Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference (한국전기전자재료학회:학술대회논문집)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Plasma Diagnosis of Ne:Xe, Ne:Ar Mixed Gases by Single Langmuir Probe in Inductively Coupled Plasma Light Source System

ICP 광원 시스템의 Ne:Xe, Ne:Ar 혼합가스의 단일탐침법을 이용한 플라즈마 진단

  • Choi, Yong-Sung (Department of Electrical Engineering, DongShin University) ;
  • Lee, Woo-Ki (Department of Electrical Engineering, DongShin University) ;
  • Moon, Jong-Dae (Department of Electrical Engineering, DongShin University) ;
  • Lee, Kyung-Sup (Department of Electrical Engineering, DongShin University) ;
  • Lee, Sang-Heon (Division of Electronics, Information & Communication Eng., SunMoon Univ.)
  • 최용성 (동신대학교 전기공학과) ;
  • 이우기 (동신대학교 전기공학과) ;
  • ;
  • 이경섭 (동신대학교 전기공학과) ;
  • 이상헌 (선문대학교 전자정보통신광학부)
  • Published : 2006.05.19
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Abstract

In whole world consciousness of environment maintenance have increased very quickly for the end of the 20th century. To use and disuse toxic substances have been controled at the field of industry. Also the field of lighting source belong to environmental control. And in the future the control will be strong. In radiational mechanism of fluorescence lamp mechanism is the worst environmental problem. In radiational mechanism of fluorescence lamp mercury is the worst environmental problem root. In the mercury free lighting source system the Xe gas lamp is one type. And the Ne:Xe mixing gas lamp improvements firing voltage of Xe gas lamp. Purpose and subject of this study are understand, efficiency, ideal of Ne:Xe plasma which mercury free lamp. Before ICP was designed, basic parameters of plasma, which are electron temperature and electron density, were measured and calculated by Langmuir probe data. Property of electron temperature and electron density were confirmed by changing ratio of Ne:Xe.

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