Abstract
The status of microfactory or microfactory-related research in some advanced countries are investigated. Under the financial support of government, Japan has accomplished the Microfactory Project, the United States has pursued the Micro/Meso mMf project, and European countries have been studying micro assembly systems. In Korea, several universities and some large manufacturers have participated in the development of micro-components or micrcrdevices based on MEMS technology since the late 1990's. Microfactory is a process which achieves an integrated micro-manufacturing system in a production system, which is followed by the steps of micro-technology of machine parts based on micro-system technology. In addition, this process is a new concept of manufacturing system that renovates the existing manufacturing system It is sure that the research of micro- manufacturing technology must lead to nano-technology in the near future, with intensive financial supports of government for this technology.