• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2006년도 추계학술대회
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• pp.570-572
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• 2006

본 연구에서는 Cu와 In 성분을 포함하는 메탄을 용액을 닥터 블레이딩 방법으로 코팅한 후 이를 Se 분위기에서 열처리하여 CIS 광흡순층을 제조하였다 $Cu(NO_3)_2,\;InCl_3$를 출발 물질로 선정하고, 이를 메탄을 용매에 녹여 전구체 용액을 만든 후 여기에 유기물 바인더 물질을 첨가하여 닥터 블레이드 코팅에 적합한 점도를 맞춘 후. 이를 Mo/glass 기판에 코팅하였다. 코팅된 Cu, In 함유 유기물 혼합체를 공기중에서 1차 열처리 후 Se 분위기에서 열처리하면 태양전지용 CIS 광흡수층을 얻게 된다 특히 본 연구에서는 전구체 합성, 유기물 첨가, 공기중 열처리 및 Se 열처리 각 단계에서 광흡수층 막의 형상, 결정구조, 화학조성의 변화과정을 분석하여 CIS 박막의 형성 과정을 고찰하였다.

• 한국분말야금학회:학술대회논문집
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• 한국분말야금학회 2006년도 Extended Abstracts of 2006 POWDER METALLURGY World Congress Part2
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• pp.1018-1021
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• 2006

Powdered metal parts and components may be carburized successfully in a vacuum furnace by combining carburizing technology $VacCarb^{TM}$ with a hi-tech control system. This approach is different from traditional carburizing methods, because vacuum carburizing is a non-equilibrium process. It is not possible to set the carbon potential as in a traditional carburizing atmosphere and control its composition in order to obtain a desired carburized case. This paper presents test results that demonstrate that vacuum carburizing system $VacCarb^{TM}$ carburized P.M. materials faster than traditional steel with acceptable results. In the experiments conducted, PM samples with the lowest density and open porosity showed a dramatic increase in the surface carbon content up to 2.5%C and a 3 times deeper case. Currently the boost-diffusion technique is applied to control the surface carbon content and distribution in the case. In the first boost step, the flow of the carburizing gas has to be sufficient to saturate the austenite, while avoiding soot deposition and formation of massive carbides. To accomplish this goal, the proper gas flow rate has to be calculated. In the case of P.M. parts, more carbon can be absorbed by the part's surface because of the additional internal surface area created by pores present in the carburized case. This amount will depend on the density of the part, the densification grade of the surface layer and the stage of the surface. "as machined" or "as sintered". It is believed that enhanced gas diffusion after initial evacuation of the P.M. parts leads to faster carburization from within the pores, especially when pores are open . surface "as sintered" and interconnected . low density. A serious problem with vacuum carburizing is delivery of the carbon in a uniform manner to the work pieces. This led to the development of the different methods of carburizing gas circulation such as the pulse/pump method or the pulse/pause technique applied in SECO/WARWICK's $VacCarb^{TM}$ Technology. In both cases, each pressure change may deliver fresh carburizing atmosphere into the pores and leads to faster carburization from within the pores. Since today's control of vacuum carburizing is based largely on empirical results, presented experiments may lead to better understanding and improved control of the process.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2016년도 제50회 동계 정기학술대회 초록집
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• pp.378.2-378.2
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• 2016

Biosensors currently suffer from severe non-specific adsorption of proteins, which causes false positive errors in detection through overestimation of the affinity value. Overcoming this technical issue motivates our research. Polyethylene glycol (PEG) is well known for its ability to reduce the adsorption of biomolecules; hence, it is widely used in various areas of medicine and other biological fields. Likewise, amine functionalized surfaces are widely used for biochemical analysis, drug delivery, medical diagnostics and high throughput screening such as biochips. As a result, many coating techniques have been introduced, one of which is plasma polymerization - a powerful coating method due to its uniformity, homogeneity, mechanical and chemical stability, and excellent adhesion to any substrate. In our previous works, we successfully fabricated plasmapolymerized PEG (PP-PEG) films [1] and amine functionalized films [2] using the plasma enhanced chemical vapor deposition (PECVD) technique. In this research, an amine functionalized PP-PEG film was fabricated by using the plasma co-polymerization technique with PEG 200 and ethylenediamine (EDA) as co-precursors. A biocompatible amine functionalized film was surface characterized by X-ray photoelectron spectroscopy (XPS) and Fourier-transform infrared spectroscopy (FT-IR). The density of the surface amine functional groups was carried out by quantitative analysis using UV-visible spectroscopy. We found through surface plasmon resonance (SPR) analysis that non-specific protein adsorption was drastically reduced on amine functionalized PP-PEG films. Our functionalized PP-PEG films show considerable potential for biotechnological applications such as biosensors.

• 한국진공학회지
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• 제14권3호
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• pp.110-114
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• 2005

본 연구는 화학증착(Chemical Vapor Deposition, CVD) 시스템에서 전구체 소모량을 모니터링 하기 위한 방법이다. 전구체는 가격이 매우 비싸기 때문에 이를 모니터링 하기 위한 효과적인 방법이 요구된다. 하나의 예로서 용기내 수위진단을 할 수 있는 초음파 센서를 들 수 있는데 이는 비접촉식이고 가격이 저렴한 유리한 점이있다 본 연구에서는, CVD 시스템에서의 전구체 소모량 모니터링을 위한 초음파 진단기술 개발에 관해 연구한다. 또한 반도체 생산라인에 적용이 가능한 실제 진단장치를 개발, 적용한다.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2015년도 제49회 하계 정기학술대회 초록집
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• pp.120.2-120.2
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• 2015

We propose a novel direct writing technique with a femtosecond laser enabling selective modification of not only the morphology of conducting polymer thin films but also the orientation and alignment of the polymer crystal. Surface relief gratings resulting from photoexpansion on P3HT:PCBM and PEDOT:PSS thin films were fabricated by femtosecond laser direct writing. The photoexpansion was induced at laser fluence below the ablation threshold of the thin film. The morphology (size and shape) of photoexpansion could be quantitatively controlled by laser writing parameters such as focused beam size, writing speed, and laser fluence. GIWAX results showed that face-on P3HT crystals were largely increased in the photoexpansion in comparison with pristine region of the thin film. In addition, the face-on P3HTs in the photoexpansion were aligned with their orientation along the polarization of the laser. The micro-RAMAN spectra confirmed that neither chemical composition change nor the polymer chain breaking was observable after femtosecond laser irradiation. We believe that this laser direct writing technique opens a new door to the fabrication of more efficient OPVs via non-contact, toxic-free approach.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제40회 동계학술대회 초록집
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• pp.509-509
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• 2011

Superhydrophobic surfaces on alloyed steels were fabricated with a non-conventional method of plasma etching and subsequent water immersion procedure. High aspect ratio nanopatterns of nanoflake or nano-needle were created on the steels with various Cr content in its composition. With CF4 plasma treatment in radio-frequence chemical vapor deposition (r.-f. CVD) method, steel surfaces were etched and fluorinated by CF4 plasma, which induced the nanopattern evolution through the water immersion process. It was found that fluorine ion played a role as a catalyst to form nanopatterns in water elucidated with XPS and TEM analysis. The hierarchical patterns in micro- and nano scale leads to superhydrophobic properties on the surfaces by deposition of a hydrophobic coating with a-C:H:Si:O film deposited with a gas precursor of hexamethlydisiloxane (HMDSO) with its lower surface energy of 24.2 mN/m, similar to that of curticular wax covering lotus surfaces. Since this method is based on plasma dry etching & coating, precise patterning of surface texturing would be potential on steel or metal surfaces. Patterned hydrophobic steel surfaces were demonstrated by mimicking the Robinia pseudoacacia or acacia leaf, on which water was collected from the humid air using a patterned hydrophobicity on the steels. It is expected that this facile, non-toxic and fast technique would accelerate the large-scale production of superhydrophobic engineering materials with industrial applications.

• 한국재료학회지
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• 제18권6호
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• pp.294-297
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• 2008

In this paper, a novel non-vacuum technique is described for the fabrication of a $CuInSe_2$ (CIS) absorber layer for thin film solar cells using a low-cost precursor solution. A solution containing Cu- and Inrelated chemicals was coated onto a Mo/glass substrate using the Doctor blade method and the precursor layer was then selenized in an evaporation chamber. The precursor layer was found to be composed of CuCl crystals and amorphous In compound, which were completely converted to chalcopyrite CIS phase by the selenization process. Morphological, crystallographic and compositional analyses were performed at each step of the fabrication process by SEM, XRD and EDS, respectively.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2011년도 제41회 하계 정기 학술대회 초록집
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• pp.214-214
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• 2011

The adsorption and reactions of methanol and methyl iodide on ZnO(0001) and ZnO(11-20) single crystal surfaces have been investigated using the temperature programmed desorption (TPD) technique. The interaction of methanol and methyl iodide with ZnO is stronger on the polar ZnO(0001) surface than the non-polar ZnO(11-20) surface. On ZnO(0001), methanol is decomposed to produce formaldehyde and hydrogen. Two desorption features of formaldehyde and hydrogen are observed at around 500 and 580 K. The interaction of methanol and pre-adsorbed hydrogen has been also investigated. The reaction mechanism of methanol on ZnO will be proposed.

• 한국진공학회지
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• 제7권s1호
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• pp.25-29
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• 1998

$SiO_2$ thin films embedded with Ge microcrystallites (Ge-$SiO_2$) were prepared by use of r.f. co-sputtering technique from a Ge, $SiO_2$ composite target. The size of Ge crystallites can been modulated by the experiment parameters. The optical absorption and non-linear optical properties of Ge-$SiO_2$ films were measured. The blue shift of the optical absorption edge, the saturated absorption and two-photon absorption under the condition of resonant absorption have been observed, and are discussed according to the quantum confinement effect.

• 한국진공학회:학술대회논문집
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• 한국진공학회 2009년도 제38회 동계학술대회 초록집
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• pp.140-140
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• 2010

Non-mass analyzed ion shower doping (ISD) technique with a bucket-type ion source or mass-analyzed ion implantation with a ribbon beam-type has been used for source/drain doping, for LDD (lightly-doped-drain) formation, and for channel doping in fabrication of low-temperature poly-Si thin-film transistors (LTPS-TFT's). We reported an abnormal activation behavior in boron doped poly-Si where reverse annealing, the loss of electrically active boron concentration, was found in the temperature ranges between $400^{\circ}C$ and $650^{\circ}C$ using isochronal furnace annealing. We also reported reverse annealing behavior of sequential lateral solidification (SLS) poly-Si using isothermal rapid thermal annealing (RTA). We report here the importance of implantation conditions on the dopant activation. Through-doping conditions with higher energies and doses were intentionally chosen to understand reverse annealing behavior. We observed that the implantation condition plays a critical role on dopant activation. We found a certain implantation condition with which the sheet resistance is not changed at all upon activation annealing.