• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.05c
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• pp.37-40
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• 2003

As the integrated circuit device shrinks to the smaller dimension, the chemical mechanical polishing (CMP) process was required for the global planarization of inter-metal dielectric (IMD) layer with free-defect. However, as the IMD layer gets thinner, micro-scratches are becoming as major defects. Micro-scratches are generated by agglomerated slurry, solidified and attached slurry in pipe line of slurry supply system. It is well known that the presence of hard and larger size particles in the CMP slurries increases the defect density and surface roughness of the polished wafers. In this paper, we have studied aging effect the of CMP slurry as a function of particle size. We prepared and compared the self-developed silica slurry by adding of abrasives before and after annealing. As our preliminary experiment results, we could be obtained the relatively stable slurry characteristics comparable to original silica slurry in the slurry aging effect.

• The Transactions of The Korean Institute of Electrical Engineers
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• v.67 no.12
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• pp.1633-1640
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• 2018

Epoxy resin is a polar thermosetting polymer that is widely employed in different branches of industry and everyday life, due to their stable physical and chemical properties. Of all the polymer materials currently being used in the electrical insulation industry, epoxy resin is the most widely used kind, chosen as the base polymer material in the present study. Composites were prepared according to the mixing ratio (MS: MA, 1: 9, 3: 7, 5: 5, 7: 3, 9: 1)of mixture for Heterogeneous Minerals(Micro Silica:MS, Micro Alumina:MA) (MS+MA). We have investigated for AC electrical insulation breakdown characteristics and the dielectric properties (permittivity, dielectric loss, and conductivity) with frequency changes. The electrical AC insulation breakdown performance was improved with the increase of the mixing ratio of MS according to heterogeneous mineral material mixture(MS+MA). As Dielectric properties, the dielectric constant and dielectric loss increased with decreasing frequency and decreased with increasing MS content ratio of heterogeneous mineral mixture. Tensile strength and flexural strength according to the mixing ratio (MS + MA) of epoxy / heterogeneous mineral mixture were studied by mechanical properties. The performance of mechanical tensile and flexural strength was significantly improved as the fill contents ratio of MS increased.

• Transactions on Electrical and Electronic Materials
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• v.13 no.5
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• pp.252-255
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• 2012

In order to characterize insulation properties of epoxy/micro-silica/nano-silicate composite (EMNC), long-term and short-term AC treeing tests were carried out undr non-uniform electric field generated between needle-plate electrodes. In a long-term test, a 10 kV (60 Hz) electrical field was applied to the specimen positioned between the electrodes with a distance of 2.7 mm in an insulating oil bath at $30^{\circ}C$, and a typical branch type electrical tree was observed in the neat epoxy resin and breakdown took place at 1,042 min after applying the 10 kVelectrical field. Meanwhile, the spherical tree with the tree length of $237{\mu}m$ was seen in EMNC-65-0.3 at 52,380 min (36.4 day) and then the test was stopped because the tree propagation rate was too low. In the short-term test, an electrial field was applied to a 3.5 mm-thick specimen at an increasing voltage rate of 0.5 kV/s until breakdown in insulating oil bath at $30^{\circ}C$ and $130^{\circ}C$, and the data was estimated by Weibull statistical analysis. The electrical insulation breakdown strength for neat epoxy resin was 1,763 kV/mm at $30^{\circ}C$, while that for EMNC-65-0.3 was 2,604 kV/mm, which was a modified value of 47%. As was expected, the breakdown strength decreased at higher test temperatures.

• Advances in concrete construction
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• v.3 no.4
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• pp.317-331
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• 2015

This paper presents the effect of different micro-silica (MS) contents of 5, 10 and 15 wt.% as partial replacement of cement on mechanical and durability properties of high volume fly ash - recycled aggregate concretes (HVFA-RAC) containing 50% class F fly ash (FA) and 35% recycled coarse aggregate (RCA) as partial replacement of cement and natural coarse aggregate (NCA), respectively. The measured mechanical and durability properties are compressive strength, indirect tensile strength, elastic modulus, drying shrinkage, water sorptivity and chloride permeability. The effects of different curing ages of 7, 28, 56 and 91 days on above properties are also considered in this study. The results show that the addition of MS up to 10% improved the early age (7 days) strength properties of HVFA-RAC, however, at later ages (e.g. 28-91 days) the above mechanical properties are improved for all MS contents. The 5% MS exhibited the best performance among all MS contents for all mechanical properties of HVFA-RAC. In the case of measured durability properties, mix results are obtained, where 10% and 5% MS exhibited the lowest sorptivity and drying shrinkage, respectively at all ages. However, in the case of chloride ion permeability a decreasing trend is observed with increase in MS contents and curing ages. Strong correlations of indirect tensile strength and modulus of elasticity with square root of compressive strength are also observed in HVFA-RAC. Nevertheless, it is established in this study that MS contributes to the sustainability of HVFA-RAC significantly by improving the mechanical and durability properties of concrete containing 50%less cement and 35% less natural coarse aggregates.

• Journal of the Korean GEO-environmental Society
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• v.11 no.1
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• pp.53-59
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• 2010

In seawater deposition condition, the corrosion and chemical attack of grouts are similar to those of concrete structure. Used in domestic MSG (Micro Silica Grouting) mixtured large amounts of silicate materials containing as cement powder is $8,000cm^2/g$ of the specific surface area or more due to the high hydration activity and high-strength, high durability, and features, $C_3A$ content of less than 5% to meet the standards chemical attack of seawater was evaluated as a cement material. Therefore, in this paper, with excellent seawater attack resistant MSG in combination with rapid hardening mineral was used, those of seawater characteristics were evaluated experimentally. Typically, sodium-silicate minerals or rapid hardening cements are used in domestic. About the homogel specimens with combination of MSG and rapid hardening agents for compressive strength, weight and length change characteristics were evaluated experimentally, and so we could present the excellent seawater resistant grouts combination.

• Journal of the Korea Concrete Institute
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• v.27 no.1
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• pp.29-35
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• 2015

Recent studies to develop Very Large Floating Structure(VLFS) has shown that the construction procedure of the structure needs to acquire precast concrete module connection system using prestressing. However, the loads occurring on water are complex combinations of various condition, so the safe and stable performance of the module joints and bonding materials are key to the success of the construction. Therefore, micro-silica mixed aqua-epoxy development was introduced in Part 1 using a bonding material developed in this study. The performance of the micro-silica mixed aqua-epoxy(MSAE) applied joint of concrete module specimens connected by prestressing tendon was evaluated to verify the usability and safety of the material. RC beam, spliced beam connected by prestressing tendon and MSAE, and continuous prestressed concrete beam were tested for their initial cracking and maximum loads as well as cracking procedure and pattern. The results showed that the MSAE can control the stress concentration effect of the shear key and the crack propagation, and the maximum load capacity of MSAE joint specimens are only 5% less than that of continuous RC specimen. The details of the study are discussed in detail in the paper.

• Korean Chemical Engineering Research
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• v.46 no.4
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• pp.722-726
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• 2008

Silica microsphere is a world leading innovative material used in adsorbent packing materials in HPLC technology. The application of microsphere lies in the ability to the surface modification of silica with the special materials such as polymers, metals and bio-active materials. Collagen is a major structural protein of connective tissues and has a good biocompatibility. In this study, we prepared the purified silica porous microsphere, having micro diameters in the range of a pore volume at least 50% by the aggregation procedure of colloidal silica with the polymerization method (PICA). The microspheres were modified by collagen hydrogel to improve the biocompatible properties for biomedical product. The silica/collagen microsphere composite doped with silver nanoparticles was prepared and investigated the capabilities of biomaterial application through the evaluation of the structure characteristics of the microsphere composit.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.8
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• pp.657-663
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• 2012

The spherical mesoporous silica is synthesized and incorporated with CdSe/ZnS quantum dots(QDs) for preparing micro beads to detect toxic and bio-materials with high sensitivity. The spherical silica beads with the brunauer-emmett-telle(BET) average pore size of 15 nm were prepared with a ratio 1, 3, 5-trimethylbenzen, as a swelling agent, to the block-copolymer template surfactant of over 1 and under vigorous mixing condition. The surface of spherical mesoporous silica is modified using octadecylsilane for incorporating QDs. Based on photoluminescence(PL) spectra, the relative brightness of mesoporous silica beads incorporated with 10 nM of QDs is 79,000 times brighter than that of Rodamine 6 G.

• Journal of the Optical Society of Korea
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• v.8 no.1
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• pp.21-28
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• 2004

When femtosecond laser pulses are focused inside the bulk of transparent materials, the intensity in the focal volume becomes high enough to produce permanent structural modifications. This technique has been applied to fabricate three-dimensional photonic structures such as optical memory, waveguides, gratings, and couplers inside a wide variety of transparent materials. In this paper, we review the fabrication of optical elements in glasses with femtosecond laser pulses, including the fabrication of waveguides, couplers, Bragg gratings, zone plates, holographic memory, and micro holes.

• Journal of Adhesion and Interface
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• v.23 no.3
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• pp.94-99
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• 2022

Ternary phased graphene/silica/EVOH nanocomposite coating materials were prepared via sol-gel process and solution blending process. From both SEM observations and XRD analysis, the exfoliated structure and dispersion state of graphene nanosheets and silica particles in the nanocomposites as well as the intercalated and exfoliated structure of the prepared graphene oxide were confirmed. The incorporation of GrO and silica at appropriate content resulted in remarkable improvement in oxygen barrier property of the ternary phased nanocompoiste-coated BOPP films, compared with that of binary(silica/EVOH) phased nanocomposite coating films, however, at excess amount of GrO and silica, very slight variation was observed due to incomplete exfoliation, dispersion of graphene tactoids, and formation of micro cracks in the silica clusters. In addition, the transparency of nanocomposite-coated film was investigated by measuring the light transmittance as a function of GrO contents, suggesting the possibility for the application of food packaging films.