• 제어로봇시스템학회:학술대회논문집
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• 1990.10b
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• pp.1312-1315
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• 1990

Nanometer positioning control with high velocity and long stroke is discussed. A one-axis stage mechanism driven by an AC linear motor and guided by a rolling ball guide has been constructed. Coarse and fine position controls are designed by using nonlinear dynamics of the rolling guide. Switching from coarse positioning to fine positioning is studied.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.4
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• pp.353-360
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• 2008

The LGP with nanometer structures resulted in enhancement of optical efficiency. Its fundamental mechanism is to recycle the polarized light via one round-trip through QWP(Quarter-Wave Plate) but the maximum efficiency to reach with this method is limited up to 2. To get the larger efficiency than this limited one a LGP with nanometer-patterned grating is suggested. For its optimum design the computer simulation is performed and suggests a grating that the spatial frequency between adjacent patterns is 500nm, its height 250nm, duty cycle 50%, and its cross section is rectangular. On the basis of simulation results the LGP with nanometer-patterned grating is fabricated and its optical properties such as angular intensity distribution and CIE color coordinates are characterized. The angles of transmitted light are nearly the same as the results expected from the generalized Snell's law. Thus the Mathematica code, developed in this experiment, will be applied to designing the optimized LGP. The LGP with nanometer-patterened grating shows the enhancement of transmitted intensity distribution up to 4.9 times.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2007.11a
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• pp.103-104
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• 2007

Nanometer-scaled polymer beads, such as polystyrene beads, were used as nanometer fabrication materials due to their some advantages such as self-assembled monolayer, nanometer scaled size and excellent compatibility with silicon based devices. Thus, the investigation on these properties of polymer beads was required. It is difficult to control the array of polystyrene beads on silicon substrate. In this study, we investigated the condition of selective array of polystyrene beads on nanometer-scaled hydrophilic surface which was obtained by APS coating. A tilting method was used to array the polystyrene beads selectively on the substrate. The polystyrene beads could be arrayed selectively by this method. From these results, we verified that there are possibilities to fabricate unique tools for the nanometer-scaled electrical devices.

• Bulletin of the Korean Chemical Society
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• v.29 no.6
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• pp.1179-1184
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• 2008

Commercial nanometer sized silver is widely used for its antibacterial effect; however, nanoparticles may also have ecotoxicological effects after being discharged into water. Nanometer sized silver can flow into aquatic environments, where it can exert a variety of physiologically effects in living organisms, including fish. The present study aimed to investigate the effect of nanometer sized silver on the development of zebrafish embryos, analyze the properties of commercial nanometer sized silver and define the toxicity relationship between embryogenesis and hatched flies. The commercial nanometer sized silver was analyzed in the $Ag^+$ ion form. The hatch rate decreased in the nano-silver exposed groups (10 and 20 ppt); furthermore, the hatched flies had an abnormal notochord, weak heart beat, damaged eyes and curved tail. The expression of the Sel N1 gene decreased in the nano-silver exposed groups, and the catalase activities of the exposed groups increased relative to those in the control group. Therefore, the $Ag^+$ ions in commercial nanometer sized silver could accumulate in aquatic environments and seriously damage the development of zebrafish embryos.

• Journal of Institute of Control, Robotics and Systems
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• v.14 no.6
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• pp.530-534
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• 2008

The LGP with nanometer structures resulted in enhancement of optical efficiency. Its fundamental mechanism is to recycle the polarized light via one round-trip through QWP(Quarter-wave Plate) but the maximum efficiency to reach with this method is limited up to 2. To get the larger efficiency than this a LGP with 1D PC(one-dimensional photonic crystal) nanometer-patterned on its top and bottom surfaces is suggested. For its optimum design the computer simulation is performed and suggests a grating that the spatial frequency between adjacent patterns is 500nm, its height 250nm, duty cycle 50%, and its cross section is rectangular. The angles of transmitted light are nearly the same as the results expected from the generalized Snell's law. Thus the Mathematica code, developed in this experiment, will be applied to designing the optimized LGP. The LGP with nanometer-patterened 1D PC LGP on its both surfaces shows the enhancement of transmitted intensity distribution up to 5.7 times.

• Journal of the Korean Society for Precision Engineering
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• v.30 no.12
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• pp.1313-1320
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• 2013

An ultraprecision multi-axis machine tool has been designed and developed in our laboratory. The machine tool has four moving axes which are composed of three linear axes and one rotational axis. It has a gantry type structure and the Z-axis is on the X-axis and the C-axis, on which a workpiece is located, is inside the Y-axis. This paper shows control performance improving method and procedure for the ultra-precision positioning control of a hydrostatic bearing guided linear axis. Through improvements of electrical and mechanical components for the control system such as control electronics and oil pumping systems, the control disturbing noise is decreased. Also by the frequency domain analysis of control system those problem-making system components are identified and modified with analytical methods. The controller is analyzed and designed from frequency domain data and system information. In the experimental control results the nanometer order control result is successfully presented.

• Transactions on Electrical and Electronic Materials
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• v.15 no.3
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• pp.159-163
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• 2014

More accurate CD (Critical Dimension) control is required for the nanometer-scaled devices. However, since the reflectivity between substrate and PR (Photoresist) becomes higher, the CD (Critical Dimension) swing curve was intensified. The higher reflectivity also causes PR notching due to the pattern of sub-layer. For this device requirement, it was optimized for the thickness, refractive index(n) and absorption coefficient(k) in the bottom anti-reflective coating(BARC; SiON) and photoresist with the minimum reflectivity. The computational simulated conditions, which were determined with the thickness of 33 nm, n of 1.89 and k of 0.369 as the optimum condition, were successfully applied to the experiments with no standing wave for the 0.13um-device. At this condition, the lowest reflectivity was 0.44%. This optimum condition for BARC SiON film was applied to the process for 0.13um-device. The optimum SiON film as BARC to PR and sub-layer could be formed with the accurate CD control and no standing waver for the nanometer-scaled semiconductor manufacturing process.

• Journal of KSNVE
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• v.9 no.6
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• pp.1227-1233
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• 1999

Modern technology depends on the reliability of extremely high technology equipments. In the production of semiconductor wafer, optical and electron microscopes, ion-beam, laser device must maintain their alignments within a nanometer. This equipment requires a vibration free environment to provide its proper function. Especially, lithography and inspection devices, which have sub-nanometer class high accuracy and resolution, have come to necessity for producing more improved giga and tera class semiconductor wafers. This high technology equipments require very strict environmental vibration standard, vibration criteria, in proportion to the accuracy of the manufacturing, inspecting devices. This paper deals with the structural dynamic design in high class semiconductor factory in order to be satisfied more strict vibration criteria for high sensitive equipment.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.11a
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• pp.313-314
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• 2010

• Transactions of the Korean Society of Mechanical Engineers
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• v.17 no.7 s.94
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• pp.1731-1739
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• 1993

An application of Scanning Tunneling Microscopy(STM) is investigated for the measurement of 3-dimensional profiles of the macro-machined patterns of which critical dimensions lie in the range of submicrometers. Special emphasis of this investigation is given to extending the measuring ranges of STM upto the order of several micrometers while maintaining superb nanometer measuring resolution. This is accomplished by correcting hysteresis effects of piezoelectric actuators by using non-linear compensation models. Detailed aspects of design and control of a prototype measurement system are described with some actual measuring examples in which fine It patterns can successfully be traced with a resolution of 1 nanometer over a surface range of $4{\times}2$ micrometers.