• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.214-219
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• 1997

We propose a new scheme of high-resolution heterodyne interferometer that employs the two-axial mode He-Ne laser with an inter-mode beat frequency of 600-1000 MHz. An electronic RF-heterodyne circuit lowers the beat frequency down to 5 MHz, so that the phase change of the interferometer output is precisely measured with a displacement resolution of 0.1 nanometer without significant loss of dynamic bandwidth. A thermal control scheme is adopted to stabilize the cavity length with aims to suppress frequency drifts caused by the phenomena of frequency pulling and polarization anisotropy of the two-axial mode laser to a stability level of 2 parts in $10^9$. The two-axial mode HeNe laser yields a high output power of 2.0 mW, whlch allows us to perform multiple measurements of up to 10 machine axes simultaneously.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.311-314
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• 1997

According to the development of industrial equipment such as semiconductor manufacturing machines, optical device, and precision machine tool, a high-precision translation system with wide range has been required. This paper describes a high-precision 2-axis translation system, which consists of microstage and global stage. In order to achieve the highresolution in the long range, some engineering techniques are used. Three linear guides with flexible coupling are adopted to reduce the motor vibration in the global stage. A simple elastic hinge structure activated by five PZT is applied to reduce the angular dev~atlon. As the result of combination of microstage and global stage associated with some engineering techniques, the 2-axis translation system can measure the 200 X 200 mrn range with the nanometer accuracy.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.90-93
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• 2003

This paper described about the ultra-precision profile measurement of aspheric surfaces using contact probing technique. A contact probe has been designed as a sensing device to obtain measuring resolutions in nanometer regime utilizing a circle leaf spring mechanism and a capacitive-type sensor. The, contact probe is attached on the z-axis during measurement while aspheric object are supported on the diamond turning machine(DTM). The machine xz-axis motions are monitored by a set of two orthogonal plane mirror type laser interferometers. Experimental results show that the contact probing technique developed of on-machine measurement system in this investigation is capable of providing a repeatability of 10 nanometers with a $\pm$20 uncertainty of 200nmPv.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1178-1181
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• 2003

Nanotechnology is the creation and utilization of materials, devices, and systems through the control of matter on the nanometer-length scale, that is, at the level of atoms, molecules, and supramolecular structures. The essence of nanotechnology is the ability to work at these levels to generate larger structures with fundamentally new molecular organization. These nanostructures, made with building blocks understood from first principles, are the smallest human-made objects, and they exhibit novel physical, chemical, and biological properties and phenomena. The aim of nanotechnology is to learn to exploit these properties and efficiently manufacture and employ the structures. Control of matter on the nanoscale already plays an important role in scientific disciplines as diverse as physics, chemistry, materials science, biology, medicine, engineering, and computer simulation. This paper describes the superprecision nano separator to productive particle size of nano powder. this separator system is very important in the industrial area for other high technology parts.

• International Journal of Precision Engineering and Manufacturing
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• v.6 no.3
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• pp.8-12
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• 2005

The positioning system for an ultra precision machine tool must be accurate to the order of a nanometer. Various feed drive devices have been proposed to achieve this resolution; currently, most attention is directed towards hydrostatic lead screws and friction drives. It has been reported that a positioning resolution accurate to an angstrom can be achieved using a twist-roller friction drive. Therefore, we manufactured an ultra precision positioning system driven by a twist-roller friction drive and assessed its performance when defining problems and finding solutions. Our study showed that the twist-roller friction drive is mechanically suitable for ultra precision positioning, but some considerations are required to obtain a higher resolution.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.26 no.5
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• pp.710-715
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• 2002

The spherical nonagglomerated and uniform nanometer-size SiO$_2$particles are synthesized by the injection of TEOS vapor, irons and reaction gas in a furnace. Ions are generated by corona discharge and these ions charge SiO$_2$particles. As a result, spherical, nonagglomerated and ultrafine particles are generated in various conditions. Their morphology, charging portion and size distribution are examined by using TEM, ESP and SMPS. As the applied voltage of electrode changes from 0 to 5.0 kV, it is observed that the melon diameter of SiO$_2$particle decreases from 94 nm to 42 nm.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.29 no.12 s.243
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• pp.1307-1312
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• 2005

Turbulent in-situ mixing process is a new material process technology to get dispersed phase in nanometer size by controlling reaction of liquid/liquid, liquid/solid and liquid/gas, flow and solidification speed simultaneously. In this study mixing, the key technology to this synthesis method will be studied by computational fluid dynamics. For the simulation of mixing of liquid metal, static mixers will be investigated. Two inlets for different liquid metal meet and merge like 'Y' shape tube. The tube has various shapes such as straight and curved. Also, the radius of curve will be varied. The performance of mixer will be evaluated with quantitative analysis with coefficient of variance of mass fraction. Also, detailed plots of intersection will be presented to understand effect of mixer shape on mixing.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2003.06a
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• pp.1207-1210
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• 2003

This paper deals with experiments for dynamic characteristics and performance evaluation of the 3-axis fine positioning stage developed in [1]. The features of the developed fine positioning stage are the long stroke due to the magnetically preloaded PZT actuators, the minimum motion crosstalk due to the use of a ball contact mechanism and the compact design. The dynamic characteristics of the actuator and the stage are tested with the preload changed in order to validate the actuator and the stage design. Performance evaluation is also made for the PZT actuators as well as the stage positioning accuracy. Experimental results show that the developed stage is accurate enough to be used for nanometer positioning.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.1
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• pp.34-38
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• 2008

The surface texture of a product is generally produced by etching or sandblasting. However, these techniques have problems related to repeatability and environmental pollution. Since current milling machines can produce small parts at the micrometer or nanometer level, the resolution of milling exceeds the manufactured dimensions of the surface texture produced by etching or sand-blasting. A method for generating surface texture by milling is proposed and demonstrated. The proposed method was demonstrated by actual milling using a three- or five-axis control machine, and the machined surface texture was measured with an interferometer to allow comparison with the designed shape. The measurement results demonstrate that the proposed method can generate a wide-area surface texture with good machining repeatability.

• International Journal of Precision Engineering and Manufacturing
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• v.9 no.3
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• pp.40-45
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• 2008

This paper presents a linear positioning system and its control algorithm design with nano accuracy/resolution. The basic linear stage structure is driven by an ultrasonic motor and its displacement feedback is detected by a LDGI (Laser Diffraction Grating Interferometer), which can achieve nanometer resolution. Due to the friction driving property of the ultrasonic motor, the driving situation differs in various ranges along the travel. Experiments have been carried out in order to observe and realize the phenomena of the three main driving modes: AC mode (for mm motion), Gate mode (for ${\mu}m$ motion), and DC mode (for nm motion). A proposed FCMAC (Fuzzy Cerebella Model Articulation Controller) control algorithm is implemented for manipulating and predicting the velocity variation during the motion of each mode respectively. The PCbased integral positioning system is built up with a NI DAQ Device by a BCB (Borland $C^{++}$ Builder) program to accomplish the purpose of an intelligent nanopositioning control.