• Title/Summary/Keyword: micro 3D sensor

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Micromachined Multiple Gas Sensor for Automotive Ventilation and Air Conditioning Systems (미세기계가공된 자동차 HVAC 시스템용 다중 가스센서)

  • Choi, W.S.;Lee, S.H.;Kim, S.D.;Park, J.S.;Park, H.D.;Min, N.K.
    • Proceedings of the KIEE Conference
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    • 2006.07c
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    • pp.1637-1638
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    • 2006
  • HVAC 시스템은 쾌적하고 깨끗한 운전환경을 만들어 줌으로써 운전자에게 향상된 안락성과 안전성을 제공한다. 이때 센서는 시시각각으로 변화하는 차실 내외의 환경변화에 대한 정보를 검출하여 HVAC 제어 유니트에 제공한다. 현재 HVAC 시스템에 사용되고 있는 후막 가스센서는 소자 크기와 소비전력이 크고, 제작공정이 까다로워 생산성이 낮은 단점이 있다. 이와 같은 문제점을 해결하기 위해서 최근에는 초소형화, 저소비전력, 대량생산에 의한 저가격화가 가능한 MEMS 가스센서의 연구개발이 활발히 진행되고 있다. 본 연구에서는 MEMS 구조체를 이용한 마이크로 가스센서를 설계 및 제작하였고, 감도특성을 고찰하였다. 가스 감지막은 금속산화물 페이스트를 스크린 프린팅 하는 종래의 방법 대신 MEMS 구조체에 적용 가능한 sol-gel 프로세스에 의해 형성하였다. 또 가스 감지전극과 micro-heater를 동일 평면상에 제작, 공정을 간소화하여 저가화를 시도하였다. MEMS 구조체 위에 제작된 Pt 박막 micro-heater의 인가전압에 따른 발열특성을 조사한 결과, 발열온도가 인가전압에 비례하는 이상적인 선형성을 나타내었으며, $300^{\circ}C$의 동작 온도에 도달하기 위해 65mW 이하의 저전력 동작이 가능하였다. 가스 센서의 감도특성 확인 실험은 CO 가스 10ppm, NO 가스 0.3ppm을 기준으로 수행되었으며, CO 및 NO에 대해 Rs(sensitivity, 가스반응저항/초기저항) 값은 각각 0.753 과 2.416로 우수한 성능을 나타내었다.

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Vacuum Packaging and Operating Properties of Micro-Tunneling Sensors

  • Park, H.W.;Lee, D.J.;Son, Y. B.;Park, J.H.;Oh, M. H.;Ju, B. K.
    • Proceedings of the International Microelectronics And Packaging Society Conference
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    • 2000.04a
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    • pp.110-110
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    • 2000
  • Cantilever-shaped lateral field emitters were fabricated and their electrical characteristics were tested. As shown in Fig.1, poly-silicon cantilevers were fabricated by the surface micromachining and they were used to the vacuum magnetic field sensors. The tunneling devices were vacuum sealed with the tubeless packaging method, as shown in Fig.2 and Fig.3. The soda-lime glasses were used for better encapsulation, so the sputtered silicon and the glass layers on the soda-lime glasses were bonded together at 1x10$^{-6}$ Torr. The getter was activated after the vacuum sealing fur the stable emissions. The devices were tested outside of the vacuum chamber. Through vacuum packaging, the tunneling sensors can be utilized. Fig.4 shows that the sensor operates with the switching of the magnetic field. When the magnetic field was applied to the device, the anode currents were varied by the Lorentz force. The difference of anode currents can be varied with the strength of the applied magnetic field.

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Damage Analysis of Singly Oriented Ply Fiber Metal Laminate under Concentrated Loading Conditions by Using Acoustic Emission (음향 방출법을 이용한 집중하중을 받는 일방향 섬유 금속 적층판의 손상 해석)

  • 남현욱;김용환;한경섭
    • Composites Research
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    • v.14 no.5
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    • pp.46-53
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    • 2001
  • In this research, damage behavior of singly oriented ply (SOP) fiber metal laminate (FML) subjected to concentrated load was studied. The static indentation tests were conducted to study fiber orientation effect on damage behavior of FML. During the static indentation tests, acoustic emission technique (AE) was adopted to study damage characteristics of FML. AE signals were obtained by using AE sensor with 150kHz resonance frequency and the signals were compared with indentation curves of FML. The damage process of SOP FML was divided by three parts, i.e., crack initiation, crack propagation, and penetration. The AE characteristics during crack initiation show that the micro crack is initiated at lower ply of the plate, then propagate along the thickness of the plate with creating tiber debonding. The crack grow along the fiber direction with occurring 60∼80dB AE signal. During the penetration, the fiber breakage was observed. As fiber orientation increases, talc fiber breakage occurs more frequently. The AE signal behaviors support these results. Cumulative AE counts could well predict crack initiation and crack propagation and AE amplitude were useful for the prediction of damage failure mode.

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A Study on Apparatus of Smart Wearable for Mine Detection (스마트 웨어러블 지뢰탐지 장치 연구)

  • Kim, Chi-Wook;Koo, Kyong-Wan;Cha, Jae-Sang
    • The Journal of the Institute of Internet, Broadcasting and Communication
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    • v.15 no.2
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    • pp.263-267
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    • 2015
  • current mine detector can't division the section if it is conducted and it needs too much labor force and time. in addition to, if the user don't move the head of sensor in regular speed or move it too fast, it is hard to detect a mine exactly. according to this, to improve the problem using one direction ultrasonic wave sensing signal, that is made up of human body antenna part, main micro processor unit part, smart glasses part, body equipped LCD monitor part, wireless data transmit part, belt type power supply part, black box type camera, Security Communication headset. the user can equip this at head, body, arm, waist and leg in removable type. so it is able to detect the powder in a 360-degree on(under) the ground whether it is metal or nonmetal and it can express the 2D or 3D film about distance, form and material of the mine. so the battle combats can avoid the mine and move fast. also, through the portable battery and twin self power supply system of the power supply part, combat troops can fight without extra recharge and we can monitoring the battle situation of distant place at the command center server on real-time. and then, it makes able to sharing the information of battle among battle combats one on one. as a result, the purpose of this study is researching a smart wearable mine detector which can establish a smart battle system as if the commander is in the site of the battle.

Design of a Compact GPS/MEMS IMU Integrated Navigation Receiver Module for High Dynamic Environment (고기동 환경에 적용 가능한 소형 GPS/MEMS IMU 통합항법 수신모듈 설계)

  • Jeong, Koo-yong;Park, Dae-young;Kim, Seong-min;Lee, Jong-hyuk
    • Journal of Advanced Navigation Technology
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    • v.25 no.1
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    • pp.68-77
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    • 2021
  • In this paper, a GPS/MEMS IMU integrated navigation receiver module capable of operating in a high dynamic environment is designed and fabricated, and the results is confirmed. The designed module is composed of RF receiver unit, inertial measurement unit, signal processing unit, correlator, and navigation S/W. The RF receiver performs the functions of low noise amplification, frequency conversion, filtering, and automatic gain control. The inertial measurement unit collects measurement data from a MEMS class IMU applied with a 3-axis gyroscope, accelerometer, and geomagnetic sensor. In addition, it provides an interface to transmit to the navigation S/W. The signal processing unit and the correlator is implemented with FPGA logic to perform filtering and corrrelation value calculation. Navigation S/W is implemented using the internal CPU of the FPGA. The size of the manufactured module is 95.0×85.0×.12.5mm, the weight is 110g, and the navigation accuracy performance within the specification is confirmed in an environment of 1200m/s and acceleration of 10g.

The relationship between dental implant stability and trabecular bone structure using cone-beam computed tomography

  • Kang, Se-Ryong;Bok, Sung-Chul;Choi, Soon-Chul;Lee, Sam-Sun;Heo, Min-Suk;Huh, Kyung-Hoe;Kim, Tae-Il;Yi, Won-Jin
    • Journal of Periodontal and Implant Science
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    • v.46 no.2
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    • pp.116-127
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    • 2016
  • Purpose: The objective of this study was to investigate the relationships between primary implant stability as measured by impact response frequency and the structural parameters of trabecular bone using cone-beam computed tomography(CBCT), excluding the effect of cortical bone thickness. Methods: We measured the impact response of a dental implant placed into swine bone specimens composed of only trabecular bone without the cortical bone layer using an inductive sensor. The peak frequency of the impact response spectrum was determined as an implant stability criterion (SPF). The 3D microstructural parameters were calculated from CT images of the bone specimens obtained using both micro-CT and CBCT. Results: SPF had significant positive correlations with trabecular bone structural parameters (BV/TV, BV, BS, BSD, Tb.Th, Tb.N, FD, and BS/BV) (P<0.01) while SPF demonstrated significant negative correlations with other microstructural parameters (Tb.Sp, Tb.Pf, and SMI) using micro-CT and CBCT (P<0.01). Conclusions: There was an increase in implant stability prediction by combining BV/TV and SMI in the stepwise forward regression analysis. Bone with high volume density and low surface density shows high implant stability. Well-connected thick bone with small marrow spaces also shows high implant stability. The combination of bone density and architectural parameters measured using CBCT can predict the implant stability more accurately than the density alone in clinical diagnoses.

Fabrication of Vertically Oriented ZnO Micro-crystals array embedded in Polymeric matrix for Flexible Device (수열합성을 이용한 ZnO 마이크로 구조의 성장 및 전사)

  • Yang, Dong Won;Lee, Won Woo;Park, Won IL
    • Journal of the Microelectronics and Packaging Society
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    • v.24 no.4
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    • pp.31-37
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    • 2017
  • Recently, there has been substantial interest in flexible and wearable devices whose properties and performances are close to conventional devices on hard substrates. Despite the advancement on flexible devices with organic semiconductors or carbon nanotube films, their performances are limited by the carrier scattering at the molecular to molecular or nanotube-to-nanotube junctions. Here in this study, we demonstrate on the vertical semiconductor crystal array embedded in flexible polymer matrix. Such structures can relieve the strain effectively, thereby accommodating large flexural deformation. To achieve such structure, we first established a low-temperature solution-phase synthesis of single crystalline 3D architectures consisting of epitaxially grown ZnO constituent crystals by position and growth direction controlled growth strategy. The ZnO vertical crystal array was integrated into a piece of polydimethylsiloxane (PDMS) substrate, which was then mechanically detached from the hard substrate to achieve the freestanding ZnO-polymer composite. In addition, the characteristics of transferred ZnO were confirmed by additional structural and photoluminescent measurements. The ZnO vertical crystal array embedded in PDMS was further employed as pressure sensor that exhibited an active response to the external pressure, by piezoelectric effect of ZnO crystal.

Design of UHF Band Microstrip Antenna for Recovering Resonant Frequency and Return Loss Automatically (UHF 대역 공진 주파수 및 반사 손실 오토튜닝 마이크로스트립 안테나 설계)

  • Kim, Young-Ro;Kim, Yong-Hyu;Hur, Myung-Joon;Woo, Jong-Myung
    • The Journal of Korean Institute of Electromagnetic Engineering and Science
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    • v.24 no.3
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    • pp.219-232
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    • 2013
  • This paper presents a microstrip antenna which recovers its resonant frequency and impedance shifted automatically by the approach of other objects such as hands. This can be used for telemetry sensor applications in the ultrahigh frequency(UHF) industrial, scientific, and medical(ISM) band. It is the key element that an frequency-reconfigurable antenna could be electrically controlled. This antenna is miniaturized by loading the folded plates at both radiating edges, and varactor diodes are installed between the radiating edges and the ground plane to control the resonant frequency by adjusting the DC bias asymmetrically. Using this voltage-controlled antenna and the micro controller peripheral circuits of reading the returned level, the antenna is designed and fabricated which recovers its resonant frequency and impedance automatically. Designed frequency auto recovering antenna is conformed to be recovered within a few seconds when the resonant frequency and impedance are shifted by the approach of other objects such as hand, metal plate, dielectric and so on.

Development of Conformal Radiotherapy with Respiratory Gate Device (호흡주기에 따른 방사선입체조형치료법의 개발)

  • Chu Sung Sil;Cho Kwang Hwan;Lee Chang Geol;Suh Chang Ok
    • Radiation Oncology Journal
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    • v.20 no.1
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    • pp.41-52
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    • 2002
  • Purpose : 3D conformal radiotherapy, the optimum dose delivered to the tumor and provided the risk of normal tissue unless marginal miss, was restricted by organ motion. For tumors in the thorax and abdomen, the planning target volume (PTV) is decided including the margin for movement of tumor volumes during treatment due to patients breathing. We designed the respiratory gating radiotherapy device (RGRD) for using during CT simulation, dose planning and beam delivery at identical breathing period conditions. Using RGRD, reducing the treatment margin for organ (thorax or abdomen) motion due to breathing and improve dose distribution for 3D conformal radiotherapy. Materials and Methods : The internal organ motion data for lung cancer patients were obtained by examining the diaphragm in the supine position to find the position dependency. We made a respiratory gating radiotherapy device (RGRD) that is composed of a strip band, drug sensor, micro switch, and a connected on-off switch in a LINAC control box. During same breathing period by RGRD, spiral CT scan, virtual simulation, and 3D dose planing for lung cancer patients were peformed, without an extended PTV margin for free breathing, and then the dose was delivered at the same positions. We calculated effective volumes and normal tissue complication probabilities (NTCP) using dose volume histograms for normal lung, and analyzed changes in doses associated with selected NTCP levels and tumor control probabilities (TCP) at these new dose levels. The effects of 3D conformal radiotherapy by RGRD were evaluated with DVH (Dose Volume Histogram), TCP, NTCP and dose statistics. Results : The average movement of a diaphragm was 1.5 cm in the supine position when patients breathed freely. Depending on the location of the tumor, the magnitude of the PTV margin needs to be extended from 1 cm to 3 cm, which can greatly increase normal tissue irradiation, and hence, results in increase of the normal tissue complications probabiliy. Simple and precise RGRD is very easy to setup on patients and is sensitive to length variation (+2 mm), it also delivers on-off information to patients and the LINAC machine. We evaluated the treatment plans of patients who had received conformal partial organ lung irradiation for the treatment of thorax malignancies. Using RGRD, the PTV margin by free breathing can be reduced about 2 cm for moving organs by breathing. TCP values are almost the same values $(4\~5\%\;increased)$ for lung cancer regardless of increasing the PTV margin to 2.0 cm but NTCP values are rapidly increased $(50\~70\%\;increased)$ for upon extending PTV margins by 2.0 cm. Conclusion : Internal organ motion due to breathing can be reduced effectively using our simple RGRD. This method can be used in clinical treatments to reduce organ motion induced margin, thereby reducing normal tissue irradiation. Using treatment planning software, the dose to normal tissues was analyzed by comparing dose statistics with and without RGRD. Potential benefits of radiotherapy derived from reduction or elimination of planning target volume (PTV) margins associated with patient breathing through the evaluation of the lung cancer patients treated with 3D conformal radiotherapy.

Development of New Device for the Rapid Measurement of the freshness of Wet Fish by Using Micro Computer (마이크로 컴퓨터를 이용한 어육의 신선도 측정장치의 개발)

  • CHO Young-Je;LEE Nam-Geoul;KIM Sang-Bong;CHOI Young-Joon;LEE Keun-Woo;KIM Geon-Bae
    • Korean Journal of Fisheries and Aquatic Sciences
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    • v.28 no.3
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    • pp.253-262
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    • 1995
  • To develop a device for measuring fish freshness which could be move accurate and reliable than used freshness measuring systems. A new device based on digital circuit was designed using a microcomputer. The device was composed of a sensor part, 8096 microprocessor and a segment display. The effectiveness of device has been evaluated by the coefficient of correlation among the measured freshness stores such as electrical Q-value, K-value and amount of volatile basic nitrogen (VBN) of plaice, Paralichthys Olivaceus, during storage at $-3^{\circ}C,\;0^{\circ}C,\;5^{\circ}C,\;10^{\circ}C,\;and\;25^{\circ}C$. Q-values measured by a new device were more closely correlated with K-value (r=-0.978-\;-0.962,\;p<0.05) and VBN (r=-0.888-\;-0.988,\;p<0.05) in case of plaice meat. If more data would achieve using various fishes, this new designed device could be a valuable kit in fish market by its compact portability.

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