• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• 제18권9호
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• pp.803-809
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• 2005

Cerium ammonium nitrate (CAN) and nitric acid was used an etchant and an additive for Ru etching and polishing. pH and Eh values of the CAN and nitric acid added chemical solution satisfied the Ru etching condition. The etch rate increased linearly as the concentration of CAN increased. Nitric acid added solution had the high etch rate. But micro roughness of etched surfaces was not changed before and after etching, The removal rate of Ru film was the highest in $1wt\%$ abrasive added slurry, and not increased despite the concentration of alumina abrasive increased to $5wt\%$. Even Ru film was polished by only CAN solution due to the friction. The highest removal rate of 120nm/min was obtained in 1 M nitric acid and $1wt\%$ alumina abrasive particles added slurry. The lowest micro roughness value was observed in this slurry after polishing. From the XPS analysis of etched Ru surface, oxide layer was founded on the etched Ru surface. Therefore, Ru was polished by chemical etching of CAN solution and oxide layer abrasion by abrasive particles. From the result of removal rate without abrasive particle, the etching of CAN solution is more dominant to the Ru CMP.

• Journal of Korean Society of Water and Wastewater
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• 제19권2호
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• pp.200-208
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• 2005

In this study, a new submerged membrane bioreactor process packed with granular sulfur (MBR-GS) was operated to identify the biological nitrogen removal behaviors with plating wastewater containing high-strength $NO_3{^-}$ concentration. The continuous denitrification was carried out at $20^{\circ}C$ with various nitrogen loading rates using synthetic wastewater, which composed of $NO_3{^-}$ and $HCO_3{^-}$, but also actual plating wastewater, which was collected from the effluent of the H metal plating company. As a result, high-rate denitrification in the range of $0.8kg\;NO_3{^-}-N/m^3\;day$ was accomplished at nitrogen loading rate of $0.9kg\;NO_3{^-}-N/m^3\;day$ using synthetic wastewater. Also, higher-rate denitrification with actual plating wastewater was achieved up to $0.91kg\;NO_3{^-}-N/m^3\;day$ at the loading rate of $1.11kg\;NO_3{^-}-N/m^3\;day$. Additionally, continuous filtration was possible during up to 30 days without chemical cleaning in the range of 20 cmHg of transmembrane pressure. On the basis of the proposed stoichiometry, ${SO_4}^{2-}$ production could be estimated efficiently, while observed alkalinity consumption was somewhat lower than theoretical value. Consequently, a new process, MBR-GS is capable of high-rate autotrophic denitrification by compulsive flux and expected to be utilized as an alternative of renovation techniques for nitrogen removal from not only plating wastewater but also municipal wastewater with low C/N ratio.

• Economic and Environmental Geology
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• 제37권1호
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• pp.133-142
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• 2004

The purpose of this study is to evaluate a laboratory test on arsenic removal effciency for ARD(Acid Rock Drain-age) using limestone and apatite, and on heavy metals removal efficiencies for AMD(Acid Mine Drainage) using apatite and fish bone. As a result of the laboratory test, pH, arsenic removal rate of limestone & apatite are inversely proportional to flow rates and apatite removes 100% of arsenic while limestone removes 37% of arsenic at 0.6$m{ell}$/min/kg flow rate in case of ARD treatment. And the dissolution amount of apatite is twenty five times higher than that of limestone. In case of AMD treatment, fish bone shows higher dissolution rate than apatite, and pH of outlet water reacted with fish bone is higher than that reacted with apatite. The heavy metal removal rates of fish bone are also higher than that of apatite except arsenic removal rate. The precipitate resulted from fish bone reaction with AMD seems to be biological sludge type while that resulted from apatite with AMD is inorganic solid which can settle easily compared with the biological sludge and can be cemented by gypsum. As the results, apatite can be used as a precipitant for the polluted mine waters showing wide range of pH and fish bone can be used for highly contaminated AMD.

• Applied Chemistry for Engineering
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• 제9권4호
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• pp.504-508
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• 1998

Experimental investigation on the adsorption of heavy metal confounds as $Fe^{2+}$, $Cu^{2+}$, $Mn^{2+}$, $Zn^{2+}$, $Ni^{2+}$, $Pb^{2+}$, $Cd^{2+}$, $Cr^{6+}$ using chitosan was carried out. The adsorption of each component of heavy metal compounds was measured by Atomic Absorption apparatus. The range of optimum pH for the removal rates of heavy metal compounds was found pH 7.0~9.0. The maximum time for the removal rate of $Fe^{2+}$ was observed about 15 min. The maximum time for the removal raters of $Cu^{2+}$, $Mn^{2+}$, $Zn^{2+}$, $Ni^{2+}$, $Pb^{2+}$, $Cd^{2+}$, and $Cr^{6+}$ was observed about 25 min. The adsorption rates of heavy metal compounds by chitosan have been found in the order of $Fe^{2+}>Cu^{2+}>Mn^{2+}>Zn^{2+}>Ni^{2+}>Pb^{2+}>Cd^{2+}>Cr^{6+}$.

• Journal of the Korean Society for Precision Engineering
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• 제17권6호
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• pp.96-102
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• 2000

The finishing process for dies and molds is an important process because it has influence on final quality of products. And it is difficult to automatize finishing process so that the process has depended on expert's skill until now. However, recently a study on development of die automatic finishing machine has been progressed, and actually this machine is applied to fabrication of die. But the research about tooling system is not enough and finishing tool must have high machining efficiency and adaptability of curved surface. So, this study investigated the application of conductive elastic tool which is composed of metal-resin bonded pellet and elastic backing material. The metal-resin bonded pellet is used to finish the surface by conventional mechanical grinding or electro-chemial grinding method. And elastic backing material is used to follow the curved surface. So conductive elastic tool has long lifetime, uniform removal rate and adaptability of curved surface.

• Bulletin of the Korean Chemical Society
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• 제18권3호
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• pp.316-318
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• 1997

A general and universal detection method, which can be used in high performance liquid chromatography (HPLC) and flow injection analysis (FIA) system for the determination of any metal ions complexing with ethylenediaminetetraacetic acid (EDTA), is demonstrated. Pulsed amperometric detection scheme is applied in a flow-through thin layer electrochemical cell at an Au working electrode. Fluctuation of peak current level at the same flow rate of carrier solution is minimized at this solid working electrode, whereas not at a dropping mercury electrode. Removal of dissolved oxygen can be omitted with this detection method, which is a required step for cathodic detection methods. Also, a group of metal ions can be determined selectively and indirectly with this detection scheme.

• Journal of Environmental Science International
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• 제17권10호
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• pp.1147-1154
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• 2008

Road runoff, one of non-point source pollutants, contains various heavy metals, most of which flow into discharge waters without being treated. The mechanism of removing the heavy metals in water is similar to that of removing micro-particles. Therefore, it is considered that it is possible to remove a lot of the heavy metals contained in the road runoff by filtering or absorbing them. In this paper, performed has been a basic study on the characteristics of UNFS (Up Flow Non-Point Source Filtering System) using carbide pellet and zeolite pellet as double-layer filtering mediums to treat the road runoff. The removal rate with filtering and absorption time has been shown as follows: 29.0% for Cr; 27.8% for Cd; 25.7% for Fe; 25.4% for Co; 21.2% for Pb; ]9.6% for Zn; 18.2% for Al; 17.0% for Mn; 11.3% for Ni; 7.5% for Cu. The overall removal rate according to influx change has been shown to be approximately 30%, and the load of heavy metals flowing out in initial precipitation could be reduced by using carbide as a recycling filtering medium. When the removal as coarse particles settle is added up, it is expected that UNFS will result in a higher removal rate.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 한국전기전자재료학회 2003년도 춘계학술대회 논문집 센서 박막재료 반도체 세라믹
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• pp.45-48
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• 2003

The polishing mechanism of W-CMP process has been reported as the repeated process of passive layer formation by oxidizer and abrasion action by slurry abrasives. Thus, it is important to understand the effect of oxidizer on tungsten passivation layer in order to obtain higher removal rate (RR) and very low non-uniformity (NU%) during W-CMP process. In this paper, we investigated the effects of oxidizer on W-CMP process with three different kinds of oxidizers, such as $H_2O_2$, $Fe(NO_3)_3$, and $KIO_3$. In order to compare the removal rate and non-uniformity of three oxidizers, we used alumina-based slurry of pH 4. According to the CMP tests, three oxidizers showed different removal mechanism on tungsten surface. Also, the microstructures of surface layer by AFM image were greatly influenced by the slurry chemical, composition of oxidizers. The difference in removal rate and roughness of tungsten surface are believed to caused by modification in the mechanical behavior of $Al_2O_3$ abrasive particles in CMP slurry. Our stabilized slurries can be used a guideline and promising method for improved W-CMP process.

• Carbon letters
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• 제2권1호
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• pp.15-21
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• 2001

In this work, activated carbon fibers (ACFs) were plated with copper metal using electroless plating method and the effects of surface properties and pore structures on chromium adsorption properties were investigated. Surface properties of ACFs have been characterized using pH and acid/base values. BET data with $N_2$ adsorption were used to obtain the structural parameters of ACFs. The electroless copper plating did significantly lead to a decrease in the surface acidity or to an increase in the surface basicity of ACFs. However, all of the samples possessed a well-developed micropore. The adsorption capacity of Cr(III) for the electroless Cu-plated ACFs was higher than that of the as-received, whereas the adsorption capacity of Cr(VI) for the former was lower than that of the latter. The adsorption rate constants ($K_1$, $K_2$, and $K_3$) were also evaluated from chromium adsorption isotherms. It was found that $K_1$ constant for Cr(III) adsorption depended largely on surface basicity. The increase of Cr(III) adsorption and the decrease of Cr(VI) adsorption were attributed to the formation of metal oxides on ACFs, resulting in increasing the surface basicity.

• ETRI Journal
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• 제45권3호
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• pp.543-550
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• 2023

Electrostatic discharge (ESD) testing for human body model tests is an essential part of the reliability evaluation of electronic/electrical devices and components. However, global environmental concerns have called for the need to replace the mercury-wetted relay switches, which have been used in ESD testers. Therefore, herein, we propose an ESD tester using metal oxide semiconductor-controlled thyristor (MCT) devices with a significantly higher rising rate of anode current (di/dt) characteristics. These MCTs, which have a breakdown voltage beyond 3000 V, were developed through an in-house foundry. As a replacement for the existing mercury relays, the proposed ESD tester with the developed MCT satisfies all the requirements stipulated in the JS-001 standard for conditions at or below 2000 V. Moreover, unlike traditional relays, the proposed ESD tester does not generate resonance; therefore, no additional circuitry is required for resonant removal. To the best of our knowledge, the proposed ESD tester is the first study to meet the JS-001 specification by applying a new switch instead of an existing mercury-wetted relay.