Proceedings of the KIEE Conference (대한전기학회:학술대회논문집)

The Korean Institute of Electrical Engineers (대한전기학회)
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Fabrication of a thermally actuated micro-relay

열구동형 마이크로 릴레이 구조체 제작

  • Choi, B.Y. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Park, K.H. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Lee, Y.I. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Lee, J.Y. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Lee, J.H. (Semiconductor Division, Electronics and Telecommunications Research Institute) ;
  • Yoo, H.J. (Semiconductor Division, Electronics and Telecommunications Research Institute)
  • 최부연 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 박경호 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 이용일 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 이재열 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 이종현 (한국전자통신연구소, 반도체연구단 미세구조연구실) ;
  • 유형준 (한국전자통신연구소, 반도체연구단 미세구조연구실)
  • Published : 1995.11.18
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Abstract

A thermally actuated micro-relay using a mercury-contact has been designed and fabricated. The mercury actuation was achieved by external nitrogen pressure and the mercury-contact was moved by actuation pressure of 110torr in the 100${\mu}m$ wide microchannel. The Injection pressure of mercury was 300torr in the 60${\mu}m$ wide microchannel of the micro relay structure.

Keywords