• Title/Summary/Keyword: mechanical polishing

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The LaserFIB: new application opportunities combining a high-performance FIB-SEM with femtosecond laser processing in an integrated second chamber

  • Ben Tordoff;Cheryl Hartfield;Andrew J. Holwell;Stephan Hiller;Marcus Kaestner;Stephen Kelly;Jaehan Lee;Sascha Muller;Fabian Perez-Willard;Tobias Volkenandt;Robin White;Thomas Rodgers
    • Applied Microscopy
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    • v.50
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    • pp.24.1-24.11
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    • 2020
  • The development of the femtosecond laser (fs laser) with its ability to provide extremely rapid athermal ablation of materials has initiated a renaissance in materials science. Sample milling rates for the fs laser are orders of magnitude greater than that of traditional focused ion beam (FIB) sources currently used. In combination with minimal surface post-processing requirements, this technology is proving to be a game changer for materials research. The development of a femtosecond laser attached to a focused ion beam scanning electron microscope (LaserFIB) enables numerous new capabilities, including access to deeply buried structures as well as the production of extremely large trenches, cross sections, pillars and TEM H-bars, all while preserving microstructure and avoiding or reducing FIB polishing. Several high impact applications are now possible due to this technology in the fields of crystallography, electronics, mechanical engineering, battery research and materials sample preparation. This review article summarizes the current opportunities for this new technology focusing on the materials science megatrends of engineering materials, energy materials and electronics.

Development of Automatic Alignment Height and Cross-section Inspection System for Fiber Bragg Grating Embedded Field Assembly Connector (FBG Embedded 현장 조립형 커넥터의 자동 정렬 및 단면 자동 검사 시스템 개발)

  • Lee, Jung-Ho;Park, Chan-Hee;Yoon, Jae-Soon;Lee, Hee-Kwan;Kim, Cheol-Sang;Kim, Jae-Won;Kim, Kyung;Kim, Jae-Jun
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.23 no.1
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    • pp.94-101
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    • 2014
  • Recently, in order to reduce the time required to replace an optical jumper cord, many researchers are using a field-installable connector and applying the ferrule polishing method, ferrule mechanical contact method, or ferrule fusion contact method. However, the process of arranging the length of the optical fiber, i.e., inserting the optical fiber into the ferrule by hand and checking its cross section, takes 60% of the time required for the entire process, which increases the overall cost. Therefore, in order to make this task more cost-effective, we will develop an automated inspection system with automatic cross-sectional arrangement of a field-installable connector. This system will be able to decrease the failure rate from 10% to 2% compared with the conventional method when cutting the optical fiber inserted into the ferrule. It will also improve the productivity by decreasing the test time by 28% compared with the conventional method. Our studies showed that it was possible to reduce the production costs and improve the quality of a field-installable connector, and we expect it to dominate the market.

Distribution Characteristics of Weld Residual Stress on Butt Welded Dissimilar Metal Plate (이종금속 평판 맞대기용접의 용접잔류응력 분포특성)

  • Lee, Kyoung-Soo;Park, Chi-Yong;Kim, Maan-Won;Park, Jai-Hak
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.9
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    • pp.1317-1323
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    • 2010
  • In this study, the weld residual stress distribution at a dissimilar-metal welded plate of low alloy carbon steel and stainless steel, which are widely used in nuclear power plants, was characterized. A plate mock-up with butt welding was fabricated using SA 508 low alloy steel and Type 304 stainless steel plates and the residual stresses were measured by the X-ray diffraction method after electrolytic polishing of the plate specimen. Finite element analysis was carried out in order to simulate the butt welding of dissimilar metal plate, and the calculated weld residual stress distribution was compared with that obtained from the measured data. The characteristics of the three-dimensional residual stress distribution in a butt weld of dissimilar metal plates were investigated by comparing the measured and calculated residual stress data.

Finite Element Analysis of Straight Slot Welding and Characteristics of the Weld Residual Stress Distribution (직선 Slot 용접의 유한요소해석 및 용접잔류응력 분포특성)

  • Park, Chi-Yong;Lee, Kyoung-Soo;Kim, Maan-Won;Song, Ki-Oh
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.34 no.9
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    • pp.1311-1316
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    • 2010
  • In this study, straight slot welding was carried out using a 316L stainless steel test block, and numerical simulation of the slot weld process was performed using finite element analysis. Data on the residual stress were obtained at equally spaced points on the top surface of the test block along directions parallel and perpendicular to the welding direction. After electrolytic polishing of the top surface of the block, the residual stress was measured by the X-ray diffraction method. The calculated weld residual stresses were compared with the measured data, and they were in good agreement with the data. The weld residual stress distribution inside the plate was determined from the results of finite element analysis, and the characteristics of the distribution were discussed in detail in this paper.

Modifications of a Grinding Machine Structure for the Improved Precision Machining (가공정도 향상을 위한 평면 연삭기의 설계 개선)

  • Shon, Jae-Yul;Ro, Seung-Hoon;Lim, Yo-Han;Lee, Jong-Hyung;Lee, Jae-Yul;Song, Eun-Seok;Lee, Tae-Hoon
    • Journal of the Korean Society of Industry Convergence
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    • v.12 no.2
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    • pp.99-105
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    • 2009
  • Among a few items with world wide competitiveness are the semiconductor and the LCD. Grinding/polishing is the most significant process in manufacturing semiconductor wafers and LCD panels, the most critical quality of which is the precision rate of the machined surfaces. It is well known that the control of the vibrations is the major factor in maintaining superb machined surfaces. In this paper the dynamic properties of a grinding machine have been investigated through the frequency analysis test and the computer simulation to deduce ideas of design modifications for improved stability. The alterations have been applied to the simulation model, which is supposed to have identical dynamic property with the original structure, to identify the effects and to finally achieve the satisfactory level of stability. The result shows that the machine can have much improved stability with relatively simple design changes, and also can improve the surface quality of the products.

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Fabrication of SOI Structures with Buried Cavities for Microsystems SDB and Electrochemical Etch-stop (SDB와 전기화학적 식각정지에 의한 마이크로 시스템용 매몰 공동을 갖는 SOI 구조의 제조)

  • Chung, Gwiy-Sang;Kang, Kyung-Doo;Choi, Sung-Kyu
    • Journal of Sensor Science and Technology
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    • v.11 no.1
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    • pp.54-59
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    • 2002
  • This paper describes a new process technique for batch process of SOI(Si-on-Insulator) structures with buried cavities for MEMS(Micro Electro Mechanical System) applications by SDB(Si-wafer Direct Bonding) technology and electrochemical etch-stop. A low-cost electrochemical etch-stop method is used to control accurately the thickness of SOI. The cavities were made on the upper handling wafer by Si anisotropic etching. Two wafers are bonded with an intermediate insulating oxide layer. After high-temperature annealing($1000^{\circ}C$, 60 min), the SDB SOI structure with buried cavities was thinned by electrochemical etch-stop. The surface of the fabricated SDB SOI structure have more roughness that of lapping and polishing by mechanical method. This SDB SOI structure with buried cavities will provide a powerful and versatile substrate for novel microsensors arid microactuators.

Effect of Glycine Adsorption on Polishing of Silicon Nitride in Chemical Mechanical Planarization Process (CeO2 슬러리에서 Glycine의 흡착이 질화규소 박막의 연마특성에 미치는 영향)

  • 김태은;임건자;이종호;김주선;이해원;임대순
    • Journal of the Korean Ceramic Society
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    • v.40 no.1
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    • pp.77-80
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    • 2003
  • Adsorption of glycine on$Si_3N_4$powder surface has been investigated, which is supposed to enhance the formation of passive layer inhibiting oxidation in aqueous solution. In the basic solution, multinuclear surface complexing between Si and dissociated ligands was responsible for the saturated adsorption of glycine. In addition, $CeO_2$-based CMP slurry containing glycine was manufactured and then applied to planarize$SiO_2$and$Si_3N_4$thin film. Owing to the passivation by glycine, the removal rates, Rh, were decreased, however, the selectivities, RE(SiO$_2$)/RR($Si_3N_4$), increased and showed maximum at pH=12. The suppressed oxidation and dissolution by adsorbate were correlated with the dissociation behavior of glycine at different pH and subsequent chemical adsorption.

A Study on the Development of Porcelain Bonded Ni-Cr Dental Alloy (도재소부용 Ni-Cr 보철합금 개발에 관한 연구)

  • Lee, Gyu-Hwan;Sin, Myeong-Cheol;Choe, Bu-Byeong
    • Journal of Biomedical Engineering Research
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    • v.6 no.1
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    • pp.37-46
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    • 1985
  • Development of a dental Ni-Cr alloy system for porcelain veneering crown and bridge was studied in this research. The principles of alloy design were a) It should not contain toxic beryllium. b) It should have low melting Point. c) It should be easily ground and polished. d) It should possess an adequate strength to resist the deformational force In the mouth. e) It should be bondable Ivith porcelain by chemically. After investigating the effect of minor elements such as boron and rare earth metals on the mechanical properties of the Ni-Cr alloy system, the compromised ideal composition for dental use was determined. The composition was l9.6%, Cr, 5.6% Mo, 3.4% Si, 1, 0% Fe, 0.01% Ti, 0.5-1.0% B, 0.2-0.6% misch metal, balance Ni. To compare the performance of experimental alloy with commercially available alloys, the properties such as strength, melting point, and bond strength were measured. The results Ivere as follows: a) Boron increases the strength of the alloy but reduces the elongation. b) Misch metal increases the strength when the boron content is low, but does not increase the strength when boron content is high. And it reduces the elongation drastically, c) Mechanical strength of the experimental alloy was not superior to commercially available Be containing alloy, but handling performance such as castability, ease of granting and polishing, and cuttability were superior to the Be containing alloy.

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Fabrication of a Multidirectional Side-firing Optical Fiber Tip and Its Numerical Analysis (다방향 조사가 가능한 광섬유 팁 해석 및 제작)

  • Jung, Deok;Sohn, Ik-Bu;Noh, Young-Chul;Kim, Jin-Hyeok;Kim, Changhwan;Lee, Ho
    • Korean Journal of Optics and Photonics
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    • v.25 no.4
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    • pp.200-206
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    • 2014
  • In this paper, using the value theoretically calculated to emit multidirectionally a beam coming into an optical fiber with diameter of $125{\mu}m$, we modeled and produced a cone-shaped structure at the distal end of the fiber. A numerical simulation was performed for an optical fiber tip in which all incident beams were totally reflected and emitted toward the side, as well as for an optical fiber tip from which the beams could be emitted forward and sideways simultaneously. We produced multidirectional-firing optical fiber tips based on the simulation result and model. Laser fabrication of the optical fiber was done by processing a cone-shaped structure at the distal end of an optical fiber with diameter of $125{\mu}m$ using a femtosecond pulsed laser and polishing the processed surface with a $CO_2$ laser. We also conducted an analysis to compare experimental and simulation results.

A Study on Water Contact Angle and Peel Strength by Anti- Adhesion Coating on Die Blade Materials for Adhesive Film Cutting (점착필름 절단용 다이 칼날 소재에 적용된 점착 방지 코팅의 물 접촉각 및 박리강도에 관한 연구)

  • Yujin Ha;Min-Wook Kim;Wook-Bae Kim
    • Tribology and Lubricants
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    • v.39 no.5
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    • pp.190-196
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    • 2023
  • Anti-adhesion coatings are very important in the processing of adhesive materials such as optical clear adhesive (OCA) films. Choosing the appropriate release coating material for dies and tools can be quite challenging. Hydrophobic surface treatment is usually performed, and its performance is often estimated by the static water contact angle (CA). However, the relationship between the release performance and the CA is not well understood. In this study, the water CAs of surfaces coated with anti-adhesion materials and the peel strengths of the acrylic-based adhesive films are evaluated. STC5 and SUS304 are selected as the base materials. Base materials with different surface roughnesses are produced by hairline finishing, mirror-polishing, and end milling. Four fluoropolymer compounds, including a self-assembled monolayer, are selected to make the base surface hydrophobic. Static, advancing, and receding CAs are mostly increased due to the coating, but the CA hysteresis is found to increase or decrease depending on the coating material. The peel strengths all decreased after coating and are largely dependent on the coating material, with significantly lower values observed for fluorosilane and perfluoropolyether silane coatings. The peel strength is observed to correlate better with the static CA and advancing CA than with the receding CA or hysteresis. However, it is not possible to accurately predict the anti-adhesion performance based on water CA alone, as the peel strengths are not fully proportional to the CAs.