• Journal of the Microelectronics and Packaging Society
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• v.28 no.1
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• pp.39-46
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• 2021

The quantitative measurement of interfacial adhesion energy (Gc) of multilayer thin films for Cu interconnects was investigated using a double cantilever beam (DCB) and 4-point bending (4-PB) test. In the case of a sample with Ta diffusion barrier applied, all Gc values measured by the DCB and 4-PB tests were higher than 5 J/㎡, which is the minimum criterion for Cu/low-k integration without delamination. However, in the case of the Ta/Cu sample, measured Gc value of the DCB test was lower than 5 J/㎡. All Gc values measured by the 4-PB test were higher than those of the DCB test. Measured Gc values increase with increasing phase angle, that is, 4-PB test higher than DCB test due to increasing plastic energy dissipation and roughness-related shielding effects, which matches well interfacial fracture mechanics theory. As a result of the 4-PB test, Ta/Cu and Cu/Ta interfaces measured Gc values were higher than 5 J/㎡, suggesting that Ta is considered to be applicable as a diffusion barrier and a capping layer for Cu interconnects. The 4-PB test method is recommended for quantitative adhesion energy measurement of the Cu interconnect interface because the thermal stress due to the difference in coefficient of thermal expansion and the delamination due to chemical mechanical polishing have a large effect of the mixing mode including shear stress.

• 한국연소학회:학술대회논문집
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• 2006.04a
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• pp.75-78
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• 2006

Disposal of highly toxic wastes like polychlorinated biphenyls (PCBs) is very difficult. These substances create a growing mountain of problematic waste that has to be disposed properly. Conventional technologies that are based on common burning(rotary kiln, ${\sim}1100^{\circ}C$) and plasma technology(${\sim}10000^{\circ}C$) do not satisfy important conditions. for example, complete combustion of the toxic waste and the price of waste disposal. The combustor like a rocket engine is operated at relatively high pressure(${\sim}15$ bar) and relatively high temperature(>$3000^{\circ}C$) that are ideal for the complete destruction of extremely toxic substances. In this study, test compound($_o-DCB$) was dissolved in kerosine with a concentration of 10%. Pure gas oxygen was used as an oxidant. Analysis showed that the destruction efficiency achieved for ${o}-DCB$ was 99.9999% or better. The results show that a combustor based on liquid propllant rocket technology is a validated tool for the disposal of highly toxic waste, and a good alternative technology when applied to the destruction of extremely toxic wastes.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.1
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• pp.91-101
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• 2000

The emission sources of volatile organic compounds (VOCs) are wastewater treatment plants. sanitary landfills, automobile industries, and so on. The VOCs are harmful to human beings because of their toxicity and carcinogenicity, and cause the serious air pollution problem producing ozone ($O_3$) as a result of photochemical reaction. To investigate the emission of VOCs from wastewater treatment plant, aeration basins at the City of Los Angeles' Hyperion Treatment Plant were selected and measured flux was compared with calculated flux. For compounds commonly associated with wastewater (DCM, TCM, PCE, UM, DCB, UND) and not expected in vehicle exhaust or ambient air coming off the ocean, concentrations immediately downwind of the aeration basins were a factor of ten or higher than those measured in the upwind air. The airborne flux of less degradable or non-biodegradable compounds, e.g., DCE, DCM, TCA, DCA, TCM, PCE, DCB, through an imaginary plane at the downwind side of the aeration basins was in agreement with the estimated flux from measured liquid phase concentrations. Henry's constant. aeration rate, and an assumption of bubble saturation. For several compounds (PCE, DCE, TCA), the ratio (measured flux/calculated flux) is almost unity.

• Applied Chemistry for Engineering
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• v.19 no.3
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• pp.259-263
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• 2008

The catalytic activity of the used catalyst, $V_2O_5/TiO_2$, for MSW incinerators was investigated focusing on its regeneration. As the result of the experimental analysis, the NOx removal efficiency difference between the fresh catalyst and used catalyst is about 60% at $260^{\circ}C$ and 1, 2-dichlorobenzen (1, 2-DCB) removal efficiency difference is about 14% at $200^{\circ}C$, in honeycomb test. And the catalysts, both the fresh and used, were characterized by XRD, TGA, and ICP techniques in order to investigate the deactivation. On the basis of the results, it is found that the used catalyst is deactivated by ammonium-sulfates, heavy metals (Pb, As etc.), alkali metals (Ca), and phase transfer of $TiO_2$. Also calcination treatment under nitrogen and air condition was excellent than washing and calcination treatment.

• Clean Technology
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• v.6 no.2
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• pp.121-127
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• 2000

There are several kinds of hazardous materials in incinerator flue gas, such as particulate matter, acid gas, heavy metal, dioxin, etc. The activated carbon adsorption is considered as one of the methods removing dioxin from flue gas. Without any additional equipment and facilities, the activated carbon was mixed with lime and sprayed in the semi-drying reactor of an incinerator and filtered in the bag filter, and its efficiency of removing hazardous organic material was investigated. 1,2-dichlorobenzene (o-DCB) was used as a precursor material of dioxin and the effects of the activated carbon amount, the operating temperature of the reactor, and the atomizer r.p.m were measured and analyzed. Experimental results showed that the optimum outlet temperature of the reactor was $145^{\circ}C$ considering the performance of the bag filter, and the adsorption performance improved with the increase of the atomizer r.p.m. Also the performance of removing o-DCB in the bag filter is higher than of the semi-drying reactor.

• Journal of the Korean Society of Food Science and Nutrition
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• v.28 no.3
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• pp.511-519
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• 1999

To prevent the denaturation of ficin(EC 3.4.22.3) that is a proteolytic enzyme in fig(Ficus carica L.), fig conserve was heated to 55oC. The fig conserve was added as a tenderizer to native Korean cattle beef(KCB), dairy cattle beef(DCB), castrated dairy cattle beef(CDCB), and imported beef(IB). The composition of free amino acids, hydroxyproline content, shear force, cooking loss, morphological changes and sensory evaluation were then investigated to observe the effect of tenderizing beef with fig conserve. Free amino acids and cooking loss of treated beef were higher than those of control, whereas hydroxyproline and shear force were lower. Glutamine in treated beef decreased relatively but asparagine increased. Hydroxyproline was found, in increasing order of abundance, in DCB, CDCB, IB and KCB. By portion, loin was higher than tenderloin in free amino acids, hydroxyproline and shear force but was lower in cooking loss. Observation with a light microgram revealed a surprising loss of muscle fiber in treated beef. In sensory evaluation of uncooked beef, the control was redder than the treated beef(p<0.01~p<0.05). Treatment with fig conserve increased the juiciness of both cooked CDCB and IB(p<0.001) and decreased their hardness(p<0.01~p<0.001).

• Journal of the Korean Chemical Society
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• v.40 no.7
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• pp.501-508
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• 1996

The base-catalysed carbonato or oxalato ring opening of cis-${\beta}-[Co(3,2,3,-tet))CO_3\;or\;C_2O_4)]^+$(3,2,3-tet=4,7-diazadecane-1,10-diamine, $C_2O_4$=oxalate) has been investigated in aqueous solution and in mixed aqueous-organic solvent. The rearrangement of 3,2,3-tet and carbonato or oxalato ring opening of cis-${\beta}-[Co(3,2,3,-tet))CO_3\;or\;C_2O_4)]^+$ occurred via the dissociation of one of the two coordinating carbonato or oxalato oxygen atoms. The resulting product was cis-${\alpha}-[Co(3,2,3-tet)(OH)(OCO_2\;or\;OC_2O_3)_3].$ It has been suggested that the base-catalysed reaction of cis-${\beta}-[Co(3,2,3,-tet))CO_3\;or\;C_2O_4)]^+$ takes place via the Dcb(dissociative conjugated base) mechanism. The other oxygen atom of carbonato or oxalato was dissociated continuously to give cis-${\alpha}-[Co(3,2,3-tet)(OH)_2]^+.$ Cis-${\alpha}-[Co(3,2,3-tet)(OH)_2]^+$ was isomerized to cis-${\beta}-[Co(3,2,3-tet)(OH)_2]^+.$

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2009.10a
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• pp.152-152
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• 2009

유기태양전지 Solvent인 1-2-Dichlorobenzene(DCB)에 1-Bromonaphtalene(BN)을 첨가하여 Air분위기에서 ZnO film을 이용한 유/무기 복합 태양전지를 만들었다. 셀의 구조는 ITO/ZnO nanofilm/Poly(3-hexylthiophene(P3HT):[6,6]-Phenyl C60-Butyric acid methyl ester(PCBM)/PEDOT:PSS/Ag로 제작했다. 두께 70nm ZnO film은 전기화학적 방법으로 ITO위에 전착하였다. AM1.5조건에서 Solar simulator로 측정한 결과 BN을 첨가한 셀에서 Jsc값이 증가되었다. Jsc값의 증가는 BN이 결정화를 향상시켜 효율이 증가됨을 확인하였다.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.48 no.2
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• pp.28-34
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• 2011

In previous reports, we investigated a selective assembly method of fabricating single-walled carbon nanotubes (SWCNTs) on a silicon-dioxide ($SiO_2$) surface by using only a photolithographic process. In this paper, we have fabricated field effect transistors (FETs) with SWCNT channels by using the technique mentioned above. Also, we have electrically measured gating effects of these FETs under different source-drain voltages ($V_{SD}$). These FETs have been fabricated for sensor applications. Photoresist (PR) patterns have been made on a $SiO_2$-grown silicon (Si) substrate by using a photolithographic process. This PR-patterned substrate have been dipped into a SWCNT solution dispersed in dichlorobenzene (DCB). These PR patterns have been removed by using aceton. As a result, a selectively-assembled SWCNT channels in FET arrays have been obtained between source and drain electrodes. Finally, we have successfully fabricated 4 FET arrays based on SWCNT-channels by using our simple self-assembly technique.

• Proceedings of the Korean Society of Soil and Groundwater Environment Conference
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• 1997.05a
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• pp.79-82
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• 1997

토양내에서 오염유기물질이 불포화토양내에 유입될 때의 dispersion coefficient를 adsorption과 desorption과정에 대해 알아보았다. apparent dispersion coefficient를 측정하기 위해 일상적인 상대습도(46%)조건에서 parametric analysis를 행하였다. 실험에 사용된 토양은 fine sand와 silt-clay혼합시료였고, 흐름방향은 상향과 하향으로 하였다. 그리고, Freon gas를adsorbing solute로 사용하였다. 오염물질로는 DCM, TCE, DCB를 사용하였다. 분석을 위해서 linear와 probability scale의 breakthrough curve를 사용하였다. 공기에서의 diffusion coefficient의 예측을 위하여 Graham's law를 계산에 사용하였고, DCM diffusion coefficient는 0.098$\textrm{cm}^2$/s로 계산되었다. 연구결과, adsorption과 desorption의 속도는 차이가 있는 것으로 나타났으며, diffusion이 flow regime을 좌우하는 것으로 나타났다. 그리고, desorption에서의 D$^{a}$ D$^{o}$ 는 1보다 클수도 있다. 또한, dispersion은 silt-clay혼합시료에서의 속도와 함께 증가한다. dispersion은 Freon의 sorption방향에 크게 의존한다.