• 한국전기전자재료학회논문지
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• 제21권3호
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• pp.203-207
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• 2008

Chemical mechanical polishing (CMP) allows the planarization of wafers with two or more materials. There are many elements such as slurry, polishing pad, process parameters and conditioning in CMP process. Especially, polishing pad is considered as one of the most important consumables because this affects its performances such as WIWNU(within wafer non-uniformity) and MRR(material removal rate). In polishing pad, grooves and pores on its surface affect distribution of slurry, flow and profile of MRR on wafer. A subject of this investigation is to apply CMP for planarization of shallow trench isolation structure using microstructure(MS) pad. MS pad is designed to have uniform structure on its surface and manufactured by micro-molding technology. And then STI CMP performances such as pattern selectivity, erosion and comer rounding are evaluated.

• 대한기계학회:학술대회논문집
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• 대한기계학회 2003년도 추계학술대회
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• pp.314-319
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• 2003

The concept of lean-premixed combustion in gas turbine combustor operation has become a standard in recent years as an effective means to meet stringent enviromental standards on NOx emissions. The combustion characteristics of 75 kW class lean premixed combustor were investigated at the conditions of high temperature and ambient pressure. The exit temperature and emissions of CO and NOx were measured at the center of exit plane. The high temperature air of $550K{\sim}650K$ was supplied through air preheater. As expected, experimental results indicate that NOx emission was increased and CO emission was decreased by increasing inlet air temperature. But CO emission measured at the center of exit plane was increased because of the non-uniform radial direction profiles. The Semi-Empirical Correlation method was applied to obtain the design point emissions of NOx and CO. Also the flame temperature, CO and NOx emissions were measured along the centerline of liner at 650K inlet air temperature to determine the position of dilution holes.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2002년도 금형가공 심포지엄
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• pp.274-284
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• 2002

Deep drawing process for rectangular drawn section is different with that for axisymmetric circular one. Therefore deep drawing process for rectangular drawn section requires several intermediate steps to generate the final configuration without any significant defect. In this study, finite element analysis for multi-stage deep drawing process for high precision rectangular cases is carried out especially for an extreme aspect ratio. The analysis is performed using rigid-plastic finite element method with an explicit time integration scheme of the commercial program, LS-DYNA3D. The sheet blank is modeled using eight-node continuum brick elements. The results of analysis show that the irregular contact condition between blank and die affects the occurrence of failure, and the difference of aspect ratio in the drawn section leads to non-uniform metal flow, which may cause failure. A series of experiments for multi-stage deep drawing process for the rectangular cases are conducted, and the deformation configuration and the thickness distribution of the drawn rectangular cases are investigated by comparing with the results of the numerical analysis. The numerical analysis with an explicit time integration scheme shows good agreement with the experimental observation.

• 한국표면공학회지
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• 제27권3호
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• pp.158-165
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• 1994

Cu-Cr alloy thin film requires good quality of etching be used for TAB technology. The etched cross sec-tion was clean enough when the etching was performed in 0.1M $FeCl_3$ solution at $50^{\circ}C$. The etching rate was increased with the amount of $KMnO_4$. For enhanced profile of cross section and rate, the spray etchning was found to be superior compared to the immersion etching. A series of experiments were performed to improve the uniformity of the current distribution in electrodeposition onto the substrate with lithographic patterns. Copper was electrodeposited from quiescent-solution, paddle-agitated-solution, and air-bubbled-solution to in-vestigate the effect of the fluid flow. The thickness profile of the specimen measured by profilmetry has the non uniformity at feature scale in quiescent-solution, because of the longitudinal vortex roll caused by the natural convection. However, uniform thickness profile was achieved in paddle-agitated or air bubbled solu-tion.

• 대한조선학회논문집
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• 제33권1호
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• pp.9-18
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• 1996

본 논문은 불균일한 선미 유동장에서 작동하는 프로펠러의 성능 해석을 위한 포텐셜을 기저로 한 판요소법을 기술하고 있다. 본 방법은 법선 다이폴과 쏘오스를 프로펠러의 날개, 허브, 그리고 후류면에 분포하였고, 비정상 유동의 해석 방법으로는 시간 전진법에 의한 방법을 취함으로써 다이폴의 세기를 미지수로 하는 적분방정식을 얻고, 이산화하여 수치적으로 계산하였다. 2차원 날개에 대한 수치해석을 수행하여 해석해와 비교함으로써 시간간격에 대한 수렴성을 확보하였다. 또한, DTRC 4118 프로펠러에 대하여 조화반류하에서 작동하는 프로펠러의 비정상 성능을 해석하여 실험치와 비교함으로써 시간영역에서 프로펠러의 비정상 성능해석이 가능함을 보였다.

• 한국세라믹학회지
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• 제53권5호
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• pp.483-488
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• 2016

Anode supported solid oxide fuel cells (SOFCs), consisting of Ni+YSZ anode, YSZ electrolyte, and LSM+YSZ cathode, were fabricated and constant current tested with direct internal reforming of methane (steam to carbon ratio ~ 2) as well as hydrogen fuel at $800^{\circ}C$. The cell, operated under direct internal reforming conditions, showed relatively rapid degradation (~ 1.6 % voltage drop) for 95 h; the cells with hydrogen fuel operated stably for 170 h. Power density and impedance spectra were also measured before and after the tests, and post-test analyses were conducted on the anode parts using SEM / EDS. The results indicate that the performance degradation of the cell operated with internal reforming can be attributed to carbon depositions on the anode, which increase the resistance against anode gas transport and deactivate the Ni catalyst. Thus, the present study shows that direct internal reforming SOFCs cannot be stably operated even under the condition of S/C ratio of ~ 2, probably due to non-uniform mixture (methane and steam) gas flow.

• Computers and Concrete
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• 제23권5호
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• pp.329-334
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• 2019

Traffic flow capacity of some old road bridges is insufficient due to limited deck width. In such cases bridge deck widening is a common solution. For multi-girder reinforced concrete (RC) bridges it is possible to add steel-concrete composite girders as the new outermost girders. The deck widening may be combined with bridge strengthening thanks to thickening of the existing deck slab. Joint action of the existing and the added parts of such bridge span must be ensured. It refers especially to the horizontal plane at the interface of the existing slab and the added concrete layer as well as to the vertical planes at the external surfaces of the initially outermost girders where the added girders are connected to the existing bridge span. Since the distribution of the added concrete is non-uniform in the span cross-section the structure is particularly sensitive to the added concrete shrinkage. The shrinkage induces shear forces in the aforementioned planes. Widening of a 12 m long RC multi-girder bridge span is numerically analysed to assess the influence of the added concrete shrinkage. The analysis results show that: a) in the vertical plane of the connection of the added and the existing deck slab the longitudinal shear due to the shrinkage of the added concrete is comparable with the effect of live load, b) it is necessary to provide appropriate longitudinal reinforcement in the deck slab over the added girders due to tension induced by the shrinkage of the added concrete.

• International Journal of Naval Architecture and Ocean Engineering
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• 제13권1호
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• pp.450-465
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• 2021

In this study, an attempt has been made to investigate the water-entry characteristics of the high-speed parallel projectile numerically. The shear stress transport k-𝜔 turbulence model and the Zwart-Gerber-Belamri cavitation model based on the Reynolds-Averaged Navier-Stokes method were used. The grid independent inspection and grid convergence index is carried out and verified. The influences of the parallel water-entry on flow filed characteristics, trajectory stability and drag reduction performance for different values of initial water-entry speed (𝜈₀ = 280 m/s, 340 m/s, 400 m/s) and clearance between the parallel projectiles (L_p = 0.5D, 1.0D, 2.0D, 3.0D) are presented and analyzed in detail. Under the condition of the parallel water-entry, it can be found that due to the intense interference between the parallel projectiles, the distribution of cavity is non-uniform and part of the projectile is exposed to water, resulting in the destruction of the cavity structure and the decline of trajectory stability. In addition, the parallel projectile suffers more severe lateral force that separates the two projectiles. The drag reduction performance is impacted and the velocity attenuation is accelerated as the clearance between the parallel projectiles reduces.

• 대한조선학회논문집
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• 제30권1호
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• pp.73-86
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• 1993

균일 유동장 중에서 작동 중인 선박 프로펠러의 정상 성능 추정을 위하여 포텐셜을 기저로한 패널법을 기술하고 있다. 본 방법은 법선 다이폴과 쏘오스를 프로펠러 날개, 허브, 후류면에 분포함으로써 다이폴의 세기를 미지수로 하는 적분방정식을 얻고, 이산화과정을 거쳐 수치적으로 계산된다. 비평면 사각형 패널위에 있는 법선 다이폴에 의해 유기되는 포텐셜을 구하기 위하여 쌍곡면 요소를 채택하고 있다. Kutta 조건은 반복계산에 의해 날개 뒷날에서의 압력 점프를 없앰으로써 만족시킨다. 수렴성을 보이기 위하여 상세한 수치시험을 수행하였으며, 동시에 후류면 모형화가 성능에 미치는 영향도 조사하였다. 프로펠러의 단독 모형시험 결과와 수치추정 결과가 잘 일치하는 것을 보였다.

• Nuclear Engineering and Technology
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• 제55권3호
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• pp.947-957
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• 2023

Curved cylindrical structures such as elbows have a non-uniform thickness distribution due to their fabrication process, and as a result have a number of complex mode shapes, including circumferential and axial nodal patterns. In nuclear power plants, material degradation is induced in pipes by flow accelerated erosion and corrosion, causing the wall thickness of carbon steel elbows to gradually thin. The corresponding frequencies of each mode shape vary according to the wall thinning state. Therefore, the thinning state can be estimated by monitoring the varying modal characteristics of the elbow. This study investigated the varying modal characteristics of artificially thinned carbon steel elbows for each thinning state using numerical simulation and experimental methods (MRIT, Multiple Reference Impact Test). The natural frequencies of specified mode shapes were extracted, and results confirmed they linearly decreased with increasing thinning. In addition, by comparing single FRF (Frequency Response Function) data with the results of MRIT, a concise and cost effective thinning estimation method was suggested.