• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2003년도 춘계학술대회 논문집
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• pp.288-291
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement

• 전자공학회논문지C
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• 제35C권5호
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• pp.33-40
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• 1998

In this paper, a design of current-mode continuous-time filters for low voltage and low frequency applications using complementary bipolar current mirrors is presented. The proposed current-mode filters consist of simple bipolar current mirrors and capacitors and are quite suitable for monolithic integration. Since the design method of the proposed current-mode filters are based on the integrator type of realization, it can be used for a wide range of applications. Since the input impedance of simple bipolar current mirror is small, in this paper, negative feedback amplifier is used to realize is designed by cascade method. The cutoff frequency of the designed filter can be easily tunable by the DC controlling current from 60kHz to 120kHz. The characteristics of the designed current-mode filters are simulated and examined by SPICE using standard bipolar transistor parameters.

• Current Optics and Photonics
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• 제1권6호
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• pp.618-625
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• 2017

In the present research, a new bending system using a segmented vacuum chuck for Stressed Mirror Polishing (SMP) is developed. SMP is a special fabrication method for thin aspheric mirrors, where simple flat or spherical fabrication is applied while a mirror blank is deflected. Since a mirror blank is usually glued to a bending fixture in the conventional SMP process, there are drawbacks such as long curing time, inconvenience of mirror replacement, risk of mirror breakage, and stress concentration near the glued area. To resolve the drawbacks, a new bending system is designed to effectively hold a mirror blank by vacuum. For the developed bending system, the optimal bending load to achieve the designated mirror deflection is found by finite element analysis and an optimization algorithm. With the measurement results of the deflected mirror surfaces with the optimal bending loads, the feasibility of the developed bending system is investigated. As a result, it is shown that the bending system is appropriate for the SMP process.

• 한국정밀공학회지
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• 제20권10호
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• pp.112-119
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• 2003

This paper presents an extended Twyman-Green interferometry that enables simultaneous and real-time measurement of 5-DOF motion errors of the translational moving stage. This method uses a null balancing technique in which two plane mirrors are used as target mirrors to generate an interferometric fringe utilizing the optical principles of Twyman-Green interferometry. Fringe is detected by 2D photodiode array for high-speed measurement. Errors are then independently suppressed by activation of piezoelectric actuators through real-time feedback control while the machine axis is moving. Experimental results demonstrate that a machine axis can be controlled with motion errors about 10 nm in linear displacement, 0.15 arcsec in angular displacement.

• 천문학회보
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• 제42권1호
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• pp.57.3-58
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• 2017

Single Point Diamond Turning (SPDT) is a cost-effective technique to fabricate metallic mirrors. In particular, the servo-assisted diamond turning option is highly useful for the fabrication of freeform surfaces. However, the SPDT process leaves periodic tool marks on machined mirror surfaces, leading to undesirable diffraction effect, as well as the deviation of input beam. In order to solve this problem, we propose new SPDT machining conditions to minimize tool marks. We will also show the results from optical measurement and Power Spectral Density (PSD) analysis to evaluate the expectable performance for applications in wide field infrared telescopes.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1950-1953
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• 1996

A $1\;{\times}\;4$ micro mirror array is designed and fabricated. In contrast to other micro mirrors which utilize torsional flexure hinges or cantilevers for restoring torque and supporting purpose, we have placed a substrate hinge structure under each mirror. Each micro mirror consists of address electrode, substrate hinge consisting of pin and staple, supporter post, and mirror plate. Electrical connection between mirror plate and ground electrode is established by substrate hinge. Mirror undergoes a rotational motion due to electrostatic force when voltage difference is applied between address electrode and mirror plate. Micro mirrors with two different types of staple shape and two different pin sizes are designed and fabricated. Each mirror is designed to have ${\pm}\;10^{\circ}$ of deflection angle and have $100\;{\times}\;110\;{\mu}m^2$ of size.

• 제어로봇시스템학회논문지
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• 제4권1호
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• pp.88-99
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• 1998

In assembly, misalignment must be detected and compensated for during the mating period, regardless of the complexity of the cross-sectional shape. To this end, we propose a novel omnidirectional image sensing system for assembling parts with complicated shapes(OISSA) and its feasibility for detecting the misalignment between mating parts is shown by a series of simulations. This system encompasses a camera with an optical unit attached to the front of the camera. The optical unit consists of a pair of plane mirrors and a pair of conic mirrors. Utilizing the proposed sensing system, a 2$\pi$ coaxial image of the misalignment along the mating boundary interface between mating parts can be immediately obtained without experiencing self-occlusion.

• Journal of Astronomy and Space Sciences
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• 제32권3호
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• pp.269-279
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• 2015

Future space missions will have larger telescopes in order to look deeper into space while improvising on spatial resolution. The primary mirrors for these telescopes will be so large that using a monolithic mirror will be nearly impossible because of the difficulties associated with its fabrication, transportation, and installation on a launch vehicle. The feasibility of launching these huge mirrors is limited because of their small launch fairing diameter. The aerodynamic shape of the fairing requires a small diameter, but the height of the launch vehicle, which is available for designers to utilize, is larger than the fairing diameter. This paper presents the development of an axial deployment mechanism based on the screw jack principle. The mechanism was designed and developed, and a prototype was constructed in order to demonstrate a lab model.

• 한국정밀공학회지
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• 제16권8호
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• pp.113-121
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• 1999

It is necessary to calibrate measurement systems to enhance its measurement accuracy. The visual sensing system that is presented in our previous work has to be calibrated, too. It is a multiple mirror system for three-dimensional measurement, which is composed of a camera and a series of mirrors. It is important to calibrate the positions and orientations of the mirrors relative to the camera because they have direct influence on the relationship between the image plane and the task space. This paper presents the calibration method for the visual sensing system. To confirm the measurement performance of the implemented system. its measurement accuracy in measuring the locations in three-dimensional space is investigated. A series of experiments for measuring the locations of the circle-shaped marks are performed. Experimental results show that the sensing system can be effectively used for three-dimensional measurement.

• 전자공학회논문지D
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• 제35D권3호
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• pp.70-81
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• 1998

Fiber-Fabry-Perot (FFP) tunable filters, the essential component of WDM transmission, were designed, fabricated and characterized. Multi-layered thin film mirrors that consists of an optical collimater's corss section as a substrate and TiO$_{2}$SiO$_{2}$ alternating multi-layered films as a filter wer designed by means of the transfer matrix method. Fabricated mirrors showed the high reflectivity over around 98% as expected. After fabricating the tuneable filters using PZT, we measured FSR, FWHM, finesse , crosstalk and insertion loss, confirming that the built devices satisfied the optical filter's specifications required in the SEDM transmission systems.