• Proceedings of the IEEK Conference
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• 2002.06b
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• pp.21-24
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• 2002

A sensor array (35mm'! in diaphragm dimension) of 12 sensing elements with different operating temperatures was optimized with respect to thermal operation. This sensor array with single heater on a glass diaphragm over back-etched silicon bulk realizes a novel concept of a sensor array: an way of sensor elements operated at different temperatures can yield more information than single measurement. The proposed micro sensor array could provide well-integrated way structure because it has only single heater at the center of the diaphragm and used the various sensing properties of two kinds of metal oxide layers with various operating temperatures.

• 제어로봇시스템학회:학술대회논문집
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• 1987.10b
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• pp.87-90
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• 1987

This paper gives the Sonic Range Finder(SRF) Array which detects the unknown obstacles on the mobile robot's path. This SRF Array gives mobile robot's circumstance information wider, processes and transfers them to the locomotion module to construct the modify path. In this system, 8 pairs of the 40 KHz ultrasonic sensors constitute the SRF Array, including a pair of reference sensors to correct the errors, 4051 analog multiplexer and demultiplexer swtch the sensor with time and 8031-on chip micro computer controls processes the data and communication the others.

• JSTS:Journal of Semiconductor Technology and Science
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• v.6 no.4
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• pp.293-298
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• 2006

Thermopiezoelectric method, using poly silicon heater and a piezoelectric sensor, was proposed for writing and reading in a probe based data storage system. Resistively heated tip writes data bits while scanning over a polymer media and piezoelectric sensor reads data bits from the self-generated charges induced by the deflection of the cantilever. 34${\times}$34 array of thermopiezoelectric nitride cantilevers were fabricated by a single step wafer level transfer method. We analyzed the noise level of the charge amplifier and measured the noise signal. With the sensor and the charge amplifier 20mn of deflection could be detected at a frequency of 10KHz. Reading signal was obtained from the cantilever array and the sensitivity was calculated.

• Proceedings of the Optical Society of Korea Conference
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• 1990.02a
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• pp.207-210
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• 1990

The mechanisms of the meltback etching and regrowth processes are studied experimentally. The depth and time of the meltback is poltted with the experimental data and fitted with some functions. The method to reduce the anisotropy and elliminate the gallium is lands are also developed. It is possible to fabricate the AlGaAs micro-lens array by the use of the process and apply it to a new optical devices.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2008.06a
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• pp.573-574
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2011.06a
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• pp.205-206
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• 2011

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2004.10a
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• pp.36-39
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• 2004

Glass molding is an advantageous method to manufacture glass micro optical components. However, it is difficult to make Tungsten Carbide core for glass microlens array. We have developed novel method to fabricate Tungsten Carbide core for micro glass components using pressure forming. Silicon masters were fabricated by micro machining. Tungsten Carbide core was fabricated by pressure forming and sintering. And we made high quality surface of Tungsten Carbide core by using the magnetic-field-assisted polishing process.

• Proceedings of the Korean Society for Technology of Plasticity Conference
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• 2002.05a
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• pp.94-97
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• 2002

Micromolding methods are most suitable for mass production of plastic microlens and lens array with low cost. Among the procedures related with micromolding of microlens array, fabrication of mold insect which contains micro cavity of lens shape is the most important stage. In this study, nickel mold inserts for 45 $\mu\textrm{m}$ and 95 $\mu\textrm{m}$ diameters lens way were fabricated using electroforming process. The mother for metal mold inset was made using reflow method. A micro compression molding with polymer powders was used to test the qualities of the metal mold insets. Micro lens profile and surface roughness was measured by interferometric technique and AFM, respectively. The final molded lens replicated the mother well, and had good surface quality.

• Proceedings of the KIEE Conference
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• 1998.07g
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• pp.2547-2549
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• 1998

Automatic yield-test equipment for micro mirror array using image processing was developed. This computerized test equipment can classify the error states of the micromirrors. The test results are displayed on the monitor as a map which shows the error states and position. It is possible to measure yield and reliability with this test equipment for micromirror array using image processing.

• The Journal of the Korea institute of electronic communication sciences
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• v.8 no.12
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• pp.1875-1882
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• 2013

Micro-array technology contributes numerous achievements such as ordering of gene network and integration of genomic. This technology is well established as means for investigating patterns of gene expression. DNA micro-arrays utilize Affymetric chips where a large quantity of DNA sequences may be synthesized. There are two general type of conventional DNA array spotter: contact and piezoelectric. The contact technology used spotting pin technology to make contact with the glass slide surface. This may caused damage or scratches to the surface matrix where protein will be contaminated and may not bind specifically. Piezoelectric technology available at this present time on the other hand requires the analyzer to print the result that can only be done within the laboratory despite of mass production. Therefore, in this paper, high-throughput technology is developed for providing greater consistency in feature spot without touching the glass slide surface.