• Journal of Institute of Control, Robotics and Systems
• /
• v.19 no.3
• /
• pp.219-226
• /
• 2013

A distortion correction technique is presented to enhance the 3D scanning performance of a micro-size camera-projector system. Recently, several types of micro-size digital projectors and cameras are available. However, there have been few effort to develop a micro-size 3D scanning system. We develop a micro-sized 3D scanning system which is based on the structured light technique. Three images of phase-shifted sinusoidal patterns are projected, captured, and analyzed by the system to reconstruct 3D shapes of very small objects. To overcome inherent optical imperfection of the micro 3D sensor, we correct the vignetting and blooming effects which cause distortions in the phase image. Error analysis and 3D scanning results on small real objects are presented to show the performance of the developed 3D scanning system.

• Journal of Sensor Science and Technology
• /
• v.32 no.1
• /
• pp.31-38
• /
• 2023

Three-dimensional (3D) micro/nanostructures based on soft elastomers have received extensive attention in recent years, owing to their potential and advanced applicability. Designing and fabricating 3D micro/nanostructures are crucial for applications in diverse engineering fields, such as sensors, harvesting devices, functional surfaces, and adhesive patches. However, because of their structural complexity, fabricating soft-elastomer-based 3D micro/nanostructures with a low cost and simple process remains a challenge. Bio-inspired designs that mimic natural structures, or replicate their micro/nanostructure surfaces, have greatly benefited in terms of low-cost fabrication, scalability, and easy control of geometrical parameters. This review highlights recent advances in 3D micro/nanostructures inspired by nature for diverse potential and advanced applications, including flexible pressure sensors, energy-harvesting devices based on triboelectricity, superhydrophobic/-philic surfaces, and dry/wet adhesive patches.

• Journal of Sensor Science and Technology
• /
• v.21 no.2
• /
• pp.96-102
• /
• 2012

This paper addresses photometric distortion problems of a compact 3D scanning sensor which is composed of a micro-size and inexpensive camera-projector system. Recently, many micro-size cameras and projectors are available. However, erroneous 3D scanning results may arise due to the poor and nonlinear photometric properties of the sensors. This paper solves two inherent photometric distortions of the sensors. First, the response functions of both the camera and projector are derived from the least squares solutions of passive and active calibration, respectively. Second, vignetting correction of the vision camera is done by using a conventional method, however the projector vignetting is corrected by using the planar homography between the image planes of the projector and camera, respectively. Experimental results show that the proposed technique enhances the linear properties of the phase patterns that are generated by the sensor.

• Journal of the Korean Society for Precision Engineering
• /
• v.21 no.8
• /
• pp.65-72
• /
• 2004

For the burrs formed in machining are irregular and very sharp in shape, it is usually very difficult to measure burr accurately. It was proved that micro burr geometry can be measured imprecision by the Conoprobe sensor using conoscopic holography method. We developed 3D burr measurement system using this sensor. The system is composed of Conoprobe sensor, XY table, controller and 3D measurement program. Some measurements using the developed system are conducted for the burrs formed in micro drilling and piercing. Specific software fur burr measurement includes several function, calculation of burr volume, average burr height. Burs formed on a curved surface were compensated and measured successfully using the basic surface compensation function.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2003.06a
• /
• pp.951-954
• /
• 2003

Generally, for the burrs formed in machining are irregular and very sharp in shape, it is usually very difficult to measure burr accurately. But, it is proved that precision measurement for micro burr using the conoprobe sensor by conoscopic holography method is possible. We developed 3D burr measurement system using this sensor. The system is composed of Conoscopic laser Sensor, X-Y table, controller and 3D measurement program. Some measurements using the developed system are applied to burrs formed in micro drilling and piercing.

• Journal of Sensor Science and Technology
• /
• v.32 no.4
• /
• pp.232-237
• /
• 2023

This paper presents a system for estimating the position of a magnet using a magnetic sensor. An algorithm is presented to analyze the waveform and output voltage values of the magnetic field generated at each position when the magnet moves and to estimate the position of the magnet based on the analyzed data. Here, the magnet is sufficiently small to be inserted into a blood vessel and has a micro-magnetic field of hundreds of nanoteslas owing to the small size and shape of the guide wire. In this study, a highly sensitive magneto-impedance (MI) sensor was used to detect these micro-magnetic fields. Nine MI sensors were arranged in a 3×3 configuration to detect a magnetic field that changes according to the position of the magnet through the MI sensor, and the voltage value output was polynomially regressed to specify a position value for each voltage value. The accuracy was confirmed by comparing the actual position value with the estimated position value by expanding it from a 1D straight line to a 3D space. Additionally, we could estimate the position of the magnet within a 3% error.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2008.11a
• /
• pp.274-274
• /
• 2008

This paper describes on the fabrication and characteristics of a 3C-SiC (Silicon Carbide) micro pressure sensor for harsh environment applications. The implemented micro pressure sensor used 3C-SiC thin-films heteroepitaxially grown on SOI (Si-on-insulator) structures. This sensor takes advantages of the good mechanical properties of Si as diaphragms fabricated by D-RIE technology and temperature properties of 3C-SiC piezoresistors. The fabricated pressure sensors were tasted at temperature up to $250^{\circ}C$ and indicated a sensitivity of 0.46 mV/V*bar at room temperature and 0.28 mV/V*bar at $250^{\circ}C$. The fabricated 3C-SiC/SOI pressure sensor presents a high-sensitivity and excellent temperature stability.

• Journal of computational fluids engineering
• /
• v.10 no.1
• /
• pp.73-79
• /
• 2005

Micro sensor is very useful for flow measurements in a number of engineering applications. Especially, it is necessary for the development of MEMS. This paper presents the 3D numerical simulation of flows around a micro flow sensor, which is mounted on a flat plate. The effects of the sensor configuration (i.e. bottom gap) and the Reynolds number on the flow field are numerically investigated. The numerical results indicate that the bottom gap clearly affects the flow fields over the top surface of the sensor. The Reynolds numbers also show a significant influence on the flow nature, especially on the recirculation zone at downstream of the sensor. The present results illustrate a certain improvement on the flow field for the sensor installed at O.5mm above the wall with four pillars, comparing with that directly mounted on the wall.

• Journal of Advanced Marine Engineering and Technology
• /
• v.39 no.5
• /
• pp.522-526
• /
• 2015

Generally, underwater unmanned vehicle have adopted an inertial navigation system (INS), dead reckoning (DR), acoustic navigation and geophysical navigation techniques as the navigation method because GPS does not work in deep underwater environment. Even if the tactical inertial sensor can provide very detail measurement during long operation time, it is not suitable to use the tactical inertial sensor for small size and low cost UUV because the tactical inertial sensor is expensive and large. One alternative to INS is attitude heading reference system (AHRS) with the micro-machined electro mechanical system (MEMS) inertial sensor because of MEMS inertial sensor's small size and low power requirement. A cost effective and small size attitude heading reference system (AHRS) which incorporates measurements from 3-axis micro-machined electro mechanical system (MEMS) gyroscopes, accelerometers, and 3-axis magnetometers has been developed to provide a complete attitude solution for UUV. The AHRS based MEMS overcome many problems that have inhibited the adoption of inertial system for small UUV such as cost, size and power consumption. Several evaluation experiments were carried out for the validation of the developed AHRS's function and these experiments results are presented. Experiments results prove the fact that the developed MEMS AHRS satisfied the required specification.

• Journal of Sensor Science and Technology
• /
• v.6 no.3
• /
• pp.237-244
• /
• 1997

A new planar-type microsensor, which had a platinum heater and a sensing layer on the same plane was fabricated on silicon substrate with stress-relieved PSG(phosphosilicate glass)/$Si_{3}N_{4}$(800nm/150nm) diaphragm. The proposed planar-type microsensor could be fabricated by simple silicon process using only 3 masks for photolithography process compared with 5 or 6 masks of the typical micro-gas sensor. The thermal properties of the microsensor from thermal simulation were compared with those of the fabricated microheater. Although there are some discrepancy between the simulation result and the result from the fabricated microheater, the thermal simulation by FEM was proved to be an useful method to evaluate the thermal properties of microheater. The sensing characteristics of the fabricated microsensor with the planar-type heater were investigated also.