• Proceedings of the Korean Society of Precision Engineering Conference
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• 2000.11a
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• pp.175-178
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• 2000

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aemstatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured. aiming at investigating positioning characteristic of aerostatic stage, especially position error and repeatability, we analyze positioning behavior with other factors such as angular error, temperature. Experimemal results show that the aerostatic stage has a l0nm micro step response. Comparing experimental results and calculated abbe's error, we confirm that mean of position error is owing to angular error. And, also we confirm the temperature is dominant factor of repeatability in ten nm order.

• Journal of Power Electronics
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• v.15 no.5
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• pp.1318-1328
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• 2015

The photovoltaic (PV) power conditioning system for small-scale applications has gained significant interest in the past few decades. However, the standalone mode of operation has been rarely approached. This paper presents a two-stage multi-level micro-inverter topology that considers the different operation modes. A multi-output flyback converter provides both the DC-Link voltage balancing for the multi-level inverter side and maximum power point tracking control in grid connection mode in the PV stage. A modified H-bridge multi-level inverter topology is included for the AC output stage. The multi-level inverter lowers the total harmonic distortion and overall ratings of the power semiconductor switches. The proposed micro-inverter topology can help to decrease the size and cost of the PV system. Transient analysis and controller design of this micro-inverter have been proposed for stand-alone and grid-connected modes. Finally, the system performance was verified using a 120 W hardware prototype.

• Korea-Australia Rheology Journal
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• v.19 no.3
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• pp.171-176
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• 2007

LCD-BLU (Liquid Crystal Display-Back Light Unit) of medium size is usually manufactured by forming numerous dots with $50{\sim}300\;{\mu}m$ in diameter by etching process and V-grove shape with $50\;{\mu}m$ in height by mechanical cutting process. However, the surface of the etched dots is very rough due to the characteristics of the etching process and V-cutting needs rather high cost. Instead of existing optical pattern made by etching and mechanical cutting, 3-dimensional continuous micro-lens of $200\;{\mu}m$ in diameter was applied in the present study. The continuous micro-lens pattern fabricated by modified LIGA with thermal reflow process was tested to this new optical design of LGP. The manufacturing process using LIGA-reflow is made up of three stages as follows: (i) the stage of lithography, (ii) the stage of thermal reflow process and (iii) the stage of electroplating. The continuous micro-lens patterned LGP was fabricated with injection molding and its test results showed the possibility of commercial use in the future.

• Journal of Power Electronics
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• v.16 no.6
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• pp.2284-2293
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• 2016

With the rapid development of clean energy, photovoltaic (PV) generation has been utilized in the harmonic compensation of power systems. This paper presents a novel multi-function PV micro-inverter with three stages (pseudo-two-stage). It can inject active power and compensate harmonic currents in the power grid at the same time. In order to keep the micro-inverter working under the maximum allowable output power, an optimized capacity limitation strategy is presented. Moreover, the harmonic compensation can be adjusted according to the customized requirements of power quality. Additionally, a phase shedding strategy in the DC/DC stage is introduced to improve the efficiency of parallel Boost converters in a wide range. Compared with existing capacity limitation methods, the proposed strategy shows better performance and energy efficiency. Simulations and experiments verify the feasibility of the micro-inverter and the effectiveness of the strategy.

• Transactions of the Korean hydrogen and new energy society
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• v.19 no.3
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• pp.217-225
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• 2008

A new micro reformer system consisted of a micro reformer, a microcombustor and a micro evaporator was studied experimentally and computationally. In order to satisfy the primary requirements for designing the microcombustor integrated with a micro evaporator, i.e. stable burning in a small confinement and maximum heat transfer through a wall, the present microcombustor is simply cylindrical to be easily fabricated but two-staged (expanding downstream) to feasibly control ignition and stable burning. Results show that the aspect ratio and wall thickness of the microcombustor substantially affect ignition and thermal characteristics. For the optimized design conditions, a premixed microflame was easily ignited in the expanded second stage combustor, moved into the smaller first stage combustor, and finally stabilized therein. A micro reformer system integrated with a modified microcombustor based on the optimized design condition was fabricated. For a typical operating condition, the designed micro reformer system produced 22.3 sccm hydrogen (3.61 W in LHV) in an overall efficiency of 12%.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1997.10a
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• pp.1084-1087
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• 1997

In this paper, we developed the micro NCT system for punching the thin plates, which is driven is driven by the standalone type microprocessor. In order to adjust the alignment between the punch and die in-situ punching procedures, the non-contact type laser sensor for measuring the burr and micro-driving system for punching die with using the differential screw are developed. The height of burr in four directions in the punched hole of test specimen are measured, and the measured data are transferred to the personal computer by RS232C serial communication technology. In the personal computer, by using the graphic user interface type monitoring program and data handling procedures which includes the filtering algorithms, the direction and length of movement of the die position is decided and these data are transferred back to the microprocessor. The microprocessor drives the micro positioning stage based on these data. Even if this method is not a perfect solution for the in-situ alignment in micro punching, but this alignment methodology is accomplished in the same stage just after the punching that we hope to solve the alignment problem in the punching system based on this technology.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.465-468
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• 2001

An aerostatic stage has frictionless behavior, so it has a advantage of investigation into positioning characteristics. A one-dimensional aerostatic ceramic stage with ballscrew driven and laser scale feedback system is manufactured, aiming at investigating positioning characteristic of ultra-precision stage. We confirm, this ceramic aerostatic stage has a 10nm micro resolution, and can be reduced mean of position error by compensation of numeric control command. By means of analyzing relationship of position error and change of temperature, we build a on-line compensation algorithm of position error from the measured temperature data. So we can improve repeatability of ultra-precision stage up to 34%($0.095{\mu}$) of the normal condition.

• The Journal of Korea Robotics Society
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• v.12 no.1
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• pp.78-85
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• 2017

This paper presents the development of a 3D printer based piezo-driven vertical micro-positioning stage. The stage consists of two flexure bridge structures which amplify and transfer the horizontal motion of the piezo-element into vertical motion of the end-effector. The stage is fabricated with ABS material using a precision 3D printer. This enables a one-body design eliminating the need for assembly, and significantly increases the freedom in design while shortening fabrication time. The design of the stage was optimized using response surface analysis method. Experimental results are presented which demonstrate 100nm stepping in the vertical out-of-plane direction. The results demonstrate the future possibilities of applying 3D printers and ABS material in fabricating linear driven motion stages.

• Proceedings of the KIEE Conference
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• 1998.07g
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• pp.2515-2517
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• 1998

The micro fresnel lens(MFL) was modeled and fabricated on a XY-stage electrostatically driven by comb actuator. The modeled MFL was approximated as a step shape with 4-phase and 4-zone plate. The focal length and diameter of the MFL is 20mm and 912${\mu}m$, respectively. The XY-stage suspending the MFL is designed to generate a large static displacement up to about 20${\mu}m$. On SOI substrates, we first fabricated MFL using the RIE(reactive Ion etching) technology and then patterned and etched bulk silicon to make XY-stage. After the fabrication of all structures on top side of the SOI substrates. $Si_3N_4$ was deposited for passivation of all structures using PECVD(plasma enhanced chemical vapor deposition). All the MFL systems width comb drive actuator were released by KOH etching from the bottom side of the SOI wafer using double-sided alignment technique. In fabrication of MFL, a dry etching conditions is established in order to improve surface roughness and to control the etched depth.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.3
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• pp.277-283
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• 2014

This paper presents the design, optimization and fabrication of a piezo driven micro-positioning stage constructed using a 3D-printer. 3D printing technology provides many advantageous aspects in comparison to traditional manufacturing techniques allowing more rapid prototyping freedom in design, etc. Micro-positioning stages have traditionally been made using metal materials namely aluminum. This paper investigates the possibility of fabricating stages using ABS material with a 3D printer. CAE simulations show that equivalent motion amplification can be achieved compared to a traditional aluminum fabricated stage while the maximum stress is 30 times less. This leads to the possibility of stages with higher magnification factors and less load on the driving piezo element. Experiment results agree with the simulation results. A micro-position stage was fabricated using a 3D printer with ABS material. The motion amplification is very linear and 50 nm stepping was demonstrated.