• 대한전기학회:학술대회논문집
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• 대한전기학회 2009년도 제40회 하계학술대회
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• pp.1497_1498
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• 2009

This paper presents the simulation of micro-lens arrays based on dry and wet etching technique. Code V (Optical Research Associates Ltd) simulation was performed to extract optimal design parameters of a Micro-Lens Array(MLA). Thickness of UV adhesive, wavelength of laser source, curvature, and shape of lens surface were chosen for the design parameters. The simulation results showed that focal length of a MLA decreased with the increase of UV adhesive thickness. And the focal length depended on shape of lens surface and length of laser source.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3268-3270
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• 1999

This paper presents the fabrication of a micro electromagnetic flowmeter for liquid flow rate measurement. The flowmeter consists of a silicon flow channel with two electrodes and two permanent magnets. The micro flow channel and the detection electrodes are fabricated by the anisotropic etching of two silicon substrates and the metal evaporation process respectively. If conductive fluid passes through a magnet field, electromotive force is generated and detected by two electrodes. When the flow rate is 2.6 ml/sec, the measured output voltage is 7.4 mV.

• 전자공학회논문지B
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• 제31B권9호
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• pp.47-56
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• 1994

In this paper, we demonstrate how to design a redundant robot which is suitable for the multiple task execution without any constraints on the work space. The implementation is possible by the rigid connection of a cacro-robot and a micro-robot. A 5 d.o.f. articulated robor designed for commercial purpose is utilized as a micro-robot which can perform a general task with the appropriate adjustment of its base location. The base of a micro-robot is located at a suitable position by the macro-robot designed and implemented through this research. A task assigned to this redundant robot is performed mainly by the micro-robot. However, when the micro-robot cannot perform the task by itself or when the micro-robot has difficulties in performing the task, the coordination of the macro-robot is requited. To monitor the task execution efficiency of the micro-robot, we used the 'Manipulability Measure' as a cost function. The coordination between the two robots are verified both by the simulation and the experiment.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 G
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• pp.3328-3330
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• 1999

In this paper, the fabrication of a micro actuator with a micro electromagnet and an actuator diaphragm is presented. The micro electromagnet consists of a magnetic core and a micro inductive planar coil. The actuator diaphragm is the p+ silicon diaphragm on both sides of which magnetostrictive materials are deposited by sputtering. The micro electromagnet is fabricated by sputtering, evaporating, etching and electroplating. The magnetic flux density of the micro electromagnet is measured by using the gauss meter. The deflection of the actuator diaphragm is measured by using the laser vibrometer and optic microscope.

• 전자통신동향분석
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• 제37권2호
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• pp.53-61
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• 2022

MicroLEDs have various advantages and application areas and are in the spotlight as next-generation displays. Nevertheless, the commercialization of microLEDs is slow because of high cost as well as difficulties in the transfer, bonding, and bad pixel repairing process. In this study, we review the development trends of transfer, bonding, and defective pixel repair technologies, which are critical for microLED commercialization, focusing on materials that determine these technologies. In addition, we focus on the simultaneous transfer bonding technology developed by the Electronics and Telecommunications Research Institute, which has been attracting enormous research attention recently.

• 반도체디스플레이기술학회지
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• 제3권3호
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• pp.1-4
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• 2004

Fabrication and electrical and mechanical properties of piezoelectric micro bending actuators (PMBA) using sol-gel-multi-coated thick PZT films and MEMS processes were investigated. PMBA could be used for design and fabrication of micro fluidic devices, for example, micro-pumps, micro dispensers, and so on. PMBA were fabricated using 2 um thick PZT films on Pt (350 nm)/$SiO_2$ (500 nm)/Si ($300\mu\textrm{m}$) substrates and MEMS processes. 7 types of PMBA were fabricated with areas of silicon diaphragms, PZT films and top electrodes. When the sizes of silicon diaphragms, PZT films and Pt top electrodes were reduced from 3000$\times$$1389\mu\textrm{m}$, 4000$\times$$1000\mu\textrm{m}$ and 4000$\times$$900\mu\textrm{m}$ down to 14%, 14% and 11 % of them, respectively, the center displacements of PMBA were decreased from 0.68 um to 0.10 um at 5 Hz and 12 Vpp. So, PMBA with large areas showed larger displacements than PMBA with small areas and experimental results were also good agreement with the plate and shell theory.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1995년도 추계학술대회 논문집 학회본부
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• pp.606-608
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• 1995

A thermally actuated micro-relay using a mercury-contact has been designed and fabricated. The mercury actuation was achieved by external nitrogen pressure and the mercury-contact was moved by actuation pressure of 110torr in the 100${\mu}m$ wide microchannel. The Injection pressure of mercury was 300torr in the 60${\mu}m$ wide microchannel of the micro relay structure.

• 한국정보디스플레이학회:학술대회논문집
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• 한국정보디스플레이학회 2000년도 제1회 학술대회 논문집
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• pp.37-38
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• 2000

The ZnS:Tb thin-film electroluminescent devices were grown by atomic layer deposition with utilizing single-layer aluminum oxide and/or multilayered tantalum aluminum oxide, $Ta_xAl_yO$, as upper and lower insulating layers. These devices were investigated in terms of the luminescent and electrical characteristics. From this analysis, the devices using the $Ta_xAl_yO$ instead of $Al_2O_3$ were observed to have a lower threshold voltage for emission due to the higher relative dielectric constant of $Ta_xAl_yO$ insulators than that of the $Al_2O_3$ device. And there was a large amount of dynamic space charge generation in the phosphor of the device with the $Ta_xAl_yO$ insulators seemingly due to electron multiplication such as trap ionization.

• 반도체디스플레이기술학회지
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• 제21권1호
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• pp.95-102
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• 2022

Since the organic light-emitting diodes (OLEDs) have been widely investigated as next-generation displays, it has been successfully commercialized as a flexible and rollable display. However, there is still wide room and demand to improve the device characteristics such as power efficiency and lifetime. To solve this issue, there has been a wide research effort, and among them, the internal and the external light extraction techniques have been attracted in this research field by its fascinating characteristic of material independence. In this study, a micro-nano composite structured external light extraction layer was demonstrated. A reactive ion etching (RIE) process was performed on the surfaces of hexagonally packed hemisphere micro-lens array (MLA) and randomly distributed sphere diffusing films to form micro-nano composite structures. Random nanostructures of different sizes were fabricated by controlling the processing time of the O₂ / CHF₃ plasma. The fabricated device using a micro-nano composite external light extraction layer showed 1.38X improved external quantum efficiency compared to the reference device. The results prove that the external light extraction efficiency is improved by applying the micro-nano composite structure on conventional MLA fabricated through a simple process.

• 센서학회지
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• 제7권1호
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• pp.73-82
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• 1998

실리콘 표면 미세가공에 있어서, 새로 개발된 HF 기상식각 공정은 미소구조체들을 띄우는데 매우 효과적임을 입증하였다. 무수 불화수소와 메탄올을 이용한 기상식각 시스템에 대한 기능 및 특성을 기술하였고, 실리콘 미세구조체룰 띄우기 위한 회생층 산화막들의 선택적 식각특성이 고찰되었다. 구조체층으로는 인이 주입된 다결정실리콘이나 SOI 기판의 단결정실리콘을 사용하였다. 회생층으로는 TEOS 산화막, 열산화막, 저온산화막을 사용하였다. 기존 습식식각과 비교해 볼 때, 공정에 기인된 고착현강이나 잔류물질이 없는 미세구조체를 성공적으로 제작하였다.