• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 1998년도 추계학술대회 논문집
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• pp.101-104
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• 1998

A new planar-type micro gas sensor was designed and fabricated on silicon substrate and the operating characteristics of the sensor were investigated. The thin sensitive film of the sensor was fabricated by spin-coating of the SnO$_2$ sol solution which was synthesized by hydrothermal method. The spin-coating method for preparation of sensing layer was adopted to improve the long-term stability of the fabricated sensing film instead of physical methods such as rf sputtering and thermal evaporation. The fabricated microsensor showed a fairly good sensing performance for CO gas in air at 250$^{\circ}C$ The sensitivity(S=Ra/Rg) was shown to be about 5 to 2000ppm CO with heating power of 50mW.

• 한국반도체및디스플레이장비학회:학술대회논문집
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• 한국반도체및디스플레이장비학회 2006년도 추계학술대회 발표 논문집
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• pp.10-13
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• 2006

This paper describes on the fabrication and characteristics of a 3C-SiC (Silicon Carbide) micro pressure sensor for harsh environment applications. The implemented micro pressure sensor used 3C-SiC thin-films heteroepitaxially grown on SOI (Si-on-insulator) structures. This sensor takes advantages of the good mechanical properties of Si as diaphragms fabricated by D-RIE technology and temperature properties of 3C-SiC piezoresistors. The fabricated pressure sensors were tasted at temperature up to $250^{\circ}C$ and indicated a sensitivity of 0.46 mV/V*bar at room temperature and 0.28 mV/V*bar at $250^{\circ}C$. The fabricated 3C-Sic/SOI pressure sensor presents a high-sensitivity and excel lent temperature stability.

• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2008년도 하계학술대회 논문집 Vol.9
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• pp.387-388
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• 2008

High temperature micro pressure sensors were fabricated by polycrystalline (poly) 3C-SiC piezoresistors formed by oxidized SOI substrates with APCVD. These have been designed by bulk micromachining below $1{\times}1mm^2$ diaphragm and Si membrane $20{\mu}m$ thick. The pressure sensitivity of fabricated pressure sensor was 0.1 mV/Vbar. The non-linearity of sensor was ${\pm}0.44%$ FS and the hysteresis was 0.61% FS.TCS of pressure sensor was -1867 ppm/$^{\circ}C$, its TCR was -792 ppm/$^{\circ}C$, and TCGF to 5 bar was -1042 ppm/$^{\circ}C$ from 25 to $400^{\circ}C$.

• 대한전자공학회:학술대회논문집
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• 대한전자공학회 2002년도 하계종합학술대회 논문집(2)
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• pp.21-24
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• 2002

A sensor array (35mm'! in diaphragm dimension) of 12 sensing elements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an way of sensor elements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated way structure because it has only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.

• 한국항공우주학회지
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• 제44권5호
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• pp.455-462
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• 2016

적외선 검출기와 같은 우주용 영상센서는 작동 유무 및 시간경과에 따라 센서의 응답특성이 변하기 때문에 영상품질이 저하된다. 이러한 영상센서의 비균일 응답특성을 보정하기 위하여 궤도상에서 보정용 흑체시스템을 이용하여 주기적인 보정을 실시 할 수 있도록 해야 한다. 본 논문에서는 저온에서 고온에 이르는 다양한 기준온도에서의 높은 온도균일도 확보 및 흑체의 대표표면온도 추정이 용이하고, 초경량, 저전력, 고정밀도의 흑체 시스템을 구현하기 위해 MEMS(Micro Electro Mechanical Systems)기반의 흑체시스템을 제안하였으며, 열해석을 통해 성능을 입증하였다.

• 센서학회지
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• 제20권3호
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• pp.187-192
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• 2011

Abrasive blaster is similar to sand blaster, and effectively removes hard and brittle materials. Exiting abrasive blaster has applied to rough working such as deburring and rough finishing. As the need for machining of ceramics, semiconductor, electronic devices and LCD are increasing, micro abrasive blaster was developed, and became the inevitable technique to micromachining. This paper describes the performance of the micro blaster in MEMS process of glass and succeed in domestically producing complete micro blaster. Diameter of hole and width of line in this etching is 100 ${\mu}m$ ~ 1000 ${\mu}m$. Experimental results showed good performance in micro channel and hole in glass wafer. Therefore, this micro blaster could be effectively applied to the micro machining of semiconductor, micro PCR chip.

• 제어로봇시스템학회:학술대회논문집
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• 제어로봇시스템학회 2002년도 ICCAS
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• pp.41.5-41
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• 2002

This paper presents a feature extraction algorithm for vision-based micromanipulation. In order to guarantee of the accurate micromanipulation, most of micromanipulation systems use vision sensor. Vision data from an optical microscope or high magnification lens have vast information, however, characteristics of micro image such as emphasized contour, texture, and noise are make it difficult to apply macro image processing algorithms to micro image. Grasping points extraction is very important task in micromanipulation because inaccurate grasping points can cause breakdown of micro gripper or miss of micro objects. To solve those problems and extract grasping points for micromanipulation...

• Smart Structures and Systems
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• 제18권5호
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• pp.1029-1062
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• 2016

In this research, the nonlinear free vibration analysis of boron-nitride micro ribbon (BNMR) on the Pasternak elastic foundation under electrical, mechanical and thermal loadings using modified strain gradient theory (MSGT) is studied. Employing the von $K{\acute{a}}rm{\acute{a}}n$ nonlinear geometry theory, the nonlinear equations of motion for the graphene micro ribbon (GMR) using Euler-Bernoulli beam model with considering attached mass and size effects based on Hamilton's principle is obtained. These equations are converted into the nonlinear ordinary differential equations by elimination of the time variable using Kantorovich time-averaging method. To determine nonlinear frequency of GMR under various boundary conditions, and considering mass effect, differential quadrature element method (DQEM) is used. Based on modified strain MSGT, the results of the current model are compared with the obtained results by classical and modified couple stress theories (CT and MCST). Furthermore, the effect of various parameters such as material length scale parameter, attached mass, temperature change, piezoelectric coefficient, two parameters of elastic foundations on the natural frequencies of BNMR is investigated. The results show that for all boundary conditions, by increasing the mass intensity in a fixed position, the linear and nonlinear natural frequency of the GMR reduces. In addition, with increasing of material length scale parameter, the frequency ratio decreases. This results can be used to design and control nano/micro devices and nano electronics to avoid resonance phenomenon.

• 센서학회지
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• 제14권5호
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• pp.337-342
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• 2005

A silicon-based micro-reactor to amplify small amount of deoxyribonucleic acid (DNA) has been fabricated using micro-electro-mechanical systems (MEMS) technology. Polymerase chain reaction (PCR) of DNA requires a precise and rapid temperature control. A Pt sensor is integrated directly in the chamber for real-time temperature measurement and an infrared lamp is used as external heating source for non-contact and rapid heating. In addition to the real-time temperature sensing, PCR needs a rapid thermocycling for effective PCR. For a fast thermal response, the thermal mass of the reactor chamber is minimized by removal of bulk silicon volume around the reactor using double-side KOH etching. The transparent optical property of silicon in the infrared wavelength range provides an efficient absorption of thermal energy into the reacting sample without being absorbed by silicon reactor chamber. It is confirmed that the fabricated micro-reactor could be heated up in less than 30 sec to the denaturation temperature by the external infrared lamp and cooled down in 30 sec to the annealing temperature by passive cooling.

• 문화기술의 융합
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• 제8권2호
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• pp.355-360
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• 2022

본 연구에서는 마이크로 데이터 센터의 환경 모니터링 시스템(EMS)을 설계하고 개발하는 방법을 나타낸다. 설계하는 환경 모니터링 시스템은 IoT 센서 및 싱글보드 컴퓨터를 이용하여 데이터센터 운영환경을 실시간으로 감지하여 데이터를 해석하고 운영환경을 모니터한다. 먼저, EMS 하드웨어 플랫폼 및 IoT 센싱 패키지 설계 방법에 대하여 나타낸다. 또한 서로 다른 프로토콜을 갖는 IoT 센서에 대한 데이터 수집 SW을 설계하고 원격에서 모니터링이 가능한 EMS 모니터링 SW를 개발한다. 데이터 수집 SW는 센서 수집 모듈과 수집 메니저 모듈로 구성된다. EMS 소프트웨어는 마이크로 서비스 아키텍츠(MSA) 개념을 적용하여 설계하며 각각의 서비스는 독립적인 비즈니스 로직을 포함한다.