• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1088-1091
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• 1997

This paper describes the characteristic of hinges on which a lever pivots within a limited angle due to the torque. The hinges are exerted by the thermally expanded actuators connected with a level through hinges. To enhance the stroke of inchworm actuator, FEM(Finite Element Method) was utilized for the characterization in view of stress displacement according to the variation of notch radius and notch width. As a result, notch width of the hinges plays an important part in improvement of micro inchworm actuator.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.1041-1044
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• 2002

Inchworm linear motor is one of the ultra precision position apparatuses and has many kinds of forms and structures according to the conditions of working space and range. In this paper, the Inchworm linear motor consists of three PZTs(Piezo-electric transducer), three columns ma two plates. finite element method was used to determine the type or hinges installed in column of inchworm linear motor DOE(Design of experiment) was used to determine the optimal design condition of a column by comparing the von-mises stresses according to the change of thickness of hinge, round of hinge, height of arm, angle of v-notch, round of v-notch and thickness of column. From the result, round of hinge, height of arm and thickness of hinge were determined a effective design parameters.

• Journal of the Korean Society for Precision Engineering
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• v.22 no.9 s.174
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• pp.130-136
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• 2005

This paper presents an optimal design and the performance evaluation of two-axis nano positioning stage with round notched flexure hinges. A flexure hinge mechanism with round notched flexure hinges is to guide the linear motions of a moving plate in the nano positioning stage. A Min-Max algorithm is applied to the design of the flexure hinge mechanism for nano positioning stage. In the design process, the structure of the flexure hinge mechanism is fixed, then the radius of a round hole and the width of two round holes are chosen as design variables, and finally the do sign variables are calculated by the Min-Max algorithm. The machined flexure hinge mechanism, stack type PZTs for actuation and capacitance type displacement sensors for position measurement are assembled into the nano positioning stage. The experimental results of the manufactured nano positioning stage show the first modal resonance frequency of 197 Hz, the operating range of 40 um, and the resolution of 3 nm.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.393-394
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• 2008

• Design & Manufacturing
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• v.14 no.3
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• pp.23-30
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• 2020

Laser Assisted Thermo-Compression Bonding (LATCB) has been proposed to improve the "chip tilt due to the difference in solder bump height" that occurs during the conventional semiconductor chip bonding process. The bonding module of the LATCB system has used a piezoelectric actuator to control the inclination of the compression jig on a micro scale, and the piezoelectric actuator has been directly coupled to the compression jig to minimize the assembly tolerance of the compression jig. However, this structure generates a lateral force in the piezoelectric actuator when the compression jig is tilted, and the stacked piezoelectric element vulnerable to the lateral force has a risk of failure. In this paper, the optimal design of the flexure hinge was performed to minimize the lateral force generated in the piezoelectric actuator when the compression jig is tilted by using the displacement difference of the piezoelectric actuator in the bonding module for LATCB. The design variables of the flexure hinge were defined as the hinge height, the minimum diameter, and the notch radius. And the effect of the change of each variable on the stress generated in the flexible hinge and the lateral force acting on the piezoelectric actuator was analyzed. Also, optimization was carried out using commercial structural analysis software. As a result, when the displacement difference between the piezoelectric actuators is the maximum (90um), the maximum stress generated in the flexible hinge is 11.5% of the elastic limit of the hinge material, and the lateral force acting on the piezoelectric actuator is less than 1N.

• Journal of Institute of Control, Robotics and Systems
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• v.15 no.8
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• pp.798-803
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• 2009

This paper proposes a grating scanner which is driven by a stack-type piezoelectric element. The mechanism of the grating scanner is based on flexure hinges. Using some constraints, the compliant mechanism is designed and then verified by Finite Element Analysis. The designed compliant mechanism is manufactured by wire electro-discharge machining, and then integrated with a stack-type piezoelectric element for actuation and a capacitance displacement sensor for measuring ultra-precision displacement. Experiments demonstrates the characteristics and the performances of the grating scanner using the terms of working range, resonance frequency, bandwidth and resolution. The grating scanner is applicable to a Moire interferometry for measuring 3-dimensional microscopic surface.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.1570-1576
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• 2000

하드디스크의 고용량화 추세에 따라 헤드의 정밀한 위치제어를 위한 큰 대역폭의 트랙추적 서보 시스템의 필요성이 대두되고 있다. 이에 작은 신호의 마찰을 제거하고 대역폭을 높이는 방법 중 하나인 2단구동기 트랙추적제어를 실시하여 큰 대역폭의 트랙 추적 서보시스템을 구성하는 방법에 대해 연구하였다. 2단구동기는 조동구동기(기존 하드디스크의 VCM)와 전단형 압전체를 부착한 미동구동기로 구성하였다. 미동구동기의 Hinge구조는 트랙 방향의 공진 주파수와 출력변위를 만족시키기 위한 구조로 설계하였다. 제어기는 notch filter와 PI 보상기를 사용하는 조동구동기와 notch filter와 PD 보상기를 사용하는 미동구동기를 다양한 구조로 구성한 것들을 비교하였다. 2단구동기는 VCM만을 사용하여 트랙 추적을 할 때보다 트랙 편심을 잘 추적하며, 기계적 공진과 VCM의 비선형성에 의해 제한된 대역폭을 개선시키는 효율적인 방법임을 확인하였다.

• Journal of the Korean Society for Precision Engineering
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• v.21 no.3
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• pp.147-154
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• 2004

This paper presents a procedure for analysis and design of a fine positioning stage, which has many applications in industries for machine tools, semiconductor, LCD and so forth. The stage considered here is based on a single module with 3 axes which is composed of flexures hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs(the flexures hinges). An experimental design procedure is applied to determine the dimension of flexures hinges. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage. An actual fine stage is made and verified through an experiment on the dynamic characteristics.

• Transactions of the Korean Society of Automotive Engineers
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• v.8 no.4
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• pp.149-157
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• 2000

Computer simulations of the mechanical behavior of a three point bend specimen with a quarter notch under impact load are performed. The case with a load application point at the side is considered. An elastic-plastic von Mises material model is chosen. Three phases such as impact bouncing and bending phases are found to be identified during the period from the moment of impact to the estimated time for crack initiation. It is clearly shown that no plastic deformation near the crack tip is appeared at the impact phase. However it is confirmed that the plastic zone near the crack tip emerges in the second phase and the plastic hinge has been formed in the third phase. Gap opening displacement crack tip opening displacement and strain rate are compared with rate dependent material(visco-plastic material). The stability during various dynamic load can be seen by using the simulation of this study.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.989-992
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• 2002

This paper presents a procedure far design, modeling and analysis of a fine positioning stage. The stage considered here is composed of flexure hinges, piezoelectric actuators and their peripherals. Through a series of analysis, the structural analysis model is simplified as a rigid body(the moving part) and springs (the flexure hinges). An experimental design procedure is applied to determine optimum design variables for flexure hinges. The optimum variables are validated through a numerical test. A sensitivity analysis on the notch positions is also performed to obtain a guideline of fabrication accuracy for the stage.