• Proceedings of the SAREK Conference
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• 2009.06a
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• pp.404-408
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• 2009

Gas pipelines in bridges, roads and subway construction sections can undergo abrupt stress and vibration changes. To protect human life from any gas leakage accidents induced by the abrupt stress and vibration, the gas pipeline system needs to be continuously monitored. The estimation method of pipeline stress using MEMS wireless tilt sensor has been developed and its validity has been evaluated using a lab test bench.

• Transactions on Electrical and Electronic Materials
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• v.13 no.2
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• pp.106-109
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• 2012

A low power methane gas sensor with microheater was fabricated by silicon bulk micromachining technology. In order to heat up the sensing layer to operating temperature, a platinum (Pt) micro heater was embedded in the gas sensor. The line width and gap of the microheater was 20 ${\mu}m$ and 4.5 ${\mu}m$, respectively. Zinc oxide (ZnO) nanowhisker arrays were grown on a sensor from a ZnO seed layer using a hydrothermal method. A 200 ml aqueous solution of 0.1 mol zinc nitrate hexahydrate, 0.1 mol hexamethylenetetramine, and 0.02 mol polyethylenimine was used for growing ZnO nanowhiskers. Temperature distribution of the sensor was analyzed by infrared thermal camera. The optimum temperature for highest sensitivity was found to be $250^{\circ}C$ although relatively high (64%) sensitivity was obtained even at as low a temperature as $150^{\circ}C$. The power consumption was 72 mW at $250^{\circ}C$, and only 25 mW at $150^{\circ}C$.

• Journal of Sensor Science and Technology
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• v.18 no.5
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• pp.349-352
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• 2009

This paper describes the fabrication and characteristics of micro heaters built on AlN($0.1{\mu}m$)/3C-SiC($1{\mu}m$) suspended membranes by surface micromachining technology. In this work, 3C-SiC and AlN films are used for high temperature environments. Pt thin film was used as micro heaters and temperature sensor materials. The resistance of temperature sensor and the power consumption of micro heaters were measured and calculated. The heater is designed for operating temperature up to about $800^{\circ}C$ and can be operated at about $500^{\circ}C$ with a power of 312 mW. The thermal coefficient of the resistance(TCR) of fabricated Pt resistance of temperature detector(RTD)'s is 3174.64 ppm/$^{\circ}C$. A thermal distribution measured by IR thermovision is uniform on the membrane surface.

• Proceedings of the IEEK Conference
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• 2002.06b
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• pp.21-24
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• 2002

A sensor array (35mm'! in diaphragm dimension) of 12 sensing elements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an way of sensor elements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated way structure because it has only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.

• Proceedings of the Korea Committee for Ocean Resources and Engineering Conference
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• 2000.10a
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• pp.84-89
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• 2000

Thermal simulation of typical stack-type and newly proposed planar-type micro-gas sensors were studied by FEM method. The thermal analyses for the proposed planar structure including temperatur distribution over the sensing layer and power consumption of the heater were carried using finite element method by computer simulation and well compared with those of typical stack-type micro-gas sensor. The thermal properties of the microsensor from thermal simulation were compared with those of a actual device to investigate the acceptability of the computer simulation.

• Journal of information and communication convergence engineering
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• v.9 no.2
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• pp.230-234
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• 2011

It is endeavoring for sea safety and fire[1] at sea prevention solidifying control of standard technology and safety supervision aspect in IMO[2] but sea accident and ship fire are happening continuously. Because using Robot in artistic talent of ship in this treatise, studied that correspond to Risk and manage. Attach fire perception sensor for Robot's Risk confrontation, and because using infrared rays sensor, TOUCH SWITCH, sound perception sensor, gas perception sensor, light perception sensor that is threaded in Robot and is achieved, controlled Robot, and establish Low-High value the speed of sound output use and DC MOTOR and COM SEN of when indicate Risk confrontation to Robot and establish Robot's Risk confrontation administration action.

• Journal of Sensor Science and Technology
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• v.17 no.6
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• pp.406-413
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• 2008

We have been implemented simple statistical pattern recognition methods for harmful gases classification using gas sensors array fabricated by MEMS (Micro Electro Mechanical System) technology. The performance of pattern recognition method as a gas classifier is highly dependent on the choice of pre-processing techniques for sensor and sensors array signals and optimal classification algorithms among the various classification techniques. We carried out pre-processing for each sensor's signal as well as sensors array signals to extract features for each gas. We adapted simple statistical pattern recognition algorithms, which were PCA (Principal Component Analysis) for visualization of patterns clustering and MLR (Multi-Linear Regression) for real-time system implementation, to classify harmful gases. Experimental results of adapted pattern recognition methods with pre-processing techniques have been shown good clustering performance and expected easy implementation for real-time sensing system.

• Journal of ILASS-Korea
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• v.7 no.2
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• pp.1-6
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• 2002

It is necessary to develope a high frequency diode laser sensor system based on the absorption spectroscopy for the measurement of temperature of the spray flame. DFB diode laser operating near $2.0{\mu}m$ was used to scan over selected $H_2O$ transitions near $1.9{\mu}m\;and\;2.2{\mu}m$, respectively. The measurement sensitivity at wide range of sweep frequency was evaluated using multi-pass cell containing $CO_2$ gas. This diode laser absorption sensor with high temporal resolution up to 10kHz was applied to measure the gas temperature in the spray flame region of liquid-gas 2-phase counter flow flame. The successful demonstration of time series temperature measurement in the spray flame gives us motivation of trying to establish non-intrusive temperature measurement method in the practical spray flame.

• Journal of Sensor Science and Technology
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• v.23 no.5
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• pp.342-348
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• 2014

This paper introduced a novel multi-gas sensor detector with simple signal processing algorithm. This device was evaluated by investigating the characteristics of combustible materials using fire-generated smell and smoke. Plural sensors including TGS821, TGS2442, and TGS260X were equipped to detect carbon monoxide, hydrogen gas, and gaseous air contaminants which exist in cigarette smoke, respectively. Signal processing algorithm based on the difference of response times in fire-generated gases was implemented with early and accurately fire detection from multiple gas sensing signals. All fire experiments were performed in a virtual fire chamber. The cigarette, cotton fiber, hair, polyester fiber, nylon fiber, paper, and bread were used as a combustible material. This analyzing software and sensor controlling algorithm were embedded into 8-bit micro-controller. Also the detected multiple gas sensor signals were simultaneously transferred to the personnel computer. The results showed that the air pollution detecting sensor could be used as an efficient sensor for a fire detector which showed high sensitivity in volatile organic compounds. The proposed detecting algorithm may give more information to us compared to the conventional method for determining a threshold value. A fire detecting device with a multi-sensor is likely to be a practical and commercial technology, which can be used for domestic and office environment as well as has a comparatively low cost and high efficiency compared to the conventional device.

• Korean Journal of Metals and Materials
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• v.49 no.4
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• pp.304-312
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• 2011

In this study, MOSFET type micro hydrogen gas sensors with platinum catalytic metal gates were designed, fabricated, and their electrical characteristics were analyzed. The devised MOSFET Hydrogen Sensors, called MHS-1 and -2, were designed with a platinum gate for hydrogen gas adsorption, and an additional sensing part for higher gas sensitivity and with a micro heater for operation temperature control. In the electrical characterization of the fabricated Pt-gate MOSFET (MHS-1), the saturated drain current was 3.07 mA at 3.0 V of gate voltage, which value in calculation was most similar to measurement data. The amount of threshold voltage shift and saturated drain current increase to variation of hydrogen gas concentration were calculated and the hydrogen gas sensing properties were anticipated and analyzed.