• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.11a
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• pp.711-714
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• 2004

Chemical mechanical polishing (CMP) has been widely accepted for the global planarization of multi-layer structures in semiconductor manufacturing. However, it still has various problems to the CMP equipment, in particular, among the CMP components, process variables are very important parameters in determining the removal rate and non-uniformity. Using a design of experiment (DOE) approach, this study was performed investigating the interaction between the various parameters such as turntable and head speed, down force and back pressure during CMP. Using statistical analysis techniques, a better understanding of the interaction behavior between the various parameters and the effect on removal rate, no-uniformity and ETC (edge to center) is achieved.

• Composites Research
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• v.31 no.4
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• pp.161-170
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• 2018

Cylindrical composite lattice structures are manufactured by filament winding process. The fiber volume fraction non-uniformity and resin rich layers that can occur in the manufacturing process affect the stiffness and strength of the structure. Through the cross-section examination of the hoop and helical ribs, which are major elements of the composite lattice structure, we observed the fiber volume fraction non-uniformity and resin rich layers. Based on the results of the cross-section examination, the stiffness of the ribs was analyzed through the experimental and theoretical approaches. The results show that the fiber volume fraction non-uniformity and resin rich layers have an obvious influence on the rib stiffness of composite lattice structure.

• Korean Journal of Optics and Photonics
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• v.30 no.6
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• pp.219-225
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• 2019

In an infrared optical system, using a cooled detector generates a phenomenon called a narcissus, in which the focal-plane array cooled to very low temperatures is reflected at the lens surface and detected. The narcissus can be removed by non-uniformity correction of the detector pixel, so narcissus is generally ignored in infrared optics. However, non-uniformity correction reduces the sensitivity of the system. Also, as the housing temperature varies due to an environmental temperature change, or a lens is moved for focusing or athermalization purposes, a narcissus may occur even after non-uniformity correction. To minimize such a narcissus, the amount of the effect must be controlled in the lens-design stage. In this paper we designed a midinfrared optical system and analyzed the narcissus by setting the lens surface reflectance to 1%. In addition, the design was divided into stages of an initial design, an improved design, and a minimum design, and the narcissus was improved to about 56% of that in the initial design.

• Journal of Energy Engineering
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• v.24 no.1
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• pp.51-57
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• 2015

The purpose of this study is to verify the performance of a static mixer for mixing of biogas and town gas by numerical analysis and demonstration test. The reason for designing a static mixer is that there is a need to mix town gas with biogas when there is less production of biogas in biogas sites. Non-uniformity in the outlet section was calculated for investigating the performance of a static mixer. Non-uniformity was based on the mole fraction of methane in a mixture of biogas and town gas. Low non-uniformity means that biogas and town gas are mixed well through this static mixer. Also, pressure drop at the outlet section of a static mixer was calculated. The pressure drop is less than 0.2% in this static mixer. This static mixer is suitable for applying to a 5MW bio-gas turbine through the demonstration test in the field.

• International Journal of Control, Automation, and Systems
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• v.2 no.2
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• pp.256-262
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• 2004

Conventionally, profile non-uniformity has been characterized by relying on approximated profile with angle or anisotropy. In this study, a new non-uniformity model for etch profile is presented by applying a discrete wavelet to the image obtained from a scanning electron microscopy (SEM). Prediction models for wavelet-transformed data are then constructed using a back-propagation neural network. The proposed method was applied to the data collected from the etching of tungsten material. Additionally, 7 experiments were conducted to obtain test data. Model performance was evaluated in terms of the average prediction accuracy (APA) and the best prediction accuracy (BPA). To take into account randomness in initial weights, two hundred models were generated for a given set of training factors. Behaviors of the APA and BPA were investigated as a function of training factors, including training tolerance, hidden neuron, initial weight distribution, and two slopes for bipolar sig-moid and linear function. For all variations in training factors, the APA was not consistent with the BPA. The prediction accuracy was optimized using three approaches, the best model based approach, the average model based approach and the combined model based approach. Despite the largest APA of the first approach, its BPA was smallest compared to the other two approaches.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.1
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• pp.12-16
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• 2005

Chemical mechanical polishing (CMP) process is one of the most useful methods for improving the surface roughness of films. The effects of CMP on the surface morphology of WO$_3$ films prepared by RF sputtering system were investigated in this paper. A removal rate of films increased, and the uniformity performance of surface decreased with the addition of an oxidizer to the tungsten slurry. Non-uniformity performance of surface was superior as its value was below 5 % when oxidizers of 5.0 vol% and 2.5 vol%, respectively, were added to the tungsten slurry. The optimized oxidizer concentration, reflected both the improved roughness values and hillock-free surface with the good uniformity performance, was 5.0 vol% as an atomic force microscopy(AFM) analysis of thin film topographies. Our CMP results will be a useful reference for advanced technology of thin films for gas sensor applications in the near future.

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2001.11a
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• pp.203-206
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• 2001

Since th three sides of korea peninsula are surrounded by the sea, electric apparatus are greatly contaminated by the salt generated by the typhoon, seasonal wind, sea wind and sea fog. This contamination causes electric power apparatus to fail. Thus in this paper, we investigated to influence upon electrical properties of outdoor insulators with non-uniformity contamination in the experimental condition because The contamination of outdoor insulator highly depended wind property In the service condition, insulator was not uniformly contaminated. From the flashover test for the 254 mm suspension insulator, we could determine the influence non-uniform contamination on the electrical property of insulators. Through the experiment, we convinced to occur flashover from non-uniform contamination region of outdoor insulator. Contaminated area and pattern has a close relationship with the electrical properties of outdoor insulator.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.23 no.3
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• pp.216-222
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• 2011

Recently, hybrid air-conditioning system has been proposed and applied to achieve building energy saving. One example is a system combining radiation panel with natural wind-induced cross-ventilation. However, few research works have been conducted on the non-uniformity of thermal comfort in such hybrid air-conditioning system. In this paper, both thermal environment and non-uniform thermal comfort of human thermal model under various air-conditioning system, including hybrid system, were evaluated in a typical office room using coupled simulation of computation fluid dynamics, radiation model and a human thermal model. The non-uniformity of thermal comfort was evaluated from the deviation of surface temperature of human thermal model. Flow fields and temperature distribution in each case were represented.

• Proceedings of the Safety Management and Science Conference
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• 2008.11a
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• pp.599-610
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• 2008

It is an important and urgent issue to improve process capability in quality control. Process capability refers to the uniformity of the process. The variability in the process is a measure of the uniformity of output. A simple, quantitative way to express process capability, the degree of variability from target in specification is defined by process capability index(PCI). Almost process capability indices are defined under normal distribution. However, these indices can not be applied to the process of non-normal distribution including reliability. We investigate current research on the process of non-normal distribution, and advanced method and technology for developing more reliable and efficient PCI. Finally we suggest the perspective for future study.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.18 no.6
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• pp.521-526
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• 2005

Within wafer non-uniformity(WIWNU) improves as the stiffness of pad decrease. We designed the pad groove to study of pad stiffness on WIWNU in Chemical mechanical polishing(CMP) and measured the pad stiffness according to groove width. The groove influences effective pad stiffness although original mechanical properties of pad are unchanged by grooving. Also, it affects the flow of slurry that has an effect on the lubrication regime and polishing results. An Increase of the apparent contact area of pad by groove width results in decrease of effective pad stiffness. WIWNU and profile of removal tate improved as effective pad stiffness decreased. Because grooving the pad reduce its effective stiffness and it makes slurry distribution to be uniform. Futhermore, it ensures that pad conforms to wafer-scale flatness variability. By grooving the top pad, it is possible to reduce its stiffness and hence reduce WIWNU and edge effect.