• The Journal of the Acoustical Society of Korea
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• v.22 no.7
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• pp.585-591
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• 2003

In this paper, fiber optic sensor using Fabry-Perot interferometer which had benefit of minimize and light-weight was used. The sensor head has 1cm in length, total length of fiber is 9.5 chi and the sensor supported at both ends, simply. To analyze the acoustic characteristic non-directional speaker is used as a sound source. Acoustic applied in lateral direction and detected two signals were compared each other. Below 1㎑ fiber optic sensor has more sensitive than microphone, but in 2㎑ fiber optic sensor has less sensitive than microphone. This characteristic varies to the supporting system of fiber optic sensor. It was confirmed that the Fabry-Perot interferometric sensor detected acoustic signal, effectively. This kind of sensor can be applied to the structural health monitoring field of intellectual structure.

• Journal of Sensor Science and Technology
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• v.16 no.1
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• pp.62-67
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• 2007

This paper presents a novel MEMS condenser microphone with rigid backplate to enhance acoustic characteristics. The MEMS condenser microphone consists of membrane and backplate chips which are bonded together by gold-tin (Au/Sn) eutectic solder bonding. The membrane chip has 2.5 mm${\times}$2.5 mm, $0.5{\mu}m$ thick low stress silicon nitride membrane, 2 mm${\times}$2 mm Au/Ni/Cr membrane electrode, and $3{\mu}m$ thick Au/Sn layer. The backplate chip has 2 mm${\times}$2 mm, $150{\mu}m$ thick single crystal silicon rigid backplate, 1.8 mm${\times}$1.8 mm backplate electrode, and air gap, which is fabricated by bulk micromachining and silicon deep reactive ion etching. Slots and $50-60{\mu}m$ radius circular acoustic holes to reduce air damping are also formed in the backplate chip. The fabricated microphone sensitivity is $39.8{\mu}V/Pa$ (-88 dB re. 1 V/Pa) at 1 kHz and 28 V polarization voltage. The microphone shows flat frequency response within 1 dB between 20 Hz and 5 kHz.

• The Journal of the Korea Contents Association
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• v.10 no.12
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• pp.27-33
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• 2010

In this study, we conducted the classification experiments with GMM (Gaussian Mixture Model) from combining the extracted features by using microphone, Gyro sensor and Acceleration sensor in 9 different environment types. Existing studies of Context Aware wanted to recognize the Environment situation mainly using the Environment sound data with microphone, but there was limitation of reflecting recognition owing to structural characteristics of Environment sound which are composed of various noises combination. Hence we proposed the additional application methods which added Gyro sensor and Acceleration sensor data in order to reflect recognition agent's movement feature. According to the experimental results, the method combining Acceleration sensor data with the data of existing Environment sound feature improves the recognition performance by more than 5%, when compared with existing methods of getting only Environment sound feature data from the Microphone.

• Journal of Sensor Science and Technology
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• v.23 no.5
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• pp.326-331
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• 2014

In this study, a MEMS microphone that uses $Si_3N_4$ as the vibration membrane was produced for application as an auditory device using a sound visualization technique (sound visualization) for the hearing impaired. Two sheets of 6-inch silicon wafer were each fabricated into a vibration membrane and back plate, after which, wafer bonding was performed. A certain amount of charge was created between the bonded vibration membrane and the back plate electrodes, and a MEMS microphone that functioned through the capacitive method that uses change in such charge was fabricated. In order to evaluate the characteristics of the prepared MEMS microphone, the frequency flatness, frequency response, properties of phase between samples, and directivity according to the direction of sound source were analyzed. The MEMS microphone showed excellent flatness per frequency in the audio frequency (100 Hz-10 kHz) and a high response of at least -42 dB (sound pressure level). Further, a stable differential phase between the samples of within -3 dB was observed between 100 Hz-6 kHz. In particular, excellent omnidirectional properties were demonstrated in the frequency range of 125 Hz-4 kHz.

• Journal of Institute of Control, Robotics and Systems
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• v.13 no.3
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• pp.210-217
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• 2007

The theoretical formulations are derived for calculating optical power change for intensity modulated fiber optical microphone. The optical power change is due to optical paths, misalignment and geometry of optical coupler. Based on the theoretical equations, three different optical couplers are simulated with respect to several angles of optical couplers. In order to evaluate the formulation, a multi-mode to multi-mode coupler which is one of abovementioned optical couplers is designed and characterized by carving out both static experiments and dynamic experiments. Considering experimental results, this paper conclude that the theoretical formulations is very useful for design optical coupler and this kind of fiber optic sensor is adequate to microphone.

• Journal of Sensor Science and Technology
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• v.16 no.3
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• pp.174-178
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• 2007

This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finite-element analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hinge diaphragm. And we fabricated the miniature condenser microphones with area of 1.5 mm${\times}$1.5 mm. From the simulation results, we confirmed that the maximum displacements at the center of flexure hinge diaphragms are several hundred times, compared with flat diaphragms. The sensitivities of fabricated miniature microphones are about $12.87{\mu}V/Pa$ at 1 kHz under a low bias voltage of 1 V, and the frequency response is flat upto 13 kHz.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.1661-1666
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• 2000

Nowadays, the two microphone method is accepted as the standard as specified in ASTM E1050-90 for measuring in-duct acoustic properties. However, research results on using the least square method with multiple measurement points and broadband excitation have been reported for enhancing the frequency response of the two microphone method. In this paper, the effects of varying the relative measurement positions on errors in the estimation of the acoustic quantities is studied for the multiple microphone method. Both of the theoretical and experimental results show that, among every possible sensor positioning configurations, the equidistant positioning of sensors yields the smallest error within the effective measurement frequency range. In addition, it is noted that the measurement accuracy can be increased and the effective frequency range can be widened by increasing the number of equidistant sensors. Measurement examples are shown and the results support the findings.

• The Transactions of the Korean Institute of Electrical Engineers C
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• v.55 no.5
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• pp.263-266
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• 2006

An optical microphone was developed using a dual-core multi-mode fiber block and a membrane type micromirror. The fiber block serves as a compact optical head, and the micromirror as a reflective diaphragm. The micromirror is designed to be suspended through a silicon bar connected t a frame, allowing for displacement induced by acoustic waves. The optical head is implemented by integrating two multi-mode fibers in a single block, and used to transfer light signals between it and the diaphragm. For the assembled microphone, its static characteristics were observed to reveal the operating point defined as the optimum distance between the optical head and the diaphragm. And its dynamic response was tested to exhibit a frequency bandwidth of 3 kHz with the variation of $\sim5dB$.

• Journal of Korea Multimedia Society
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• v.6 no.7
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• pp.1131-1138
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• 2003

Active noise control(ANC) is an approach to noise reduction in which a secondary noise source destructively interferes with the unwanted noise is introduced. Generally, the performance of ANC is determined how well a secondary noise tracks noises. A secondary noise is generated from the cancelling speaker and a error sensor pick up error signal. The transfer function between the cancelling speaker and the error sensor is not flat and distorts secondary noises. Consequently, the performance of ANC is degraded by the transfer function. In this paper, a single sensor ANC which considers the characteristics of the speaker and the error sensor is proposed. To reduce distortion of secondary noises, the transfer function is estimated by adaptive inverse modelling and the primary noises are estimated by Kalman filter. Experimental results show that the proposed single sensor ANC effectively attenuates noises.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2011.04a
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• pp.816-820
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• 2011

A method for increasing the difference of side-lobe level in spherical microphone array is presented. In array signal processing, it is known that narrow interval between sensors can increase the difference between main lobe and side-lobe of array response which eventually increase the source recognition capability. Recent commercial array being used, however, have shown certain limitation in using the number of sensors due to its costs and geometrical size of array. To overcome this problem, we have adapted MEMS sensors into spherical microphone array. To check out the improvement, two different types of spherical microphone array were designed. One array is composed with 32 regular instrument microphones and the other one is 85 MEMS sensors. Simulation and experiments were conducted on a sinusoidal noise source with two arrays. The time history data were analyzed with spherical harmonic decomposition and beamforming technique. 85 MEMS sensors array showed the improved side-lobe level suppression by more than 4 dB above the frequency content of 2 kHz compared to 32-sensor array.