• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2003년도 ICCAS
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• pp.1344-1348
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• 2003

A precision micro-positioning system with a high displacement resolution and wide motion range has been required for industrialized applications in variety fields. This paper discusses the design of a precision micro-rotation stage with flexure hinges. Proposed system is applied to grinding machine for micro parts. Rotational motion is generated with this system. For this systems having a full rotation motion with high precision, a dual servo system with a coarse stage and a fine stage is proposed.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2002년도 추계학술대회 논문집
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• pp.1025-1028
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• 2002

In this paper, a micro-turning lathe is introduced for micro machining of aluminum rod. To give feed motion, stepwise motion[2] actuators are used instead of the conventional inchworm mechanism. These are consisted of two Piezoelectric ceramics; one is for feeding the slider, and the other is for clamping the slider in the guide way of the body. The guide is V-form. The linearity and positional accuracy of the actuators is good enough far high precision motion. Since the system is more compact than the conventional system using three Piezoelectric ceramics, it is applicable for the micro-machine or MEMS unit. To fabricate the lathe, a small spindle unit with ball bearings of diameter of 10 millimeter is built-up on the top the slider. The motion is feed backed with miniaturized linear encoder attached each axis slider. The diamond tool bite is used for cutting tool. The machining is tried to make small diameter rod. The possible diameter that can be machined in this machine is presented as well as chip formation, surface roughness, and machinability.

• 대한인간공학회지
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• 제8권1호
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• pp.41-46
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• 1989

The purpose of this study is to improve robot motion control in teaching and operating the expert system/world coordinate system (TOES/WCS) constructed in the previous study. The major contribution of this study is reduction of the inaccuracy in coordinated reading and the movement time of robots in macro motion control. This study also reduces undesirable time of micro motion control by using an unit control (UC) and a micro unit control (MUC) in micro motion control.

• International Journal of Aeronautical and Space Sciences
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• 제17권4호
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• pp.614-621
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• 2016

Micro-Doppler (MD) shift caused by the micro-motion of a ballistic missile (BM) can be very useful to identify it. In this paper, the MD signatures of three scale-model BMs are investigated using a portable measurement system. The measurement system consists of an X-band 2-by-2 phase comparison mono-pulse radar, and a mechanical device that can impart controlled spinning and coning motions simultaneously to a model to yield the MD signature that replicates the characteristic of each target and the corresponding micro-motion. The coning motion determined the overall period of MD, and the spinning motion increased its amplitude. MD was also dependent on aspect angle. The designed system is portable, and can implement many micro-motions; it will contribute to analysis of MD in various situations.

• 한국공작기계학회:학술대회논문집
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• 한국공작기계학회 2004년도 춘계학술대회 논문집
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• pp.99-104
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• 2004

Micro/meso cutting is getting more important in the fields of precision machining technology. A micro-turning lathe is one of parts to consist the Micro Factory. It accepts stepwise motion actuators that are used for feeding system instead of the conventional mechanism. It is consisted of two Piezoelectric ceramics; one is for feeding the slider, and the other is for clamping the slider in the guide way of the body. The linearity and positional accuracy of the actuators are good enough for high precision motion. The spindle unit is operated with DC motor on the top of the slider. The motion is communicated with miniaturized linear encoder attached on each side of axis. A mono crystal diamond tool is used for cutting tool. This micro-lathe has been made a machining experiment to see the characteristics of micro-machining.

• Structural Engineering and Mechanics
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• 제61권2호
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• pp.193-207
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• 2017

In this study, the vibration of an electrostatically actuated micro cantilever beam is analyzed in which a viscoelastic layer covers a portion of the micro beam length. This proposed model is considered as the main element of mass and pollutant micro sensors. The nonlinear motion equation is extracted by means of Hamilton principle, considering nonlinear shortening effect for Euler-Bernoulli beam. The non-linear effects of electrostatic excitation, geometry and inertia have been taken into account. The viscoelastic model is assumed as Kelvin-Voigt model. The motion equation is discretized by Galerkin approach. The linear free vibration mode shapes of non-uniform micro beam i.e. the linear mode shape of the system by considering the geometric and inertia effects of viscoelastic layer, have been employed as comparison function in the process of the motion equation discretization. The discretized equation of motion is solved by the use of multiple scale method of perturbation theory and the results are compared with the results of numerical Runge-Kutta approach. The frequency response variations for different lengths and thicknesses of the viscoelastic layer have been founded. The results indicate that if a constant volume of viscoelastic layer is to be deposited on the micro beam for mass or gas sensor applications, then a modified configuration may be found by using the analysis of this paper.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2000년도 제15차 학술회의논문집
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• pp.121-121
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• 2000

This paper presents a design of macro-micro system for high-speed mounting of micro-chips. A macro motion device is driven by DC servomotor and ball screw mechanism. To obtain fast response, a micro motion device utilizes a precision elector magnetic actuator In order to reduce peak impact force, We evaluate the design parameters that have an effect on it. And a characteristic of response is simulated using PID controller in velocity and force control.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1998년도 추계학술대회 논문집 학회본부 C
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• pp.898-900
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• 1998

This paper describes the motion characteristics and micro-discharge of the free conducting particles between plain electrodes under alternating voltage. The particles move between both electrodes due to electrostatic force by applied AC voltage. Various types and sizes of free conducting particles were used to study the motion and micro-discharge characteristics. The micro-discharge and breakdown were observed during the particle motion.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 1996년도 Proceedings of the Korea Automatic Control Conference, 11th (KACC); Pohang, Korea; 24-26 Oct. 1996
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• pp.397-400
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• 1996

In this paper, robust motion control of a flexible micro-actuator is presented. The actuator is made of a bimorph piezoelectric high-polymer material (PVDF). No mathematical model system can exactly model a physical system such a flexible micro-actuator. For this reason we must be aware of how modeling errors might adversely affect the performance of a control system for such a model. The H method addresses a wide range of the control problems, combining the frequency and time domain approaches. The design is an optimal one in the sense of minimization of the maximum of the closed-loop transfer function. It includes colored measurement and process noise. It also addresses the issues of robustness due to model uncertainties, and is applicable to the, flexible micro-actuator control problem. Therefore, we adopt the H control problem to the robust motion control of the flexible micro-actuator. Theoretical and experimental results demonstrate the satisfactory performance and the effectiveness of the designed controller. the effectiveness of the designed controller.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1997년도 추계학술대회 논문집
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• pp.539-542
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• 1997

We present a micro-positioning stage that has minimized geometrical error and can drive in the 4-axis. This stage divided into two parts: $Z\theta_x$ $\theta_y$, motion stage and$\theta_z$ motion stage. These stages are constructed in flexure hinges, piezoelectric actuators and displacement scnsors. The dynamic model for each stage is obtained and their FE (finite element) models are made. Using the Lagrange's equation, the motion of equation is found. Through the parametric analysis and FE analysis, sensitiv~ty of the design parameters is executed. Finally, fundamental frequencies, maximum stress, and displacement sensitivity for each stage are obtained. We expect that this micro-positioning stage be a useful micro-alignment device for various applications.