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Preparation of Al2O3 Thin Films by Atomic Layer Deposition Using Dimethylaluminum Isopropoxide and Water and Their Reaction Mechanisms

  • An, Ki-Seok;Cho, Won-Tae;Sung, Ki-Whan;Lee, Sun-Sook;Kim, Yun-Soo
    • Bulletin of the Korean Chemical Society
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    • v.24 no.11
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    • pp.1659-1663
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    • 2003
  • $Al_2O_3$ thin films were grown on H-terminated Si(001) substrates using dimethylaluminum isopropoxide [DMAl: $(CH_3)_2AlOCH(CH_3)_2$], as a new Al precursor, and water by atomic layer deposition (ALD). The selflimiting ALD process by alternate surface reactions of DMAI and $H_2O$ was confirmed from measured thicknesses of the aluminum oxide films as functions of the DMAI pulse time and the number of DMAI-$H_2O$ cycles. Under optimal reaction conditions, a growth rate of ~1.06 ${\AA}$ per ALD cycle was achieved at the substrate temperature of $150\;^{\circ}C$. From a mass spectrometric study of the DMAI-$D_2O$ ALD process, it was determined that the overall binary reaction for the deposition of $Al_2O_3\;[2\;(CH_3)_2AlOCH(CH_3)_2\;+\;3\;H_2O\;{\rightarrow}\;Al_2O_3\;+\;4\;CH_4\;+\;2\;HOCH(CH_3)_2]$can be separated into the following two half-reactions: where the asterisks designate the surface species. Growth of stoichiometric $Al_2O_3$ thin films with carbon incorporation less than 1.5 atomic % was confirmed by depth profiling Auger electron spectroscopy. Atomic force microscopy images show atomically flat and uniform surfaces. X-ray photoelectron spectroscopy and cross-sectional high resolution transmission electron microscopy of an $Al_2O_3$ film indicate that there is no distinguishable interfacial Si oxide layer except that a very thin layer of aluminum silicate may have been formed between the $Al_2O_3$ film and the Si substrate. C-V measurements of an $Al_2O_3$ film showed capacitance values comparable to previously reported values.

Evaluation of Variation in Residual Strength of Carbon Fiber Reinforced Plastic Plate with a Hole Subjected to Fatigue Load (피로하중에 의한 홀 노치 탄소섬유강화 복합재의 잔류강도변화 평가)

  • Kim, Sang-Young;Kang, Min-Sung;Koo, Jae-Mean;Seok, Chang-Sung
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.10
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    • pp.1411-1417
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    • 2010
  • CFRP (Carbon Fiber Reinforced Plastic) has received considerable attention in various fields as a structural material, because of its high specific strength, high specific stiffness, excellent design flexibility, favorable chemical properties, etc. Most products consisting of several parts are generally assembled by mechanical joining methods (using rivets, bolts, pins, etc.). Holes must be drilled in the parts to be joined, and the strength of the components subjected to static and fatigue loads caused by stress concentration must be decreased. In this study, we experimentally evaluated the variation in the residual strength of a holenotched CFRP plate subjected to fatigue load. We repeatedly subjected the hole-notched specimen to fatigue load for a certain number of cycles, and then we investigated the residual strength of the hole-notched specimen by performing the fracture test. From the results of the test, we can observe the initiation of a directional crack caused by the applied fatigue load. Further, we observed that the residual strength increases with a decrease in the notch effect due to this crack. It was evaluated that the residual strength increases to a certain level and subsequently decreases. This variation in the residual strength was represented by a simple equation by using a model of the decrease in residual strength for plain plate, which was developed by Reifsnider and a stress redistribution model for hole-notched plate, which was developed by Yip.

Changes of Adsorption Capacity and Structural Properties during in situ Regeneration of Activated Carbon Bed Using Ozonated Water (오존수 산화를 이용한 활성탄 흡착탑의 현장 재생 시 흡착용량 및 구조특성의 변화)

  • Lee, Jinjoo;Lee, Kisay
    • Applied Chemistry for Engineering
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    • v.31 no.3
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    • pp.341-345
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    • 2020
  • An in situ regeneration of activated carbon bed using an ozonated water was studied in order for avoiding the carbon loss, contaminant emission and time consuming for discharge-regeneration-repacking in a conventional thermal regeneration process. Using phenol and polyethylene glycol (PEG) as adsorbates, the adsorption breakthrough and in situ regeneration with the ozonated water were repeated. These organics were supposed to degrade by the oxidation reaction of ozone, regenerating the bed for reuse. As the number of regeneration increased, the adsorption capacity for phenol was reduced, but the change was stabilized showing no further reduction after reaching a certain degree of decrement. The reduction of adsorption capacity was due to the increase of pore size resulting in the decrease of specific surface area during ozonation. The adsorption capacity of phenol decreased after the ozonated regeneration because the in-pore adsorption was prevalent for small molecules like phenol. However, PEG did not show such decrease and the adsorption capacity was constantly maintained after several cycles of the ozonated regeneration probably because the external surface adsorption was the major mechanism for large molecules like PEG. Since the reduction in the pore size and specific surface area for small molecules were proportional to the duration of contact time with the ozonated water, careful considerations of the solute size to be removed and controlling the contact time were necessary to enhance the performance of the ozonated in situ regeneration of activated carbon bed.

A Study on the Atomic-Layer Deposition Mechanism and Characteristics of TiN Films Deposited by Cycle-CVD (Cycle-CVD법으로 증착된 TiN 박막의 ALD 증착기구와 특성에 관한 연구)

  • Min, Jae-Sik;Son, Young-Woong;Kang, Won-Gu;Kang, Sang-Won
    • Korean Journal of Materials Research
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    • v.8 no.5
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    • pp.377-382
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    • 1998
  • Atomic layer deposition(ALD) of amorphous TiN films on $SiO_2$ between 17$0^{\circ}C$ and 21O$^{\circ}C$ has been investigated by alternate supply of reactant sources, Ti[N($C_2,H_5,CH_3)_2]_4$ [tetrakis(ethylmethylamminoltitanium: TEMAT] and $NH_3$. Reactant sources were injected into the reactor in the order of TEMAT vapor pulse, Ar gas pulse, $NH_3$. gas pulse and Ar gas pulse. Film thickness per cycle was saturated at around 1.6 monolayer(MU per cycle with sufficient pulse times of reactant sources at 20$0^{\circ}C$. The results suggest that film thickness per cycle could be beyond 1 MLicycie in ALD, which were explained by rechemisorption mechanisms of reactant sources. The ideal linear relationship be¬tween number of cycles and film thickness is confirmed. As a results of surface limited reactions of ALD, step cover¬age was excellent. Particles caused by the gas phase reactions between TEMAT and NH3 were almost free because TEMAT was seperated from $NH_3$ by the Ar pulse. In spite of relatively low substrate temperature, carbon impurity was incorporated below 4 at%.

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Reducing the Test Time for Chemical/Mechanical Durability of Polymer Electrolyte Membrane Fuel Cells (고분자연료전지의 화학적/기계적 내구성 평가 시간 단축)

  • Sohyeong Oh;Donggeun Yoo;Kim Myeonghwan;Park Jiyong;Choi Yeongjin;Kwonpil Park
    • Korean Chemical Engineering Research
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    • v.61 no.4
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    • pp.517-522
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    • 2023
  • A chemical/mechanical durability test of polymer membrane evaluation method is used in which air and hydrogen are supplied to the proton exchange membrane fuel cell (PEMFC) and wet/dry is repeated in the open circuit voltage (OCV) state. In this protocol, when wet/dry is repeated, voltage increase/decrease is repeated, resulting in electrode degradation. When the membrane durability is excellent, the number of voltage changes increases and the evaluation is terminated due to electrode degradation, which may cause a problem that the original purpose of membrane durability evaluation cannot be performed. In this study, the same protocol as the department of energy (DOE) was used, but oxygen was used instead of air as the cathode gas, and the wet/dry time and flow rate were also increased to increase the chemical/mechanical degradation rate of the membrane, thereby shortening the durability evaluation time of the membrane to improve these problems. The durability test of the Nafion 211 membrane electrode assembly (MEA) was completed after 2,300 cycles by increasing the acceleration by 2.6 times using oxygen instead of air. This protocol also accelerated degradation of the membrane and accelerated degradation of the electrode catalyst, which also had the advantage of simultaneously evaluating the durability of the membrane and the electrode.

Early Production of Large-area Crop Classification Map using Time-series Vegetation Index and Past Crop Cultivation Patterns - A Case Study in Iowa State, USA - (시계열 식생지수와 과거 작물 재배 패턴을 이용한 대규모 작물 분류도의 조기 제작 - 미국 아이오와 주 사례연구 -)

  • Kim, Yeseul;Park, No-Wook;Hong, Sukyoung;Lee, Kyungdo;Yoo, Hee Young
    • Korean Journal of Remote Sensing
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    • v.30 no.4
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    • pp.493-503
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    • 2014
  • A hierarchical classification scheme, which can reduce the spectral ambiguity and also reflect crop cultivation patterns from past land-cover maps, is presented for the purpose of the early production of crop classification maps in large-scale crop areas. Specifically, the effects of mixed pixels are minimized not only by applying a hierarchical classification approach based on different spectral characteristics from crop growth cycles, but also by considering temporal contextual information derived from past crop cultivation patterns. The applicability of the presented classification scheme was evaluated by a case study of Iowa State in USA with time-series MODIS 250 m Normalized Difference Vegetation Index(NDVI) data sets and past Cropland Data Layers(CDLs). Corn and soybean, which are major crop types in the study area and also display spectral similarity, could be properly classified by applying different classification stages and accounting for past crop cultivation patterns. The classification result by the presented scheme showed increases of minimum 7.68%p and maximum 20.96%p in overall accuracy, compared with one based on purely spectral information. In addition, the combination of temporal contextual information during classification was less affected by the number of NDVI data sets and the best overall accuracy of 86.63% was achieved. Thus, it is expected that this classification scheme can be effectively used for the early production of large-area crop classification maps in major feed-grain importing countries.

Functional Properties of Mugwort Extracts and Quality Characteristics of Noodles Added Mugwort Powder (쑥 추출물의 기능성과 쑥국수의 품질특성)

  • Park Chan-Sung;Kim Mi-Lim
    • Food Science and Preservation
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    • v.13 no.2
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    • pp.161-167
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    • 2006
  • This study was investigated to develope health promoting and high quality of mugwort noodle. Mugwort powder was extracted with water and 70% ethanol and the extracts were tested it electron donating ability (EDA), nitrite scavenging ability (NSA) and inhibitory effects on MDA cell and A549 cell. EDA at 100-1,000 ppm of water extract was ranged f개m 73% to 81% and that of ethanol extract was ranged from 74% to 92% NSA of water extract was 40% and ethanol extract was 41% at 1,000 ppm, which were the highest at pH 1.2. NSA was increased with increasing conncentration of mugwort extracts and decreasing pH. Inhibition ratio of water and ethanol extracts on MDA cell growth was 30 and 27% while that on A549 cell was 22% and 23% at 1,000 ppm, respectively. Quality characteristics of mugwort none were evaluated by their color, shelf life na sensory characteristics. Lightness (L) and redness(a) of dried noodle and cooked noodle were decreased with increasing mugwort concentration(p<0.05). The number of total viable cells and fungi in mugwort noodle was $0.5{\sim}0.7log$ cycles lower than that of contro. In sensory evaluation of dried noodles and cooked noodles, noodles with 2% mugwort powder had significant high scores in overall acceptability.

Reliability Assessment of Fatigue Crack Propagation using Response Surface Method (응답면기법을 활용한 피로균열진전 신뢰성 평가)

  • Cho, Tae Jun;Kim, Lee Hyeon;Kyung, Kab Soo;Choi, Eun Soo
    • Journal of Korean Society of Steel Construction
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    • v.20 no.6
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    • pp.723-730
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    • 2008
  • Due to the higher ratio of live load to total loads of railway bridges, the accumulated damage by cyclic fatigue is significant. Moreover, it is highly possible that the initiated crack grows faster than that of highway bridges. Therefore, it is strongly needed to assess the safety for the accumulated damage analytically. The initiation and growth of fatigue-crack are related with the stress range, number of cycles, and the stiffness of the structural system. The stiffness of the structural system includes uncertainties of the planning, design, construction and maintenance, which varies as time goes. In this study, the authors developed the design and risk assessment techniques based on the reliability theories considering the uncertainties in load and resistance. For the probabilistic risk assessment of crack growth and the remaining life of the structures by the cyclic load of railway and subway bridges, response surface method (RSM) combined with first order second moment method were used. For composing limit state function, the stress range, stress intensity factor and the remaining life were selected as input important random variables to the RSM program. The probabilities of failure and the reliability indices of fatigue life for the considered specimen under cyclic loads were evaluated and discussed.

LIFE CYCLE AND CHEMOTHERAPEUTIC CONTROL OF A FILARIAN WORM, PHILOMETROIDES CARASSII PARASITIC IN CARASSIUS AURATUS (붕어에 기생하는 철사충 Philometroides carassii의 생활사와 치료에 관하여)

  • OUK Dae-Han;CHUN Seh-Kyu
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.6 no.3_4
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    • pp.112-122
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    • 1973
  • Philometroides carassii (ISHII, 1931) is a parasitic nematode of Carassius auratus and gold fish. Recently a large number of parasitized fishes by this nematode have been reported by fish farmers in Korea. The present investigation was aimed to find out the life cycles of the parasites and effects of chemotherapeutic medicines on the emerged larvae from the adult parasites. Results of the study are summarized as follows : 1. Intermediate host of p. cararsii is a freshwater copepod, Cyclops sp. and the invaded lavae in the body cavity of copepod are capable for parasitizing the fish host after 3 hours of invasion. 2. The lavae eaten directly by the fish host are digested or excreted. 3. The larvae invaded in the fish intestine through the intermediate host pass into the body cavity in 1 to 10 days, and become subadult stage. After 18 to 20 months the subadults parasitic in the body cavity of the Carassius auratus, penetrate through muscle fissile into tile caudal fin where they become adults. Whereas those parasitic in the body cavity of the gold fish, 7 to 8 months the sutadults penetrate through muscle tissue into the caudal fin where they become adults. 1. Male subadults found in the body cavity of the Carassius auratus and gold fish, were larger than females, This is the first record of male subadults occurring in the fish host. 5. Among four different :drugs tested, most of all larvae died in 4 ppm of dipterex in 5 days. But no adults were harmed even in 6 ppm dipterex in 11 days.

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Nonthermal Pasteurization of Lactic acid bacteria by High Intensity Light Pulse (광 펄스에 의한 젖산균의 비열 살균)

  • Cho, Hyung-Yong;Shin, Jung-Kue;Song, Young-Ae;Yoon, Seon-Joo;Kim, Joong-Man;Pyun, Yu-Ryang
    • Korean Journal of Food Science and Technology
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    • v.34 no.4
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    • pp.631-636
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    • 2002
  • Lethality of high intensity light pulse on the pre-determined microbial populations has been investigated. Prior to the treatment, Lactobacillus plantarum, Lactobacillus brevis, Leuconostoc mesenteroides and Pediococcus pentosaceus were cultivated separately onto the surface of Lactobacilli MRS agar. Pre-determined microbial populations were applied to the test media and these sample were exposed to high intense light source with an exposure time ranging from 1 to $2500\;{\mu}s$. Results showed that at least 200 light pulses of $1\;{\mu}s$ duration were required to reduce L. Plantarum cells by 90% at 25 kV, the greater the number of light pulses, the larger the reduction in viable cell numbers. Viable cells of L. plantarum and the others were reduced by more than 5 and 6 log cycles at the upper exposure level of $750\;{\mu}s$, respectively. These study shows that pulsed light emissions can significantly reduce populations of lactic acid bacteria on exposed surface with exposure times. Killing efficiency for L. plantarum significantly increased with decreasing the distance between the lamp and the surface of samples.