Plasma Diagnosis of Ne:Xe, Ne:Ar Mixed Gases by Single Langmuir Probe in Inductively Coupled Plasma Light Source System (ICP 광원 시스템의 Ne:Xe, Ne:Ar 혼합가스의 단일탐침법을 이용한 플라즈마 진단)
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- Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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- 2006.05a
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- pp.91-95
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- 2006