• Applied Chemistry for Engineering
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• v.10 no.1
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• pp.58-66
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• 1999

The catalytic oxidation of vinyl chloride was investigated over $CrO_x$ impregnated on $Al_2O_3$ at temperature between 200 and $400^{\circ}C$. The major carbonaceous products were CO and $CO_2$, and the selectivity of $CO_2$ was gradually increased with increasing reaction temperature, while that of CO was dropped consequently. This suggests that CO is the first product which is further oxidized to $CO_2$ in the oxidation of vinyl chloride over $CrO_x/Al_2O_3$. The addition of HCl in the feed didn't affect the conversion of vinyl chloride, but the selectivity of $CO_2$ decreased by adding HCl. It implies that HCl inhibits, the complete oxidation of vinyl chloride to $CO_2$. When oxidizing vinyl chloride in dry air, significant amounts of $Cl_2$ were observed, while no $Cl_2$ was detected in the humid condition. The activities of several catalysts including various precious metals and other transition metal oxides were measured, it was found that the catalytic activity of 12% $CrO_x/Al_2O_3$ was higher than other catalysts except 1% $Pt/Al_2O_3$. The reaction rate of 12% $CrO_x/Al_2O_3$ was 1.2 times lower than that of 1% Pt/alumina, but it was 3 to 8 times more active than other catalysts for vinyl chloride oxidation at $275^{\circ}C$.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.02a
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• pp.410-410
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• 2013

Next-generation nonvolatile memory (NVM) has attracted increasing attention about emerging NVMs such as ferroelectric random access memory, phase-change random access memory, magnetic random access memory and resistance random access memory (RRAM). Previous studies have demonstrated that RRAM is promising because of its excellent properties, including simple structure, high speed and high density integration. Many research groups have reported a lot of metal oxides as resistive materials like TiO2, NiO, SrTiO3 and ZnO [1]. Among them, the ZnO-based film is one of the most promising materials for RRAM because of its good switching characteristics, reliability and high transparency [2]. However, in many studies about ZnO-based RRAMs, there was a problem to get lower current level for reducing the operating power dissipation and improving the device reliability such an endurance and an retention time of memory devices. Thus in this paper, we investigated that highly reproducible bipolar resistive switching characteristics of W doped ZnO RRAM device and it showed low resistive switching current level and large ON/OFF ratio. This may be caused by the interdiffusion of the W atoms in the ZnO film, whch serves as dopants, and leakage current would rise resulting in the lowering of current level [3]. In this work, a ZnO film and W doped ZnO film were fabricated on a Si substrate using RF magnetron sputtering from ZnO and W targets at room temperature with Ar gas ambient, and compared their current levels. Compared with the conventional ZnO-based RRAM, the W doped ZnO ReRAM device shows the reduction of reset current from ~$10^{-6}$ A to ~$10^{-9}$ A and large ON/OFF ratio of ~$10^3$ along with self-rectifying characteristic as shown in Fig. 1. In addition, we observed good endurance of $10^3$ times and retention time of $10^4$ s in the W doped ZnO ReRAM device. With this advantageous characteristics, W doped ZnO thin film device is a promising candidates for CMOS compatible and high-density RRAM devices.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.17 no.7
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• pp.434-441
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• 2016

Friction Stir Welding (FSW) is a solid-state joining process involving the frictional heat between the materials and tools. The amount of heat conducted into the workpiece determines the quality of the welded zone. Excessive heat input is the cause of oxides and porosity defects, and insufficient heat input can cause problems, such as tunnel defects. Therefore, analyzing the temperature history and distribution at the center of the Friction Stir Welded zone is very important. In this study, the temperature distribution of the friction stir welding region of an AZ61 magnesium alloy was investigated. To achieve this goal, the temperature and metal flow was predicted using the finite element method. In FE analysis, the welding tool was simplified and the friction condition was optimized. Moreover, the temperature measuring test at the center of the welding region was performed to verify the FE results. In this study, the tool rotation speed was a more dominant factor than the welding speed. In addition, the predicted temperature at the center of the welding region showed good agreement with the measurement results within the error range of 5.4% - 7.7%.

• Journal of Korean Society of Environmental Engineers
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• v.22 no.10
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• pp.1825-1832
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• 2000

Column experiments were conducted by using soil columns, to investigate feasibility and efficiency of in-situ ozone enhanced remediation for diesel-contaminated soil. The injection of gaseous ozone into soil column revealed the enhanced decomposition of ozone due to the catalytic reaction between ozone and metal (e.g., Fe, Mn etc.) oxides as evidenced by as much as 25 times shorter half-life of ozone in a sand packed column than in a glass beads packed column. Substantial retardation in the transport of and the consumption of ozone were observed in the diesel contaminated field soil and sand packed columns. After 16 hrs ozonation, 80% of the initial mass of diesel (as diesel range organic) concentration of $800{\pm}50mg/kg$, was removed under the conditions of the flow rate of 50mL/min and $6mg-O_3/min$. Whereas, less than 30% of diesel was removed in the case of air injection. Analysis of the residual TPH(total petroleum hydrocarbon) and selected 8 aliphatics of diesel compounds in the inlet and the outlet of the column confirmed that diesel nonselectively reacted with ozone and then shifted to lower carbon numbered molecules. Water content also was found to be an important parameter in employing ozone to the hydrocarbon-contaminated soil.

• Tuberculosis and Respiratory Diseases
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• v.59 no.6
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• pp.690-695
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• 2005

Nitric acid is an oxidizing agent used in metal refining and cleaning, electroplating, and other industrial applications. Its accidental spillage generates oxides of nitrogen, including nitric oxide (NO) and nitrogen dioxide ($NO_2$), which cause chemical pneumonitis when inhaled. The clinical presentation of a nitric acid inhalation injury depends on the duration and intensity of exposure. In mild cases, there may be no symptoms during the first few hours after exposure, or the typical symptoms of pulmonary edema can appear within 3-24 hours. However, in cases of prolonged exposure, progressive pulmonary edema develops instantaneously and patients may not survive for more than 24 hours. We report a case of a 44-year-old male who was presented with acute respiratory distress syndrome after nitric acid inhalation. He complained of cough and dyspnea of a sudden onset after inhaling nitric acid fumes at his workplace over a four-hour period. He required endotracheal intubation and mechanical ventilation due to fulminant respiratory failure. He was managed successfully with mechanical ventilation using positive end expiratory pressure and systemic corticosteroids, and recovered fully without any deterioration in his pulmonary function.

• Korean Chemical Engineering Research
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• v.52 no.3
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• pp.279-288
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• 2014

Nuclear energy is expected to meet the growing energy demand while avoiding CO2 emission. However, the problem of accumulating spent fuel from current nuclear power plants which is mainly composed of uranium oxides should be addressed. One of the most practical solutions is to reduce the spent oxide fuel and recycle it. Next-generation fuel cycles demand innovative features such as a reduction of the environmental load, improved safety, efficient recycling of resources, and feasible economics. Pyroprocessing based on molten salt electrolysis is one of the key technologies for reducing the amount of spent nuclear fuel and destroying toxic waste products, such as the long-life fission products. The oxide reduction process based on the electrochemical reduction in a LiCl-$Li_2O$ electrolyte has been developed for the volume reduction of PWR (Pressurized Water Reactor) spent fuels and for providing metal feeds for the electrorefining process. To speed up the electrochemical reduction process, the influences of the feed form for the cathode and the type of anode shroud on the reduction rate were investigated.

• Journal of the Institute of Electronics Engineers of Korea TE
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• v.39 no.4
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• pp.341-349
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• 2002

Electrical, mechanical and sinterability properties of yttria-stabilized zirconia doped with 5.35wt% $Y_2$O$_3$(Y$_2$O$_3$- containing stabilized zirconia : YSZ) were studied as a function of $Al_2$O$_3$, CoO, Fe$_2$O$_3$ and MnO$_2$ addition. The ratio of monoclinic phase to tetragonal phase was changed by the addition of $Al_2$O$_3$, CoO, Fe$_2$O$_3$ and MnO$_2$ to 8.00 wt% and sintered density decreased with increasing $Al_2$O$_3$, CoO, Fe$_2$O$_3$ and MnO$_2$ addition. Fracture toughness increased with the increase of monoclinic to tetragonal phase ratio and was maximum at about 18%. When transition metals such as CoO, Fe$_2$O$_3$ or MnO$_2$ was added more than 1.5 wt%, the electrical conductivity of YSZ increased. But $Al_2$O$_3$ hardly affected the electrical conductivity of YSZ. The addition of $Al_2$O$_3$, CoO, Fe$_2$O$_3$ and MnO$_2$ into YSZ resulted in the more complex behavior of fracture toughness and hardness variation and the specimen with 1.5wt%-Fe$_2$O$_3$, 3.0wt%-Al$_2$O$_3$ and 1.5wt%-CoO showed the monoclinic to tetragonal phase ratio of 18% and the highest toughness of 10.8 MPa.m$^{1}$2/ and Vickers hardness of 1201 kgf/mm$^2$.

• Journal of Korean Society of Environmental Engineers
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• v.32 no.11
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• pp.1054-1062
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• 2010

Oxidative coupling reactions of humic substances (HS) can be catalyzed by a variety of natural extracellular enzymes and metal oxides. In this study, property changes of HS induced by a natural enzyme, horseradish peroxidase (HRP), and the effect of it to microfiltration (MF) were investigated. PAHA was transformed by oxidative coupling reaction with HRP and hydrogen peroxide ($H_2O_2$), verifying the catalytic effects of the HRP. Size exclusion chromatography (SEC) revealed that weight-average molecular weight (MWw) of PAHA was proportionally increased with the dosages of HRP and $H_2O_2$, indicating the transform action of HS into larger and complex molecules. An increase in the conformational stability of HS was achieved through the promotion of intermolecular covalent bondings between heterogeneous humic molecules. Spectroscopic analysis (fluorescence and infrared spectroscopy) proved that functional groups were transformed by the reaction. Additionally, HS and transformed products were undergone microfiltration (MF) to examine the treatment potential of them in a water treatment facility. Original HS could not be removed by MF but larger molecules of transformed products could be removed. Meanwhile, transformed products caused more fouling on the filtration than original HS. This results proved that natural organic matter (NOM) can be removed by MF after its increase in molecular size by oxidative coupling reaction.

• Journal of Soil and Groundwater Environment
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• v.20 no.4
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• pp.90-103
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• 2015

The agricultural soil, meets soil environmental standards whereas agricultural product from the same soil does not meet permissible level of contaminants, is identified in the vicinity of the abandoned mine in Korea. This study estimated the stabilization efficiency of Cd and Pb using limestone through the flood pot test for this kind of agricultural paddy soil. We had the concentration of the monitored contaminants in soil solution for 4 months and analyzed fractionations in soil and concentrations in rice plant. In soil solution of plow layer, the reductive Mn had been detected constantly unlike Fe. The concentrations of Mn in limestone amended soil was relatively lower than that in control soil. This reveals that the reductive heavy metals which become soluble under flooded condition can be stabilized by alkali amendment. This also means that Cd and Pb associated with Mn oxides can be precipitated through soil stabilization. Pb concentrations in soil solution of amended conditions were lower than that of control whereas Cd was not detected among all conditions including control. In contaminants fractionation of soil analysis, the decreasing exchangeable fraction and the increasing carbonates fraction were identified in amended soil when compared to control soil at the end of test. These results represent the reduction of contaminants mobility induced by alkali amendment. The Cd and Pb contents of rice grain from amended soil also lower than that of control. These result seems to be influenced by reduction of contaminants mobility represented in the results of soil solution and soil fractionation. Therefore contaminants mobility (phytoavailability) rather than total concentration in soil can be important factor for contaminants transition from soil to agricultural products. Because reduction of heavy metal transition to plant depends on reduction of bioavailability such as soluble fraction in soil.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.96-97
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• 2012

In nitride and oxide film deposition, sputtered metals react with nitrogen or oxygen gas in a vacuum chamber to form metal nitride or oxide films on a substrate. The physical properties of sputtered films (metals, oxides, and nitrides) are strongly influenced by magnetron plasma density during the deposition process. Typical target power densities on the magnetron during the deposition process are ~ (5-30) W/cm2, which gives a relatively low plasma density. The main challenge in reactive sputtering is the ability to generate a stable, arc free discharge at high plasma densities. Arcs occur due to formation of an insulating layer on the target surface caused by the re-deposition effect. One current method of generating an arc free discharge is to use the commercially available Pinnacle Plus+ Pulsed DC plasma generator manufactured by Advanced Energy Inc. This plasma generator uses a positive voltage pulse between negative pulses to attract electrons and discharge the target surface, thus preventing arc formation. However, this method can only generate low density plasma and therefore cannot allow full control of film properties. Also, after long runs ~ (1-3) hours, depends on duty cycle the stability of the reactive process is reduced due to increased probability of arc formation. Between 1995 and 1999, a new way of magnetron sputtering called HIPIMS (highly ionized pulse impulse magnetron sputtering) was developed. The main idea of this approach is to apply short ${\sim}(50-100){\mu}s$ high power pulses with a target power densities during the pulse between ~ (1-3) kW/cm2. These high power pulses generate high-density magnetron plasma that can significantly improve and control film properties. From the beginning, HIPIMS method has been applied to reactive sputtering processes for deposition of conductive and nonconductive films. However, commercially available HIPIMS plasma generators have not been able to create a stable, arc-free discharge in most reactive magnetron sputtering processes. HIPIMS plasma generators have been successfully used in reactive sputtering of nitrides for hard coating applications and for Al2O3 films. But until now there has been no HIPIMS data presented on reactive sputtering in cluster tools for semiconductors and MEMs applications. In this presentation, a new method of generating an arc free discharge for reactive HIPIMS using the new Cyprium plasma generator from Zpulser LLC will be introduced. Data (or evidence) will be presented showing that arc formation in reactive HIPIMS can be controlled without applying a positive voltage pulse between high power pulses. Arc-free reactive HIPIMS processes for sputtering AlN, TiO2, TiN and Si3N4 on the Applied Materials ENDURA 200 mm cluster tool will be presented. A direct comparison of the properties of films sputtered with the Advanced Energy Pinnacle Plus + plasma generator and the Zpulser Cyprium plasma generator will be presented.