate simulation and experimental works are preformed to very the effectiveness of the proposed methods.