• Journal of Institute of Control, Robotics and Systems
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• v.22 no.4
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• pp.271-275
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• 2016

For machining systems like the motor driven linear stage which have high precision positioning with a long stroke, it is necessary to examine the repeatability of the reference position decision. Though piezo (PZT) actuator driven linear stages have high precision feed drivers and a short stroke, they have some limitations for reference position decisions if they have not been equipped with an accurate home sensor. This study was performed to examine the repeatability for home position decision of a EE-SX671 photo sensor as a home switch by using piezo actuator driven linear stages and capacitance probe.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.96-96
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• 2016

Nanotechnology mostly employs nano-materials and nano-structures with distinctive properties based on their size, structure, and composition. It is quite difficult to produce nano-materials and nano-structures with identical sizes, structures, and compositions in large quantities, because of spatiotemporal fluctuation of production processes. In other words, fluctuation is the bottleneck in nanotechnology. We propose three strategies to suppress such fluctuations: employing 1) difference between linear and nonlinear phenomena, 2) difference in time constants, and 3) nucleation as a bottleneck phenomenon. We are also developing nano- and micro-scale guided assembly using plasmas as a plasma nanofabrication.1-5) We manipulate nano- and micro-objects using electrostatic, electromagnetic, ion drag, neutral drag, and optical forces. The accuracy of positioning the objects depends on fluctuation of position and energy of an object in plasmas. Here we evaluate such fluctuations and discuss the mechanism behind them. We conducted in-situ evaluation of local plasma potential fluctuation using tracking analysis of fine particles (=objects) in plasmas. Experiments were carried out with a radio frequency low-pressure plasma reactor, where we set two quartz windows at the top and bottom of the reactor. Ar plasmas were generated at 200 Pa by applying 13.56MHz, 450V peak-to-peak voltage. The injected fine particles were monodisperse methyl methacrylate-polymer spheres of $10{\mu}m$ in diameter. Fine particles were injected into the reactor and were suspended around the plasma/sheath boundary near the powered electrode. We observed binary collision of fine particles with a high-speed camera. The frame rate was 1000-10000 fps. Time evolution of their distance from the center of mass was measured by tracking analysis of the two particles. Kinetic energy during the collision was obtained from the result. Potential energy formed between the two particles was deduced by assuming the potential energy plus the kinetic energy is constant. The interaction potential is fluctuated during the collision. Maximum amplitude of the fluctuation is 25eV, and the average is 8eV. The fluctuation can be caused by neutral molecule collisions, ion collisions, and fluctuation of electrostatic force. Among theses possible causes, fluctuation of electrostatic force may be main one, because the fine particle has a large negative charge of -17000e and the corresponding electrostatic force is large compared to other forces.

• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2009.05a
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• pp.627-630
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• 2009

The combination of the marine use various multi sensor surveillance system technology with the development of servo motion control algorithm and gyro sensor in six freedom motion is implemented to analyze the movement response. The stabilization of the motion control is developed and Nano driving Precision Pan-Tilt/Gimbal system is obtained from the security positioning cameras with ultra high speed device is used to carry out the exact behavior of the device. The exact behavior will be used to make a essential equipment. Finally the development of the Nano Driving Multi Sensor, Nano of Surveillance System Driving Precision Pan-Tilt/Gimbal optimal design and production, 3-aix Gyro Sensor based with Servo Motion Control algorithm development, Image trace video software and hardware tracking the development is organized and discuss in details. The development of the equipment and the system integration are fully experimented and verified.

• Proceedings of the Korean Society For Composite Materials Conference
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• 2003.10a
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• pp.154-157
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• 2003

Precision displacement of less than a few nm resolution was measured in real-time using fiber optic EFPI sensor. The novel method for real-time processing of analyzing EFPI output signal was developed and verified. Linearity in the mean values of interferometric light intensity among adjacent fringes was shown, and the sinusoidal approximation algorithm that estimates past and coming fringe values was verified through the linearity. Real-time signal processing program was developed, and the intensity signal of the EFPI sensor was transformed to the phase shift with this program. The resolution below 0.4 ~ 10 nm in the displacement range of $0 ~ 300\mu\textrm{m}$ was obtained by reducing the photodetector noise using low-pass filter and signal averaging. The nano-translation stage with a Piezo-electric actuator and the EFPI sensor system was designed and tested. This stage successfully reached to the desired destination in $15\mu\textrm{m}$ range within 1 nm accuracy.

• Journal of the Semiconductor & Display Technology
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• v.2 no.2
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• pp.31-37
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• 2003

This paper presents a measurement system of mechanical property using dual servo system. There are many kinds of method to measure material properties such as tensile test, indention and bending test. It is highly required to measure the properties of nano-sized material and structure. However, It is need more accurate measurement system, more stable and frequency response than conventional test. In this paper, we designed the dual servo system for a measuring instrument The dual servo system consisting of a coarse stage and a fine motion stage with VCM and PZT is proposed. Mechanical mechanism is designed with the leaf spring type of flexure hinge joint. Lead compensator is applied to this control system, and is designed by PQ method.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.3
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• pp.111-119
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• 2006

The ultra-precision stage is demanded for some industrial fields such as semiconductor lithography, ultra-precision machining, and fabrication of nano structure. A new stage was developed for those applications in order to obtain nano meter resolution. This stage consists of symmetric double parallelogram mechanism using flexure hinges. The mechanical properties such as strength of the flexures and deformations along the applied force were analyzed using FEM. The stage is actuated by a piezoelectric actuator and its movement was measured by a ultra-precision linear encoder. In order to improve positioning performance, a PID controller was designed based on the identified second order transfer function. Experimental results showed that this stage could be positioned within below 5 nm resolution irrespective of hysteresis and creep by the controller.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.213-218
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Journal of Electrochemical Science and Technology
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• v.1 no.2
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• pp.69-74
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• 2010

Methodologies to improve photovoltaic performance of dye-sensitized solar cell (DSSC) are reviewed. DSSC is usually composed of a dye-adsorbed $TiO_2$ photoanode, a tri-iodide/iodide redox electrolyte and a Pt counter electrode. Among the photovoltaic parameters of short-circuit photocurrent density, open-circuit voltage and fill factor, short-circuit photocurrent density is the collective measure of light harvesting, charge separation and charge collection efficiencies. Internal quantum efficiency is known to reach almost 100%, which indicates that charge separation occurs without loss by recombination. Thus, light harvesting efficiency plays an important role in improvement of photocurrent. In this paper, technologies to improve light harvesting efficiency, including surface area improvement by nano-dispersion, size-dependent light scattering efficiency, bi-functional nano material, panchromatic absorption by selective positioning of three different dyes and transparent conductive oxide (TCO)-less DSSC, are introduced.

• Proceedings of the KIEE Conference
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• 2004.11c
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• pp.723-725
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• 2004

An iterative robust control design for PZT using Gaussian wavelet networks is proposed. A Gaussian wavelet network with accurate approximation capability is employed to approximate the nonlinear hysteresis dynamics of PZT systems by using an iterative control algorithm. Depending on the finite number of wavelet basis functions which results in unavoidable approximation errors, a robust control law is provided to guarantee the stability of the closed-loop nano positioning system. Finally, the effectiveness of the robust control approach is illustrated through comparative simulations on a PZT.

• Proceedings of the Optical Society of Korea Conference
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• 2005.02a
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• pp.350-351
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• 2005