• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.189.1-189.1
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• 2014

Lead zirconium titanate (PZT) is usually used as bulk and thin films. Due to high flexibility and piezoelectric, ferroelectric and pyroelectric properties, PZT fiber has attracted in a variety of fields such as sensor devices, non-electromechanical systems and non-volatile ferroelectric memory devices. And PZT fiber can be numerously synthesized and almost with the diameter of PZT fiber thicker than $10{\mu}m$. However, the electrospinnig method is cost effective and convenient. PZT obtained by electrospinning methodhas the diameter from sub-micro to nanometer. In this paper, the PZT/PVP nanofibers were synthesized with three precursors, lead nitrate, zirconium ethoxide and titanium isopropoxide. And the PZT nanofibers were fabricated after removal of PVP by annealing process at various temperature. The obtained PZT nanofibers were characterized by means of X-ray photoelectron spectroscopy (XPS) for chemical properties, X-ray diffraction (XRD) for crystallinity and phase, scanning electron microscopy (SEM) for morphologies. The diameter of PZT nanofibers were measured with SEM. From the SEM images, we confirmed that diameter of PZT nanofibers was hundreds of nanometers and decreased with increasing the annealing temperature. When the annealing temperature increased, the crystallinity of PZT nanofibers changed from pyrochlore to perovskite structure.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2017.05a
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• pp.85-85
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• 2017

ISO (International Organization for Standardization) is an independent, non-governmental international organization with a membership of 163 national standards bodies (NSB). The ISO standards are developed and processed within the technical committees (TC) or their subcommittees (SC) dealing with the different subject matters. The first technical committee, ISO/TC1, deals with screw threads and was created back in 1947. While, more recently, TC 309 was created to standardize organizational governance. The ISO technical committee in the field of metallic coatings was created in 1962 with the title ISO/TC107- Metallic and other inorganic coatings. This ISO/TC107 technical committee is dealing with the standardization of the characteristics of protective and decorative metallic coatings applied by electrolysis, fusion, vacuum or chemical means, mechanical deposition and ion plating. similarly, it also covers the standardization of the characteristics of protective and decorative non-metallic coatings (excluding paints and other organic coatings) on metal surface applied by electrolysis, fusion, vacuum or chemical means. Scope is further extended to the Standardization of the preparation of the substrates prior to the deposition of metallic and inorganic coatings. There are a total of 144 existing ISO standards published by this technical committee and has 19 participating countries (P-members) and 24 observing countries (O-members). Korean Agency for Technology and Standards (KATS), being the secretariat of ISO/TC107, is constantly supporting this technical committee for the development of standards and related activities.

• Journal of the Korean Vacuum Society
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• v.14 no.3
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• pp.115-118
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• 2005

Structure analysis of model polymeric micelles, both for non-asosciative and associative cases is done by small angle neutron scattering method. Aggregation number of the hydrophobic cores and the lyotropic ordering transitions of aqueous solutions of poly(ethylene glycol)(PEG) (6 K or 10 K g/mol) end-capped with perfluoroalkyl groups $(-(CH_2)_2C_OnF_{2n+1}$ (n =6,8, or 10) are characterized. Aggregation number is mainly determined by the hydrophobe end group only, and is insensitive to polymer concentration or temperature. Also, there is no difference between non-associative micelles and associative micelles in terms of aggregation number. The model systems order into a BCC structure with increasing concentration.

• Applied Science and Convergence Technology
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• v.24 no.2
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• pp.33-40
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• 2015

$ZrO_2$ and Al-Zr composite oxide film was prepared by vacuum assisted sol-gel dip coating method and anodizing. $ZrO_2$ films annealed above $400^{\circ}C$ have tetragonal structure. $ZrO_2$ layers inside etch pits were successfully coated from the $ZrO_2$ sol. The double layer structures of samples were obtained after being anodized at 100 V to 600 V. From the TEM images, it was found that the outer layer was $Al_2O_3$, the inner layer was multi-layer of $ZrO_2$, Al-Zr composite oxide and Al hydrate. The capacitance of $ZrO_2$ coated foil exhibited about 28.3% higher than that of non-coating foil after being anodized at 100 V. The high capacitance of $ZrO_2$ coated foils anodized at 100 V can be attributed to the relatively high percentage of inner layer in total thickness. The electrical properties, such as withstanding voltage and leakage current of coated and non-coated Al foils showed similar values. From the results, $ZrO_2$ and Al-Zr composite oxide is promising to be used as the partial dielectric of high voltage capacitor to increase the capacitance.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.196-197
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• 2010

NAND형 charge trap flash (CTF) non-volatile memory (NVM) 소자가 30nm node 이하로 고집적화 되면서, 기존의 SONOS형 CTF NVM의 tunnel barrier로 쓰이는 SiO2는 direct tunneling과 stress induced leakage current (SILC)등의 효과로 인해 data retention의 감소 등 물리적인 한계에 이르렀다. 이에 따라 개선된 retention과 빠른 쓰기/지우기 속도를 만족시키기 위해서 tunnel barrier engineering (TBE)가 제안되었다. TBE NVM은 tunnel layer의 전위장벽을 엔지니어드함으로써 낮은 전압에서 전계의 민감도를 향상 시켜 동일한 두께의 단일 SiO2 터널베리어 보다 빠른 쓰기/지우기 속도를 확보할 수 있다. 또한 최근에 각광받는 high-k 물질을 TBE NVM에 적용시키는 연구가 활발히 진행 중이다. 본 연구에서는 Si3N4와 HfAlO (HfO2 : Al2O3 = 1:3)을 적층시켜 staggered의 새로운 구조의 tunnel barrier Capacitor를 제작하여 전기적 특성을 후속 열처리 온도와 방법에 따라 평가하였다. 실험은 n-type Si (100) wafer를 RCA 클리닝 실시한 후 Low pressure chemical vapor deposition (LPCVD)를 이용하여 Si3N4 3 nm 증착 후, Atomic layer deposition (ALD)를 이용하여 HfAlO를 3 nm 증착하였다. 게이트 전극은 e-beam evaporation을 이용하여 Al를 150 nm 증착하였다. 후속 열처리는 수소가 2% 함유된 질소 분위기에서 $300^{\circ}C$와 $450^{\circ}C$에서 Forming gas annealing (FGA) 실시하였고 질소 분위기에서 $600^{\circ}C{\sim}1000^{\circ}C$까지 Rapid thermal annealing (RTA)을 각각 실시하였다. 전기적 특성 분석은 후속 열처리 공정의 온도와 열처리 방법에 따라 Current-voltage와 Capacitance-voltage 특성을 조사하였다.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.02a
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• pp.509-509
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• 2011

Superhydrophobic surfaces on alloyed steels were fabricated with a non-conventional method of plasma etching and subsequent water immersion procedure. High aspect ratio nanopatterns of nanoflake or nano-needle were created on the steels with various Cr content in its composition. With CF4 plasma treatment in radio-frequence chemical vapor deposition (r.-f. CVD) method, steel surfaces were etched and fluorinated by CF4 plasma, which induced the nanopattern evolution through the water immersion process. It was found that fluorine ion played a role as a catalyst to form nanopatterns in water elucidated with XPS and TEM analysis. The hierarchical patterns in micro- and nano scale leads to superhydrophobic properties on the surfaces by deposition of a hydrophobic coating with a-C:H:Si:O film deposited with a gas precursor of hexamethlydisiloxane (HMDSO) with its lower surface energy of 24.2 mN/m, similar to that of curticular wax covering lotus surfaces. Since this method is based on plasma dry etching & coating, precise patterning of surface texturing would be potential on steel or metal surfaces. Patterned hydrophobic steel surfaces were demonstrated by mimicking the Robinia pseudoacacia or acacia leaf, on which water was collected from the humid air using a patterned hydrophobicity on the steels. It is expected that this facile, non-toxic and fast technique would accelerate the large-scale production of superhydrophobic engineering materials with industrial applications.

• Korean Journal of Materials Research
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• v.18 no.6
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• pp.294-297
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• 2008

In this paper, a novel non-vacuum technique is described for the fabrication of a $CuInSe_2$ (CIS) absorber layer for thin film solar cells using a low-cost precursor solution. A solution containing Cu- and Inrelated chemicals was coated onto a Mo/glass substrate using the Doctor blade method and the precursor layer was then selenized in an evaporation chamber. The precursor layer was found to be composed of CuCl crystals and amorphous In compound, which were completely converted to chalcopyrite CIS phase by the selenization process. Morphological, crystallographic and compositional analyses were performed at each step of the fabrication process by SEM, XRD and EDS, respectively.

• Korean Journal of Materials Research
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• v.15 no.8
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• pp.496-502
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• 2005

Green-light emitting $BaMgAl_{10}O_{19}:Mn^{2+}$ (BAM:Mn) phosphor particles were prepared by spray Pyrolysis. The effect of reactor temperature and flow rate of carrier gas in the spray Pyrolysis on the morphology, crystallinity and photoluminescence characteristics under vacuum ultraviolet were investigated. The morphology of the as-Prepared Particles obtained by spray Pyrolysis had spherical shape and non-aggregation characteristics regardless of the reactor temperature. The spherical shape of the as-prepared Particles obtained by spray pyrolysis at low temperature disappeared after Post-treatment. On the other hand the as-Prepared Particles obtained by spray Pyrolysis at $1600^{\circ}C$ maintained spherical shape and non-aggregation characteristics after post-treatment at $1400^{\circ}C$ for 3 h under reducing atmosphere. The BAM:Mn Phosphor Particles Prepared by spray Pyrolysis at different reactor temperatures had pure crystal structure and high photoluminescence intensities under vacuum ultraviolet after post-treatment. BAM:Mn phosphor particles prepared by spray Pyrolysis at low How rate of carrier gas had complete spherical shape and filed morphology and high photoluminescence intensity after post-treatment under reducing atmosphere.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.512-513
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• 2013

Space and time resolved discharge images from an atmospheric pressure non-thermal Ar plasma jet have been observed by a ICCD camera to investigate the electron temperatures. Plasma jet device consisting of a syringe electrode inserted into a glass tube has been introduced. A high voltage is applied to the syringe electrode. The syringe needle has an outer diameter of 1.8 mm, an inner diameter of 1.3 mm, and a total length of 39.0 mm. The needle is inserted into a glass tube of outer diameter 2.4 mm and inner diameter 2.0 mm, and a total length of 80.0 mm. The Ar plasma propagation speed on the cathode has been shown to be about 2.1 km/s at input discharge voltage of 3.6 kV, discharge current of 19.9 mA and driving frequency of about 45 kHz. Particularly, the electron temperature in plasma jet were found to be about 1.8 eV at input discharge voltage of 3.6 kV and driving frequency of 45 kHz, respectively.

• Journal of the Semiconductor & Display Technology
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• v.14 no.3
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• pp.61-66
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• 2015

Recently, the major trends of NIL are high throughput and large area patterning. For UV NIL, if it can be proceeded in the non-vacuum environment, which greatly simplifies tool construction and greatly shorten process times. However, one key issue in non-vacuum environment is air bubble formation problem. In this paper, numerical analysis of bubble defect of UV NIL is performed. Fluent, flow analysis focused program was utilized and VOF (Volume of Fluid) skill was applied. For various resist-substrate and resist-mold angles, effects of velocity inlet and residual layer thickness of resist on bubble defect formation were investigated. The numerical analyses show that the increases of velocity inlet and residual layer thickness can cause the bubble defect formation, however the decreases of velocity inlet and residual layer thickness take no difference in the bubble defect formation.