• 제어로봇시스템학회:학술대회논문집
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• 2003.10a
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• pp.1344-1348
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• 2003

A precision micro-positioning system with a high displacement resolution and wide motion range has been required for industrialized applications in variety fields. This paper discusses the design of a precision micro-rotation stage with flexure hinges. Proposed system is applied to grinding machine for micro parts. Rotational motion is generated with this system. For this systems having a full rotation motion with high precision, a dual servo system with a coarse stage and a fine stage is proposed.

• 유체기계공업학회:학술대회논문집
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• 2002.12a
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• pp.477-481
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• 2002

This paper reports on the development of micro power system component under way at Seoul National University. The need of micro power system is explained and components of micro power system are described. The developments of hydrogen-air micro combustor, micro igniter based poly-silicon heater and micro thruster are described. To manufacture 3-D micro structure the process that manufactures high aspect ratio structures has been developed and optimized. Design, fabrication, and experiment processes are introduced and technical challenges in each phase are described.

• The Journal of Korea Robotics Society
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• v.4 no.3
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• pp.225-232
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• 2009

In the high precision robot systems, the most popular tasks may be handling of micro-scale objects on a surface such as a micromanipulation robot system. In handling of micro-scale objects, the stiction effect becomes a fundamental issue since the micro-contact mechanics dominates the micromanipulation robot system. In the paper, a theoretical non-stick condition derived from the micro-contact mechanics is carried out for the propose of micro-scale object manipulation. To verify the non-stick condition, a micro-manipulation robot system equipped with a high precision stage system and a microscope system is developed. Experimental results show that the proposed non-stick condition guarantees successful micro-scale object manipulation.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2005.05a
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• pp.377-382
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• 2005

This paper describes the design of micro machine tools system for mechanical machining of micro/meso scale mechanical parts. The micro machining systems such as $\mu-Late$, $\mu-milling/drilling$ machine and $\mu-grinding$ machine are the basic elements constructing $\mu-factory$ which gains more attention recently because of increasing needs of mico and nano-parts in various industrial and medical area. A miniaturized 3-axis milling machine with VCM stage and air spindle and palm-top size micro-late are designed, and air bearing stage and stepwise linear motion system with PZT are studied for motion system. The micro cutting characteristics are investigated experimentally, and reconfigurable machine structures are also considered.

• The Journal of Korea Robotics Society
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• v.2 no.1
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• pp.64-70
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• 2007

In this paper, a robotic system which consists of a precision manipulator and a micro gripper for a micro system assembly is presented. By the experiment, we proved that the developed the system gives acceptable performance when minute operations. Developed the micro-nano robot is actuated by newly proposed modular revolute and prismatic actuators. As an end-effector of this system, micro gripper is designed and fabricated with MEMS technology and the displacement of jaw is up to 142.8 micro meter. We think that new robot system will be appropriate for micro system assembly tasks and life science application.

• Journal of Korea Technology Innovation Society
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• v.6 no.4
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• pp.429-446
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• 2003

The status of microfactory or microfactory-related research in some advanced countries are investigated. Under the financial support of government, Japan has accomplished the Microfactory Project, the United States has pursued the Micro/Meso mMf project, and European countries have been studying micro assembly systems. In Korea, several universities and some large manufacturers have participated in the development of micro-components or micrcrdevices based on MEMS technology since the late 1990's. Microfactory is a process which achieves an integrated micro-manufacturing system in a production system, which is followed by the steps of micro-technology of machine parts based on micro-system technology. In addition, this process is a new concept of manufacturing system that renovates the existing manufacturing system It is sure that the research of micro- manufacturing technology must lead to nano-technology in the near future, with intensive financial supports of government for this technology.

• Transactions of the Korean Society of Machine Tool Engineers
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• v.16 no.5
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• pp.166-171
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• 2007

In this paper Research development about a micro metal forming manufacturing system has been developed. A micro forming system has been achieved in Japan and it's developed micro press is limited to single forming process. To coincide with the purpose to be more practical, research and development is necessary about the press which the multi forming process is possible. We set the development of the equipment including micro deep drawing, micro punching and micro restriking process to the goal. To achieve this goal, we set the application product to a micro thin foil valve which is used in the micro pump module. The compound die set has been designed and manufactured to make two step process. The material of thin foil valve is SUS-304 and its thickness is 50$\mu$m. We can get a good forming results from micro punching experiments in this paper.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.934-937
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• 2001

It is well-known that the micro fabrication technology of micro parts are the high energy beam or silicon-based micro machining method such as LIGA Process, Laser machining, photolithography and etching technology. But, for fabricating complex 3-D structure it is better to use mechanical machining. This machining method by the mechanical machine tool with nanometer accuracy is getting attention in some field-especially micro optics machining such as grating, holographic lens, micro lens array, fresnel lens, encoder disk etc.. In this study, we survey the micro fabrication by mechanical cutting method and set up the mechanical micro machining system. And we carried out micro cutting experiments for micro parts with v-shape groove.

• Proceedings of the KSME Conference
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• 2004.04a
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• pp.240-245
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• 2004

Tensile properties of hard coating material, TiN, were evaluated using micro-tensile testing system. TiN has been known as a hard coating material commonly used today. Micro-tensile testing system consisted of a micro tensile loading system and a micro-ESPI(Electronic Speckle Pattern Interferometry) system. Micro-tensile loading system had a maximum load capacity of 500mN and a resolution of 4.5 nm in stroke. TiN thin film $1{\mu}m$ thick was deposited on the Si wafer pre-deposited of $Si_3N_4$ film substrate by the closed field unbalanced magnetron sputtering (CFUBMS) process. Three kinds of micro-tensile specimen with the respective width of $50{\mu}m$, $100{\mu}m$ and $500{\mu}m$ were fabricated by MEMS process. The mechanical properties including tensile strength and elastic modulus were determined using the micro-tensile testing system and compared by those obtained by nano-indentation

• Proceedings of the Korean Institute of IIIuminating and Electrical Installation Engineers Conference
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• 2009.10a
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• pp.273-277
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• 2009

This paper presents a basic energy performance data of micro gas turbine, Renewable Energy(BIPV and Solar Collector System, geothermal system) and a hybrid energy system(geothermal system and microturbine) installed in Hospital Building. The efficiency of solar collector and BIPV system was 30%, 10% individually, and lower than micro gas turbines. Micro gas turbines are small gas turbines that bum gaseous and liquid fuels to produce a high-energy exhaust gas and to generate the electrical power. Recently, the size range for micro gas turbines is form 30 to 500kW and power-only generation or in combined heat and power(CHP) systems. Finally, in energy performance aspect, Micro gas turbine system and hybrid energy system were high-efficiency system in hospital building. Hybrid energy system also give us a powerful alternative energy system economically.