• Proceedings of the KSME Conference
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• 2008.11a
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• pp.1957-1962
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• 2008

As a field of MEMS, micro-heater fabricated by Au is being introduced and developed in recent years. Previous studies about thermal properties of various forms of micro-heater were not sufficient. In this work, numerical and experimental analysis of the heat generation and the temperature distribution of micro-heater packages for 8 different geometric cases were studied. We fabricated a micro-heater package with silicon wafer, on which Cr/Au layer was laminated before 8 geometric forms of micro-heater were patterned. In each cases, temperature distribution was measured with IR thermal camera. According to the experimental results, which show a good agreement with the results analyzed by CFD, it was found that at 0.5W, the temperature of micro-heater chip which contained $20000{\mu}m$-long, serpentine shaped micro-heater was elevated to a relatively high temperature of $78^{\circ}C$ Consequently, we proposed a geometry of micro-heater which has effective thermal characteristics.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1517-1521
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• 2007

On this study, technical aspects were reviewed to drill a series of micro holes (${\phi}$0.10) over 200 within a few micron tolerance in diameter and position on the stainless steel material. Dedicated tools & jigs were designed and manufactured and optimum cutting conditions were found. On this micro hole drilling process, guide drill and step feeding were applied to help chip discharge, prevent drill breakage and finally improve the accuracy of positioning and roundness. The processing results indicated that most holes are distributed within a few micron tolerance in diameter and position intervals.

• 한국가시화정보학회:학술대회논문집
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• 2007.11a
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• pp.114-115
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• 2007

As a carrier of malaria and sneak of blood, mosquitoes are regarded as an unpleasant insect. However, there are novel phenomena that happen inside a mosquito. Among them, we focused on the blood sucking function of a female mosquito. The main objective of this study was to investigate the mosquito's pumping mechanism in order to resolve the problem encountered when we inject or transport biologic fluids into a micro-chip. To analyze the pumping mechanism, we visualized the blood sucking process inside a female mosquito. Flow characteristics of blood flow in a proboscis were investigated experimentally using a micro-PIV velocity field measurement technique. The anatomical variation of head, thorax, abdomen which work as pumps and valves, was visualized using the syncrotron X-ray micro-imaging technique.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.25 no.3
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• pp.224-229
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• 2016

Recently, polymeric micro-fluidic biochips with numerous micro patterns on the surface were fabricated by injection molding for realizing low-cost mass production of devices. To evaluate the effects of process parameters on large-scale micro-structure replication, a $50{\times}50mm^2$ tool insert with surface structures having a patterns of trapezoidal shapes (height: $30{\mu}m$) was employed. During injection molding, PMMA was used; packing phase parameters and mold temperature were investigated. The replicated surface textures were quantitatively characterized by confocal laser microscopy with 10-nm resolution. The degree of replication at low mold temperatures was found to be higher than that at high mold temperature at the beginning of the packing stage. Thereafter, the degree of replication increased to a greater extent at higher mold temperatures; application of higher mold temperatures improved the degree of replication.

• International Journal of Control, Automation, and Systems
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• v.2 no.2
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• pp.135-143
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• 2004

Recently, high throughput screening for microorganisms with desired characteristics from a large heterogeneous population has become possible. Single cell separation has taken on increasing significance in recent years, and several different methods have been proposed so far. In this paper, we introduce several cell manipulation methods aiming at single cell separation and investigation. At first, methods for the separation of microorganisms are classified. Then, we introduce two different approaches, that is, (1) indirect manipulation using laser trapped microtools and (2) thermal gelation.

• Proceedings of the Korean Society of Propulsion Engineers Conference
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• 2004.03a
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• pp.601-604
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• 2004

Precise position and attitude control of pico-satellite requires huge number of impulses of the order of 10$^{-6}$ Ns. MEMS solid rocket array is a promising propulsion system but the higher degree of miniaturization causes unreliable operation mainly due to quenching. In order to breakthrough this situation, a novel design of solid micro-rocket is proposed, which generates tiny impulses repetitively from a single rocket not from array. This unique micro-rocket is based on the utilization of quenching, which causes propellant reaction to sustain only in a small area. A test chip of a micro solid propellant tank and micro heater array is fabricated and ignition test is conducted. Obtained results show the feasibility of this concept and future direction of this quenching-based propulsion is discussed.

• Journal of the Korea Safety Management & Science
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• v.2 no.2
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• pp.117-126
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• 2000

Recently micro deep hole drilling is required in the whole industry. However, micro deep hole drilling has still much difficulty because of the lack of drill rigidity and the interruption of chip. We treated a micro deep hole(diameter 0.35mm, depth 3mm) used in a connector jack pin. Therefore, a surface roughness is very important. In this paper, we studied on the variation of the surface roughness for cutting conditions during micro deep hole drilling of Be-Cu material. Most of all, we tried to drill on CNC for the realization of automatization.

• Proceedings of the KWS Conference
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• 2009.11a
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• pp.74-74
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• 2009

카본나노튜브(CNT) 복합체는 우수한 기계적 성질을 가지고 있어 다양한 분야에서 연구되고 있다. 본 연구에서는 카본나노튜브(CNT)를 간단한 볼밀공정을 사용하여 Sn3.5Ag solder ball과 SAC305 powder 표면에 혼합하고 이를 통해 접합부 특성을 관찰하였다. 볼밀을 실시하기 전 카본나노튜브(CNT)는 초음파을 이용하여 분산을 실시하였다. Sn3.5Ag solder ball의 직경은 450um이고 SAC305 powder의 직경은 약 30um이었으며 이때 사용한 볼밀볼의 직경은 각각 3mm, 1mm이다. 볼밀 회전속도는 약 300rpm이고 6, 12, 18, 24시간동안 볼밀을 실시하였다. 24시간 볼밀 후에도 solder ball과 solder powder의 모양은 크게 변하지 않았다. SEM을 통해 표면을 관찰한 결과 분산된 카본나노튜브(CNT)는 solder ball과 solder powder의 표면에서 관찰되었다. 카본나노튜브(CNT)가 삽입된 solder ball은 BGA coupon 위에 놓고 Reflow를 실시하여 접합하였고 solder powder은 flux를 첨가하여 paste로 제조하여 2012 chip에 대한 접합특성을 관찰하였다. 카본나노튜브(CNT)는 solder ball 내부의 표면근처에서 관찰되었으며 카본나노튜브(CNT)가 혼합된 solder ball은 Aging 실시 후에 IMC 두께가 카본나노튜브(CNT)가 혼합되지 않은 solder ball에 비해 두께가 작고 접합강도는 약 10% 증가하였다. 또한 카본나노튜브(CNT)가 혼합된 solder paste와 카본나노튜브(CNT)가 혼합되지 않은 solder paste를 비교한 결과 인쇄성은 모두 양호하였으며 카본나노튜브(CNT)가 혼합된 paste를 사용한 chip의 전단강도가 높게 나타났다.

• Progress in Superconductivity and Cryogenics
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• v.19 no.4
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• pp.18-21
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• 2017

We report a method for improving heat exchange between cryo-cooled large-power-dissipation devices and liquid cryogen. Micro-machined monolithic heat sinks were fabricated on a high integration density superconducting Josephson device, and studied for their effect on cooling the device. The monolithic heat sink showed a significant enhancement of cooling capability, which markedly improved the device operation under large dc- and microwave power dissipation. The detailed mechanism of the enhancement still needs further modeling and experiments in order to optimize the design of the heat sink.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2010.05a
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• pp.637-638
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• 2010