• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.4
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• Journal of the Korean Society of Marine Environment & Safety
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• v.23 no.5
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• pp.541-548
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• 2017

A theoretical study on gas-liquid two-phase flow flushing systemnitrogen gas to the oil used for existing flushing equipment was conducted on the basis of ISO code so as to improve performance of existing high-temperature oil flushing equipment used in ocean plant facility drying field. For study, we analyzed process simulation results mixed fluid mixing ratio, temperature, Reynolds number and liquid hold up affectcleaning performance after designing oil-nitrogen gas mixture flushing system process. As a result, as the volume flow rate of mixed fluid increases with the tube diameter the volume fraction of the gas phase constant, the liquid fraction difference value at the inlet and outlet of horizontal hydraulic piping increases. It was found that the phase distribution between oil and nitrogen gas bubbles varies depending on the position the pipe lengthdirection. This change in phase distribution is expected to have a significant impact on the clean performance of an oil-nitrogen gas mixture flushing system.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2000.11a
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• pp.532-534
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• 2000

Si thin films on p-type (100) Si substrate have been fabricated by pulsed laser deposition technique using a Nd:YAG laser. The pressure of the environmental gas during deposition was varied from 1 to 3 Torr. After deposition, Si thin film has been annealed again at nitrogen ambient. Strong violet-indigo photoluminescence have been observed from Si thin film annealed in nitrogen ambient gas. As increasing environmental gas pressure, weak green and red emissions from annealed Si thin films also observed by photoluminescence.

• 전기의세계
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• v.30 no.5
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• pp.306-312
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• 1981

The Townsend discharge domain is generally observed with stable positive characteristics in N$_{2}$ gas discharge at low pressures differently in the others, which transfer immediately to glow dischage after self-sustaining discharge starts. In this paper, the presence of the stable Townsend discharge, applied voltage-discharge current characteristics and the effect of disgased electrode surface on stable townsend discharge are studied experimentaly in N$_{2}$ gas mixed with 0.05% of No in volume. As the result of this experiment, the stable Townssend discharge is observed only in pure nitrogen with the valve of pd.geq.8[torr.cm] (p=gas pressure, d=gap spacing), but not in gas mixtures. This is considered that No gas in gas mixtures disexcites effectively the metestble state of nitrogen.

• Carbon letters
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• v.3 no.4
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• pp.187-191
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• 2002

In the present research, we prepared the activated carbon (AC) sorbents to remove gas-phase mercury. The mercury adsorption of virgin AC, chemically treated AC and fly ash was performed. Sulfur impregnated and sulfuric acid impregnated ACs were used as the chemically treated ACs. A simulated flue gas was made of SOx, NOx and mercury vapor in nitrogen balance. A reduced mercury adsorption capacity was obtained with the simulated gas as compared with that containing only mercury vapor in nitrogen. With the simulated gas, the sulfuric acid treated AC showed the highest performance, but it might have the problem of corrosion due to the emission of sulfuric acid. It was also found that the high sulfur impregnated AC also released a portion of sulfur at $140^{\circ}C$. Thus, it was concluded that the low sulfur impregnated AC was suitable for the treatment of flue gas in terms of stability and efficiency.

• Proceedings of the Korea Society for Energy Engineering kosee Conference
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• 1999.05a
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• pp.89-93
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• 1999

Experimental studies are conducted to investigate the flame stability and the thermal/fuel NOx formation characteristics of the low calorific value(LCV) gas fuel. Synthetic LCV fuel gas is produced through mixing carbon monoxide, hydrogen, nitrogen and ammonia on the basis that the thermal input of the syngas fuel into a burner is identical to that of natural gas, and then the syngas mixture is fed to and burnt with air on flat flame burner. Flame behaviors are observed to identify flame instability due to blow-off or flash-back when burning the LCV fuel gas at various equivalence ratio conditions. Measurements of NOx in combustion gas are made for comparing thermal and fuel NOx emissions from the LCV syngas combustion with those of the natural gas one, and for analyzing ammonia to NOx conversion mechanism. In addition, the nitrogen dilution of the LCV syngas is preliminarily attempted as a NOx reduction technique.

• Journal of Pharmaceutical Investigation
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• v.22 no.3
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• pp.197-204
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• 1992

A gas chromatographic method using nitrogen phosphorous selective detection was developed for simultaneous determination of haloperidol and its metabolite, reduced haloperidol, in human plasma. Combelen was used as internal standard, The method involved extraction and trimethylsilylation followed by the injection of $2-4\;{\mu}l$ of benzene layer, which was used to dissolve the trimethylsilylated derivatives of haloperidol and reduced haloperidol, onto SE-54 column [5% phenyl methyl silica fused capillary column, $16m{\times}0.22\;mm$ $(I.D.){\times}0.33\;{\mu}m$ (coated thickness)]. The temperature of column oven was programmed from $200^{\circ}C\;to\;300^{\circ}C$ at the increase rate of $10^{\circ}C/min and also the temperatures of injector and detector were set at $300^{\circ}C$. Helium was used as carrier gas and its flow rate was maintained at 30 ml/min. The detection was conducted with nitrogen phosphorous selective detector. The retention times for combelen, reduced haloperidol and haloperidol were found to be 9.14, 9.75 and 9.99 min, respectively. The detection limits for haloperidol and reduced haloperidol in human plasma were both 0.2 ng/ml. The coefficients of variation of the intra-assay were generally low (below 9.8%). The mean absolute recoveries of added haloperidol and reduced haloperidol from plasma were 72% and 84%, respectively. No interferences from endogenous substances were found.

• Journal of the Korean Chemical Society
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• v.35 no.6
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• pp.659-666
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• 1991

A systematic analysis of 18 stimulants and narcotic analgesics containing nitrogen atom (s) in human urine by gas chromatography with nitrogen phosphorus detector (GC-NPD), is described. The urinary extract with diethyl ether at pH 8.5 showed good recoveries of the drugs and less interference peaks on GC chromatogram. Retention data were standardized by the calculation of relative retention times using diphenylamine as the internal standard. The relative standard deviations of retention times were less than 0.1% for the within-run analyses. The response factor (RRF) of a drug relative to the internal standard was calculated. RRF decreased with increasing number of nitrogen atoms. This technique can be adapted to various analytical toxicology problems.

• Korean Journal of Materials Research
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• v.12 no.6
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• pp.427-430
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• 2002

Plasma nitrocarburizing treatment was performed for SCM 435 steel by using a plasma ion nitriding system. The effects of the variation of nitrogen and methan contents upon the hardened layer was investigated. Both the thickness of the compound layer and the amount of $\varepsilon$ phase in the compound layer increased with increasing nitrogen content. However, the thickness of the compound layer decreased due to unstable plasma for an atmosphere containing 90% $N_2$ gas content in the gas mixture. The amount of $\varepsilon$phase in the compound layer increased with increasing $CH_4$ gas content. For $CH_4$ gas content more than 2% in the gas mixture, the thickness of the compound layer decreased due to the formation of $\theta$ phase.

• Journal of Sensor Science and Technology
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• v.15 no.1
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• pp.13-19
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• 2006

The micro-gas sensor based on carbon nanotubes (CNTs) was fabricated and its gas sensing characteristics on nitrogen dioxide ($NO_{2}$) have been investigated. The sensor consists of a heater, an insulating layer, a pair of contact electrodes, and CNT-sensing film on a micromachined diaphragm. The heater plays a role in the temperature change to modify sensor operation. Gas sensor responses of CNT-film to $NO_{2}$ at room temperature are reported. The sensor exhibits a reversible response with a time constant of a few minutes at thermal treatment temperature of $130^{\circ}C$.