Electrical and Optical Properties of ITZO Thin Films Deposited by RF Magnetron Sputtering (고주파 마그네트론 스퍼터링법에 의해 제작된 ITZO (indium tin zinc oxide) 박막의 전기적 및 광학적 특성)
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- Journal of the Korea Institute of Information and Communication Engineering
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- v.17 no.8
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- pp.1873-1878
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- 2013