• JSTS:Journal of Semiconductor Technology and Science
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• v.17 no.4
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• pp.524-533
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• 2017

This paper presents a novel reset scheme for mm-scale sensing systems with stringent volume and area constraints. In such systems, multi-layer structure is required to maximize the silicon area per volume and minimize the system size. The multi-layer structure requires wirebonding connections for power delivery and communication among layers, but the area overhead for wirebonding pads can be significant. The proposed reset scheme exploits already existing power wires and thus does not require additional wires for system-wide reset operation. To implement the proposed reset scheme, a power management unit is designed to impose reset condition, and a reset detector is designed to interpret the reset condition indicated by the power wires. The reset detector uses a coupling capacitor for the initial power-up and a feedback path to hold the developed supply voltage. The prototype reset detector is fabricated in a $180-{\mu}m$ CMOS process, and the measurement results with the prototype mm-scale system confirmed robust reset operation over a wide range of temperatures and voltages.

• Journal of Sensor Science and Technology
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• v.18 no.3
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• pp.197-201
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• 2009

This paper studies on the noncontact displacement sensor system to detect the displacement of the cylinder rod. For an inexpensive and a simple process, magnetic scales are printed on the cylinder rod, and magnetized by the specially designed magnetizer that has an yoke through the alternation of N and S pole. Noncontact displacement sensor system consists of cylinder with magnetic scales, Hall sensor, linear guide, controller and display. The system can detect the displacement of moving cylinder with 5 cm/sec in the case of 1 mm magnetic scale. It shows a possibility of position detection of hydraulic cylinder and air cylinder.

• Journal of Sensor Science and Technology
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• v.25 no.5
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• pp.310-319
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• 2016

Three types of gap sensors, a capacitive gap sensor, an eddy current gap sensor, and a Hall effect gap sensor are described and evaluated through experiments for the purpose of precise gap sensing for micrometer scale movement, and a novel type of differential hall effect gap sensor is proposed. Each gap sensor is analyzed in terms of resolution and environment dependency including temperature dependency. Furthermore, a transport system for AMOLED deposition is introduced as a typical application of gap sensors, which are recently receiving considerable attention. Based on the analyses, the proposed differential Hall effect gap sensor is found to be the most suitable gap sensor for precise gap sensing, especially for application to a transport system for AMOLED deposition. The sensor shows resolution of $0.63mV/{\mu}m$ for the overall range of the gap from 0 mm to 2.5 mm, temperature dependency of $3{\mu}m/^{\circ}C$ from $20^{\circ}C$ to $30^{\circ}C$, and a monotonic characteristic for the gap between the sensor and the target.

• Journal of Sensor Science and Technology
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• v.7 no.3
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• pp.171-178
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• 1998

Silicon piezoresistive absolute pressure sensor for gas leakage alarm system was developed. This sensor must operate normally in the range of $0{\sim}600\;mmH_{2}O$ pressure, and $0{\sim}100^{\circ}C$ temperature. To make the most of this sensor for gas leakage alarm system, gas must not leak from the sensor itself when the diaphragm of the sensor fractures. Thus, the sealed diaphragm cavity was anodically bonded to pyrex 7740 glass under the condition of $10^{-4}$ torr, at $400^{\circ}C$. The sensitivity of developed sensor was $4.06{\mu}V/VmmH_{2}O$ for $600\;mmH_{2}O$ full-scale pressure range. And temperature compensation method of this sensor is to change bridge-in put-voltage linearly in proportion to the temperature variation by using diode(PXIN4001) or Al thin film resistor. By these methods the temperature effect in the range of $0{\sim}100^{\circ}C$ was compensated over 80 % for offset drift, 95 % for sensitivity.

• Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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• v.29 no.8
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• pp.76-82
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• 2015

A hybrid fiber-optic sensor system which combines fiber Bragg grating sensors and a Michelson interferometer has been constructed and evaluated for condition monitoring of large scale wind turbines. In order to measure multiple stresses applied to wind turbines such as strain, temperature and vibration, the system uses single broadband light source. It addresses both types of sensors, which simplifies the optical setup and enhances the cost-effectiveness of condition monitoring system. An athermal-packaged FBG is used to supply quasi-coherent light, of which coherence length is about 3.28mm, for the Michelson interferometer demodulation. Experimental results demonstrated that the proposed fiber-optic sensor system was capable of measuring strain and temperature with measurement accuracy of 1pm. Also 500~2000Hz vibration signals were successfully analyzed by applying FFT signal processing to interference signals.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.378-391
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• 2002

A 250mm stroke aerostatic stage, which detects position with laser scale and is driven by linear motor, is made and analyzed positioning error in 20$\pm$ 0.5 $^{\circ}C$ controlled atmosphere, aiming at investigating positioning characteristic of ultra-precision stage. We prove this aerostatic stage has a 10nm micro step resolution by experiment. By means of analyzing laser interferometer system, the scale of measuring error is about 0.2-0.4$\mu\textrm{m}$ according to refractive index error from missing the temperature change. To improve laser interferometer system, compensate refractive index error using measuring data from thermocouple. And, confirm 0.10$\mu\textrm{m}$ repeatability and 0.13 $\mu\textrm{m}$ positioning accuracy using the compensating refractive index. Also, we confirm 0.07 ${\mu}{\textrm}{m}$ repeatability of the stage using capacitive displacement sensor.

• Korean Journal of Construction Engineering and Management
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• v.23 no.1
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• pp.64-72
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• 2022

The retaining wall structure is essential for construction work that performs underground excavation. Displacement management of the retaining wall structure is important regardless of the size of the construction. However, in the case of small-scale construction sites with an excavation depth of less than 10m, displacement management of retaining wall structure not properly performed due to problems such as 1) companies' smallness, 2) lack of capacity of construction managers, 3) complexity of installation, dismantling and displacement of measuring instruments. As a result of analyzing previous research, it was analyzed that it is difficult to apply this to a small - scale construction site because most of the previous research has problems in using an expensive 3D scanner or installing many measuring instruments. This study aims to propose a conceptual design of a displacement measurement system for retaining wall structure based on laser sensor and to verify the displacement recognition performance of core technology applied to the conceptual design. A conceptual design was proposed using a 2D laser scanner. As a result of verifying the displacement recognition of the 2D laser scanner, a displacement of 15mm was analyzed to be sufficiently understandable. In the future, if the proposed conceptual design is developed and applied to the small-scale construction site, it is thought that it will contribute to the reduction of safety accidents at small-scale construction sites.

• Journal of Advanced Marine Engineering and Technology
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• v.35 no.6
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• pp.829-834
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• 2011

This paper introduces a new system which measures abrasion quantity of cylinder liners of large-scale marine diesel engines. The proposed system consists of three parts; measurement part where an LVDT, a temperature sensor, a camera and LED for lighting control are installed, monitoring part which accomplishes measurement command transmission and monitoring based on PC or notebook, and master control part which controls the measurement part and transfers measurement data to the monitoring part. The accuracy of the developed system is compared with that of an internal micrometer with 1/100 mm accuracy.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2013.10a
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• pp.763-764
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• 2013

A three-dimensional image capturing device and its signal processing algorithm and apparatus are presented. Three dimensional information is one of emerging differentiators that provides consumers with more realistic and immersive experiences in user interface, game, 3D-virtual reality, and 3D display. It has the depth information of a scene together with conventional color image so that full-information of real life that human eyes experience can be captured, recorded and reproduced. 20 Mega-Hertz-switching high speed image shutter device for 3D image capturing and its application to system prototype are presented[1,2]. For 3D image capturing, the system utilizes Time-of-Flight (TOF) principle by means of 20MHz high-speed micro-optical image modulator, so called 'optical resonator'. The high speed image modulation is obtained using the electro-optic operation of the multi-layer stacked structure having diffractive mirrors and optical resonance cavity which maximizes the magnitude of optical modulation[3,4]. The optical resonator is specially designed and fabricated realizing low resistance-capacitance cell structures having small RC-time constant. The optical shutter is positioned in front of a standard high resolution CMOS image sensor and modulates the IR image reflected from the object to capture a depth image (Figure 1). Suggested novel optical resonator enables capturing of a full HD depth image with depth accuracy of mm-scale, which is the largest depth image resolution among the-state-of-the-arts, which have been limited up to VGA. The 3D camera prototype realizes color/depth concurrent sensing optical architecture to capture 14Mp color and full HD depth images, simultaneously (Figure 2,3). The resulting high definition color/depth image and its capturing device have crucial impact on 3D business eco-system in IT industry especially as 3D image sensing means in the fields of 3D camera, gesture recognition, user interface, and 3D display. This paper presents MEMS-based optical resonator design, fabrication, 3D camera system prototype and signal processing algorithms.

• Journal of the Korean Geophysical Society
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• v.9 no.4
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• pp.361-369
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• 2006

This study conducted an initialization test to decide dynamic position using AHRS IMU sensor, and derived attitude correction angles of vehicles against time through regression analysis. It was also found that the heading angle was stabilized with variation less than 1°after 60 seconds. Using these angles, this study carried out an experiment on the determination of dynamic position for each system in the open sky and in a semi-open sky. According to the results, in the open sky, DGPS alone systems were excellent in accuracy but poor in data acquisition, so the moving distance was around 12m. In DGPS/IMU combined system, accuracy and data acquisition were satisfactory and the moving distance was around 0.3m. In a semi-open sky, DGPS alone systems were excellent in accuracy in order of DGPS < FIMU < DGPS/IMU according to average and standard errors obtained with exclusion of places where data were not be obtained. The moving distance was the same as that in the open sky. For DGPS, when places where data were not obtainable were divided into Several block and they were compared, the maximum deviation from the trajectory was up to 41.5m in DGPS alone system, but it was less than 2.2m and average and standard errors were significantly improved in the combined system. When the navigation system was applied to surveys and the result was compared with position error 0.2mm under the guideline for digital map, it was possible to work on maps on a scale of up to 1 : 1,000.