• 한국정밀공학회지
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• 제29권12호
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• pp.1279-1284
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• 2012

Micro structures which are widely used at various fields are commonly fabricated by lithograph, etching and laser methods. Recently, with the emergence of micro tools and ultra-precision machine tools, fabrication of the micro structures obtained using end-milling are studied. However, there are some problems due to the diameter of the micro end-mill getting smaller below $100{\mu}m$. The micro run-out resulted from miniaturization of end-mills have influence seriously on accuracy of micro structures. The error of run-out with a tooling jig showed a decrease of about $9.3{\mu}m$. Furthermore, micro structures with width of $30{\mu}m$ could be applied through experiments of slot machining obtained using 30 and $50{\mu}m$ end-mill. Also, narrow angle structures with $30^{\circ}$ angle could be applied through analysis of machining acute angle structures. Based on basic experiments, micro fluidics channels and spiral patterns for air bearing were machined.

• 한국기계가공학회지
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• 제9권3호
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• pp.56-61
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• 2010

Recently, UV pulse laser is widely used in micro machining of the research, development and industry field of IT, NT and BT products because the laser short wavelength provides not only micro drilling, micro cutting and micro grooving which has a very fine line width, but also high absorption coefficient which allows a lot of type of materials to be machined more easily. To analyze the dynamic deformation during a very short processing time, which is nearly about several tens nanoseconds, the commercial Finite Element Analysis (FEA) code, LS-DYNA 3D, was employed for the computitional simulation of the UV laser micro machining behavior for thin copper material in this paper. A finite element model considering high strain rate effect is especially suggested to investigate the micro phenomena which are only dominated by mechanically pressure impact in disregard of thermally heat transfer. From these computational results, some of dynamic deformation behaviors such as dent deformation shapes, strains and stresses distributions were observed and compared with previous experimental works. These will help us to understand micro interaction between UV laser beam and material.

• Structural Engineering and Mechanics
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• 제61권2호
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• pp.193-207
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• 2017

In this study, the vibration of an electrostatically actuated micro cantilever beam is analyzed in which a viscoelastic layer covers a portion of the micro beam length. This proposed model is considered as the main element of mass and pollutant micro sensors. The nonlinear motion equation is extracted by means of Hamilton principle, considering nonlinear shortening effect for Euler-Bernoulli beam. The non-linear effects of electrostatic excitation, geometry and inertia have been taken into account. The viscoelastic model is assumed as Kelvin-Voigt model. The motion equation is discretized by Galerkin approach. The linear free vibration mode shapes of non-uniform micro beam i.e. the linear mode shape of the system by considering the geometric and inertia effects of viscoelastic layer, have been employed as comparison function in the process of the motion equation discretization. The discretized equation of motion is solved by the use of multiple scale method of perturbation theory and the results are compared with the results of numerical Runge-Kutta approach. The frequency response variations for different lengths and thicknesses of the viscoelastic layer have been founded. The results indicate that if a constant volume of viscoelastic layer is to be deposited on the micro beam for mass or gas sensor applications, then a modified configuration may be found by using the analysis of this paper.

• 자원환경지질
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• 제27권5호
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• pp.499-505
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• 1994

기존 미소결함에서의 국소적 응력집중은 새로운 미시적 손상의 원인이 되고, 이러한 미시적 손상은 또한 거시적 손상으로 발달하게 된다. 이들 미시적 손상에서 거시적 손상으로의 바달은 그 암석 및 암반의 변형특성으로 나타난다. 지금까지 응력하에서의 미소크랙의 거동에 대한 연구는 많이 되어왔으나, 실제암석의 파괴전 상태에서 미소크랙거동에 대한 역학적 해석은 아직 미비한 실정이다. 본 연구에서는 새로이 개발한 시험장치에 의한 정밀한 관찰로 손상 발달에 대한 이해를 더하였으며, 수학적 균질화 이론에 의해 수치해석 함으로서 그 역학성을 검토하였다.

• 한국산학기술학회논문지
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• 제5권2호
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• pp.132-136
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• 2004

대기중의 NO₂ 가스 농도를 측정하기 위한 마이크로 가스센서를 MEMS 공정을 이용하여 제작하였다. WO₃와 같은 가스 감응물질을 목표 온도까지 가열하기 위해서 마이크로 핫플레이트를 가스센서에 장착하였다. 마이크로 가스센서의 열전달 현상을 상용 열유동 해석 전용 프로그램인 FLUENT를 이용하여 해석하였다. 해석 결과 실리콘 웨이퍼 기판의 온도가 거의 상온에 가까워 핫플레이트에서 발생한 열이 가스 감응물질을 효과적으로 가열하여서 가스감응물질의 열적 고립상태를 유지하고 있는 것을 알 수 있었다. 마이크로 핫플레이트의 형상을 변경함으로써 가스 감지물질의 온도 균일도를 높일 수 있다.

• 보존과학연구
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• 통권32호
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• pp.89-98
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• 2011

철 부식화합물은 부식인자들과 함께 다양한 결정구조를 가지며 2가지 이상의 부식화합물들이 혼합되어 존재하므로 각각의 특성을 밝혀내기가 매우 어렵다. 본 연구는 표준 철 부식물을 대상으로 Raman Micro-Spectroscopy 분석을 실시하여 표준 Raman Data 확보를 목적으로 수행하였다. 표준 철 부식물에 대한 신뢰성을 향상시키기 위하여 SEM-EDS 분석과 XRD 분석을 추가로 실시하였다. SEM-EDS 분석결과 모두 표준 철 부식물의 구성성분과 일치하였으나 Goethite의 경우 철 이외의 비철금속 성분이 검출되었다. XRD 분석 결과 모두 표준 철 부식물의 구조와 일치 하였으나 Iron sulfate($FeSO_4{\cdot}6H_2O$)의 경우 Rozenite($FeSO_4{\cdot}4H_2O$)로 확인되었다. Raman Micro-Spectroscopy 분석결과 기존에 연구되었던 수산화철, 산화철의 Wavenumber에서 새로운 peak이 발견되었는데 이는 레이저 파장의 변화에 따른 것으로 사료 된다. 염화철과 황산철에서 Wavenumber가 새롭게 확인되어 표준 Raman Data 8건을 확보하였다. Raman Micro-Spectroscopy는 적은양의 시료를 이용하여 물질의 특성과 구조를 비교적 간단하게 분석 할 수 있어 미세한 부분이나 시료의 양이 한정된 문화재에 활용도가 높을 것으로 판단된다.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2008년도 추계학술대회 논문집
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• pp.249-252
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• 2008

Micro V-notching process has been used to manufacturing the safety component in Li-Ion battery. These kinds of safety component in Li-Ion battery plays an important role in the explosion from excessive overheating. Therefore, it is very crucial to estimate accurately the working pressure range of the safety component with micro V-notch. In this study, the relationship with the working internal pressure in Li-Ion battery and fracture phenomenon in micro V-notch was investigated through the numerical analysis. The numerical analysis is especially adopted the finite element method with ductile fracture criteria.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1988-1991
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• 2005

A micro fluid actuator driven by electromagnetic force at MEMS(Micro Electro Mechanical System) level has been designed. The operation of the actuator was simulated in three steps. First, fluid flow analysis has been performed to determine the actuator load. With the load, dynamic behavior of the actuator structure has been analysed. Finally, fluid-structure interaction analysis has been performed to predict the performance of the actuator. To avoid excessive amount of computation, axisymmetric and plane strain 2-D models were used.

• 한국소성가공학회:학술대회논문집
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• 한국소성가공학회 2003년도 춘계학술대회논문집
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• pp.421-426
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• 2003

Micro-suing that used on micro mechanism should be equal to distance between pitch and correct of shape. Therefore, micro spring must make by super-precision working. But, current step of super-precision processing depends on special quality of work piece and is ineffective the aspect of cost and productivity yet. Also, to use as demandable length shearing process perform but even if make precision spring, in the aspect of quality of coil spring make difficult that produce product of good quality. Therefore, purpose of this study presented proposed process that extract the point of processing factor after perform finite element analysis applying existing sheet shearing process to suing shearing process consider cost and productivity after evaluate.

• 한국자동차공학회논문집
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• 제12권3호
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• pp.51-58
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• 2004

Optimization of engine desist and operation parameters using a genetic algorithm was demonstrated for direct injection diesel engine combustion. A micro genetic algorithm and a modified KIVA-3V code were used for the analysis and optimization of the engine combustion. At each generation of the optimization step the micro genetic algorithm generated five groups of parameter sets, and the five cases of KIVA-3V analysis were to be performed either in series or in parallel. The micro genetic algorithm code was also parallelized by using MPI programming, and a multi-CPU parallel supercomputer was used to speed up the optimization process by four times. An example case for a fixed engine speed was performed with six parameters of intake swirl ratio, compression ratio, fuel injection included angle, injector hole number, SOI, and injection duration. A simultaneous optimization technique for the whole range of engine speeds would be suggested for further studies.