• 센서학회지
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• 제21권3호
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• pp.235-239
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• 2012

This paper presents frequency response compensation technique, and a self-oscillation circuit for capacitive microresonator with the compensation technique using programmable capacitor array, to compensate for the frequency response distorted by parasitic capacitances, and to obtain stable oscillation condition. The parasitic capacitances between the actuation input port and capacitive output port distort the frequency response of the microresonator. The distorted non-ideal frequency response can be compensated using two programmable capacitor arrays, which are connected between anti-phased actuation input port and capacitive output port. The simulation model includes the whole microresonator system, which consists of mechanical structure, transimpedance amplifier with automatic gain control, actuation driver and compensation circuit. The compensation operation and oscillation output of the system is verified with the simulation results.

• Structural Engineering and Mechanics
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• 제42권5호
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• pp.677-699
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• 2012

This article studies the secondary resonances of a clamped-clamped microresonator under combined electrostatic and piezoelectric actuations. The electrostatic actuation is induced by applying the AC-DC voltage between the microbeam and the electrode plate that lies at the opposite side of the microbeam. The piezoelectric actuation is induced by applying the DC voltage between upper and lower sides of piezoelectric layer. It is assumed that the neutral axis of bending is stretched when the microbeam is deflected. The drift effect of piezoelectric layer (the phenomenon where there is a slow increase of the free strain after the application of a DC field) is neglected. The equations of motion are solved by using the multiple scale perturbation method. The system possesses a subharmonic resonance of order one-half and a superharmonic resonance of order two. It is shown that using the DC piezoelectric actuation, the sensitivity of AC-DC electrostatically actuated microresonator under subharmonic and superharmonic resonances may be tuned. In addition, it is shown that the tuning domain of the microbeam under combined electrostatic and piezoelectric actuations at subharmonic and superharmonic conditions is larger than the tuning domain of microbeam under only the electrostatic actuation.

• 대한기계학회논문집A
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• 제27권8호
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• pp.1259-1265
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• 2003

We present a new post-fabrication frequency tuning method for laterally driven electrostatic microresonators using a DC-biased electrostatic comb array of linearly varied finger-length. The electrostatic tuning force and the equivalent stiffness, adjusted by the DC-biased tuning-comb array, have been formulated as functions of geometry and DC tuning voltage. A set of frequency-turnable microresonators has been designed and fabricated by 4-mask surface-micromachining process. The resonant frequency of the microfabricated microresonator has been measured for a varying tuning voltage at the reduced pressure of 1 torr. The maximum 3.3% reduction of the resonant frequency is achieved at the tuning voltage increase of 20V.

• ETRI Journal
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• 제31권5호
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• pp.593-597
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• 2009

In this paper, we present a spatial perturbation method to control the optical patterns in semiconductor microresonators in the far-field configuration. We propose a fast all-optical switch which operates at a low light level. The switching beam controls the behavior of output beams with strong intensities. The method has been applied successfully to different optical patterns such as rolls, squares, and hexagons.

• Smart Structures and Systems
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• 제16권5호
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• pp.891-918
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• 2015

In many of microdevices a part of a microbeam is covered by a piezoelectric layer. Depend on the application a DC or AC voltage is applied between upper and lower side of the piezoelectric layer. A common method in many of previous works for evaluating the response of these structures is discretizing by Galerkin method. In these works often single mode shape of a uniform microbeam i.e. the microbeam without piezoelectric layer has been used as comparison function, and so the convergence of the solution has not been verified. In this paper the Galerkin method is used for discretization, and a comprehensive analysis on the convergence of solution of equation that is discretized using this comparison function is studied for both clamped-clamped and clamped-free microbeams. The static and dynamic solution resulted from Galerkin method is compared to the modal expansion solution. In addition the static solution is compared to an exact solution. It is denoted that the required numbers of uniform microbeam mode shapes for convergence of static solution due to DC voltage depends on the position and thickness of deposited piezoelectric layer. It is shown that when the clamped-clamped microbeam is coated symmetrically by piezoelectric layer, then the convergence for static solution may be obtained using only first mode. This result is valid for clamped-free case when it is covered by piezoelectric layer from left clamped side to the right. It is shown that when voltage is AC then the number of required uniform microbeam shape mode for convergence is much more than the number of required mode in modal expansion due to the dynamic effect of piezoelectric layer. This difference increases by increasing the piezoelectric thickness, the closeness of the excitation frequency to natural frequency and decreasing the damping coefficient. This condition is often indefeasible in microresonator system. It is concluded that discreitizing the equation of motion using one mode shape of uniform microbeam as comparison function in many of previous works causes considerable errors.

• 공업화학
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• 제33권1호
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• pp.11-16
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• 2022

금속유기골격체(metal-organic frameworks, MOFs)는 나노사이즈의 기공을 가진 다공성 물질로, 금속이온과 유기리간드의 종류에 따라 기체흡착도 및 기공크기의 조절이 가능하다. 이러한 장점을 이용하여, 기체 포집 및 분리, 그리고 기체센서분야에서 금속유기골격체에 대한 연구가 많이 이루어지고 있다. 신속하고, 정량적인 기체 흡탈착 분석을 위해서는, 센서 표면에 균일한 필름 형태의 다양한 MOF 구조체를 형성해야 한다. 본 총설논문에서는 양극산화알루미늄, 산화아연 나노막대, 구리 박막으로부터 직접합성법을 이용하여 각각 MIL-53 (Al), ZIF-8, Cu-BDC와 같은 MOF를 마이크로진동자 센서 표면에 균일하게 합성하는 방법에 대해 정리하였다. 또한, 대표적인 마이크로진동자인 수정진동자미세저울과 마이크로캔틸레버의 작동원리와 금속유기골격체에 기체흡착 시 변하는 신호해석에 대한 내용을 다룬다. 이를 통해, 마이크로진동자 기반 금속유기골격체의 기체 흡탈착 분석에 대한 이해를 높이고자 한다.