• Title/Summary/Keyword: nucleation mechanism

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Effect of Microstructure of Substrate on the Metallization Characteristics of the Electroless Copper Deposition for ULSI Interconnection Effect of Plasma

  • 홍석우;이용선;박종완
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2003.03a
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    • pp.86-86
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    • 2003
  • Copper has attracted much attention in the deep submicron ULSI metallization process as a replacement for aluminum due to its lower resistivity and higher electromigration resistance. Electroless copper deposition method is appealing because it yields conformal, high quality copper at relatively low cost and a low processing temperature. In this work, it was investigated that effect of the microstructure of the substrate on the electroless deposition. The mechanism of the nucleation and growth of the palladium nuclei during palladium activation was proposed. Electroless copper deposition on TiN barriers using glyoxylic acid as a reducing agent was also investigated to replace toxic formaldehyde. Furthermore, electroless copper deposition on TaN$\sub$x/ barriers was examined at various nitrogen flow rate during TaN$\sub$x/ deposition. Finally, it was investigated that the effect of plasma treatment of as-deposited TaN$\sub$x/ harriers on the electroless copper deposition.

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Development of functional microsphere(II) - Formation and Characteristics of Poly(ethylene-co-vinylacetate) Microsphere with Pigment - (기능성 마이크로스피어의 개발(II) - 안료를 함유한 에틸렌-비닐아세테이트 공중합체의 마이크로스피어 제조와 특성 -)

  • Lee, Shin-Hee;Park, Soo-Min
    • Textile Coloration and Finishing
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    • v.17 no.4 s.83
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    • pp.15-20
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    • 2005
  • Poly(ethylene-co-vinylacetate)(EVA) microspheres were prepared by thermally induced phase separation in toluene. The microsphere formation occurred by the nucleation and growth mechanism in metastable region. The effects of the polymer or pigment weight percentage and cooling rate on microsphere formation were investigated. The microsphere formation and growth were followed by the cloud point of the optical microscope measurement. The microsphere size distribution, which was obtained by particle size analyzer, became broader when the polymer concentration was higher, the pigment concentration and the cooling rate of EVA copolymer solution were lower.

Unsteady Flamelet Modeling for Flame Structure and Soot Formation of Lanimar Non-premixed CH4/Air Flame (비정상 화염편 모델을 이용한 대기압 층류 비예혼합 CH4/Air 화염장의 매연입자 생성 특성 및 화염구조 해석)

  • Kim, Taehoon;Jeon, Sangtae;Kim, Yongmo
    • 한국연소학회:학술대회논문집
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    • 2012.11a
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    • pp.137-138
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    • 2012
  • The two-equation soot model based on the transient laminar flamelet model is implemented for soot formation of laminar non-premixed $CH_4/Air$ flame with detailed chemical reaction mechanism and complex thermodynamic properties. The soot model represents nucleation, growth and oxidation with gas-phase chemistry. This represented unsteady flamelet soot model has been tested and compared using well verified reference calculation result obtained solving the Full Transport Equations method.

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Influence of Silicon and Seed Particles on the Reconstruction Characteristics and Exaggerated Grain Growth of MgO Protective Layer by Over-Frequency Accelerated Discharge in ACPDPs

  • Kwon, Sang-Koo;Kim, Jeong-Ho;Moon, Seung-Kyu;Choi, Jong-Kwon;Park, Kyu-Ho;Han, Sung-Su
    • 한국정보디스플레이학회:학술대회논문집
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    • 2008.10a
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    • pp.957-960
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    • 2008
  • The influences of silicon and MgO seed particle on the reconstruction characteristics of MgO protective layer were investigated to clarify the mechanism of reconstruction and exaggerated grain growth (EGG) in AC-PDP. The reconstruction and EGG are closely correlated with the driving force for nucleation and growth, interface energy and initial size distribution of MgO protective layer in plasma space during discharge in AC-PDP.

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Phase Transformation and Mechanical Properties of Reaction Sintered Mullite-Zirconia (Yttria) Composite (반응소결된 물라이트-지르코니아(이트리아) 복합체의 상변태와 기계적 성질에 관한 연구)

  • 오경영;장성도
    • Journal of the Korean Ceramic Society
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    • v.28 no.7
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    • pp.549-555
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    • 1991
  • Mullite-zirconia (0∼4 mol% yttria) composites were obtained by In-situ sintering of zircon and alumina mixture, and their mechanical properties were studied in conjuction with microstructure observation. Martensitic transformation temperature (Ms) of zirconia dispersed in the mullite matrix decreased with Y2O3 contents and was about 600$^{\circ}C$ for ZrO2 containing 4 mol% Y2O3. On cooling of this composites, tetragonal to monoclinic phase transformation induced microcracks at the grain boundary of mullite matrix. The microcracks seemed to absorb the fracture energy in stress field during mechanical tests. Therefore, toughening mechanisms of this composite were considered to nucleation and extension of microcrack, and crack deflection mechanism due to the difference of thermal expansion coefficient between matrix and dispersed phase.

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Characterization of polycrystalline diamond thin films deposited by using an MPCVD (MPCVD를 이용한 다결정 다이아몬드 박막의 증착 및 물성 분석)

  • Lee, Jin-Bock;Park, Jin-Seok;Ryu, Kyung-Sun;Kwon, Sang-Jik
    • Proceedings of the KIEE Conference
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    • 1998.07d
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    • pp.1330-1332
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    • 1998
  • Polycrystalline diamond films are deposited on a Si substrate by employing a 2.45 GHz $\mu$-wave plasma CVD system. Prior to depositing the diamond film, a DPR(diamond photo-resist) layer is coated to enhance the nucleation density. The growth rate of diamond films increases with the $\mu$-wave power and approaches to be about $1.5{\mu}m/hr$ at 1100 W. Structural properties of diamond films deposited are characterized from their SEM photographs, Raman spectra, and AFM surface images. Lager grain size, higher intensity of diamond peak, and smoother surface are observed for films deposited at a higher power. The possible mechanism on the diamond growth is also discussed to explain the experimental results.

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A Study on the Nucleation, Growth and Shrinkage of Oxidation Induced Stacking Faults (OSF) -Part2: Role of $SiO_2$ Layer on the Shrinkage of Oxidation Induced Stacking Faults (OSF) in P-type CZ Silicon (산화 적층 결합의 생성, 성장 및 소멸에 관한 연구-제2부 : P형 CZ 실리콘에서 산화 적층 결함의 소멸에 미치는 $SiO_2$층의 역학)

  • 김용태;민석기
    • Journal of the Korean Institute of Telematics and Electronics
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    • v.25 no.7
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    • pp.767-773
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    • 1988
  • We have proposed a new simple and easy method for the observation of OSF growth and shrinkage. This method is to observe the behavior of OSF in thedamaged region during oxidation as well as annealing process after introducing mechanical damage on the silicon surface by pressure-controllable indentor. The effect of SiO2 layer on the shrinkage of pregrown OSF generated by the proposed method has been investigated using the samples with or without SiO2 layer. From the experimental data, we suggest a model for the shrinkage of OSF, which is based on the recombinaiton mechanism between silicon interstitial and vacancy at the Si-SiO2 interface.

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Structural and Optical Evolution of Ga2O3/Glass Thin Films Deposited by Radio Frequency Magnetron Sputtering

  • Choe, Gwang-Hyeon;Seo, Chang-Su;Gang, Hyeon-Cheol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.350.2-350.2
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    • 2014
  • We investigated the structural and optical evolution of Ga2O3 thin films on glass substrates deposited using radio frequency magnetron sputtering. Initially, amorphous Ga2O3 thin film is grown, and then, surface humps and nanowire (NW) bundles are gradually formed as the film thickness increases. The surface humps are Ga-rich and provide nucleation sites for NWs through a self-catalytic vapor-liquid-solid mechanism with self-assembled Ga droplets. Both the surface humps and the NWs induce variation of the optical properties such as the optical bandgap and refractive index by absorbing light in the ultraviolet region.

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Formation of Microporosities in Sputter-Deposited AgInSbTe Thin Films and Their Behavior (스퍼터 증착시킨 AgInSbTe 박막에서 미세기공의 형성과 그 거동)

  • Kim, Myong-R.;Seo, H.;Park, J. W.;Choi, W. S.
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 1996.05a
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    • pp.84-89
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    • 1996
  • The nucleation and growth of microporosities was observed during the course of annealing treatment of sputter-deposited AgInSbTe thin films. There was a close correlation between the density of microporosity and the sputtering gas pressure in annealed thin films. The void density for a given composition decreased with sputtering gas pressure. It was shown from the present study that the number of porosities decreased while the average porosity size increased as the annealing temperature and holding time increased. The mechanism of porosity formation in the sputter-deposited AgInSbTe thin flus containing Ar-impurity trapped from the Ar-plasma is discussed in the present article.

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PRIMORDIAL BLACKHOLE AS A SEED FOR THE COSMIC MAGNETIC FIELD

  • LA DAIL;PARK CHANGBOM
    • Journal of The Korean Astronomical Society
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    • v.29 no.2
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    • pp.83-91
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    • 1996
  • We present a model that rotating primordial blackholes(PBHs) produced at the end of inflation generate the random, non-oriented primordial magnetic field. PBHs are copiously produced as the Universe completes the cosmic phase transition via bubble nucleation and tunneling processes in the extended inflation hypothesis. The PBHs produced acquire angular momentum through the mutual tidal gravitational interaction. For PBHs of mass less than 1013g, one can show that the evaporation (photon) luminosity of PBHs exceeds the Eddington limit. Thus throughout the lifetime of the rotating PBH, radiation flow from the central blackhole along the Kerr-geodesic exerts torque to ambient plasma. In the process similar to the Bierman's battery mechanism electron current reaching up to the horizon scale is induced. For PBHs of Grand Unified Theories extended inflation with the symmetry breaking temperature of $T_{GUT}\;\~\;10^{10}$ GeV, which evaporate near decoupling, we find that they generate random, non-oriented magnetic fields of $\~10^{-11}G$ on the last-scattering surface on (the present comoving) scales of $\~O(10)Mpc$.

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