• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.06a
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• pp.56-56
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• 2009

반도체 device가 점점 고집적화, 다층화 되면서 막질의 평탄화를 위한 CMP (chemical mechanical planarization) 공정은 반도체 제작 공정에서 필수 요건이 되었다. 특히 pad conditioning은 CMP 공정 중, 막질의 제거율과 균일도를 유지시키기 위한 중요한 공정이다. 하지만, conditioner를 장시간 사용할 경우 slurry residue와 같은 잔류 오염물질들이 conditioner의 표면의 오염을 유발할 수 있고 이로 인해 conditioner의 수명이 단축되거나 웨이퍼 표면에 결함을 유발할 수도 있다. 본 연구에서는 이를 방지하기 위해 vapor SAM을 이용하여 Ni conditioner 표면에 소수성 박막을 증착하여 오염여부를 평가해 보았다. 먼저, Ni wafer를 이용하여 증착 온도와 압력에 따라 소수성 박막을 증착하여 표면특성을 평가해 보았다. 증착전과 후에 Ni wafer 표면의 접촉각은 contact angle analyzer (Phoenix 400, SEO, Korea)를 이용하여 측정하였다. 박막 표면 형상과 거칠기는 AFM (XE-100, PSIA, Korea)를 이용하여 평가되었고 묘면 성분 분석을 위해 FT-IR (Nicolet 6700, Thermo Scientific, USA)이 사용되었다. SEM (S-4800, Hitach, Japan)은 박막 증착 전과 후의 conditioner를 이용하여 실제 conditioning후 conditioner 표면의 particle 오염정도를 관찰하기 위해 사용되었다. 또한, conditioner 표면에 실제 오염되어있는 particle 개수를 평가하기 위해 particle size analyzer (Accusizer 780A, Particle Sizing Systems Co., USA)을 사용하였다. 본 실험을 통해 최적 증착 조건을 확립하였으며 실제 conditioner 표면에 소수성 박막을 증착 후 $100^{\circ}$ 이상의 높은 contact angle을 확인할 수 있었다. 또한, 소수성 박막이 증착된 conditioner의 경우 실제 conditioning후 표면 particle 오염이 현저히 감소되었음을 확인할 수 있었다.

• Journal of Korean Society of Environmental Engineers
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• v.31 no.9
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• pp.743-748
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• 2009

Chemical sludge conditioning is widely used to improve the dewatering efficiency. It is treated with commonly used conditioners, and then thickened and dewatered with a mechanical device. This paper aims to examine the flotation and thickening efficiencies of sewage sludge for conditioning conditions, such as unaerobic storage time, kinds of coagulant and dosages, and flotation conditions, such as sludge concentration and A/S ratio, using an dissolved air flotation apparatus. Experimental results showed that the specific surface area and specific resistance to filtration (SRF) were significantly increased and the flotation and thickening efficiencies were decreased with anaerobic storage time. However, the flotation and thickening efficiencies faintly decreased in sewage sludges conditioned as $Al_2(SO_4)_3$, $Fe_2(SO_4)_3$, and PSO-M. Flotation and thickening efficiencies in conditioned sewage sludge could be sustained up to 96% at A/S ratio of 0.01 mL/mg or over.

• Journal of the Korean Society for Nondestructive Testing
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• v.19 no.4
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• pp.277-287
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• 1999

Quasi-static tests such as monotonic tension and loading/unloading tension were performed to investigate the bond characteristics and the failure processes for the T-joint specimens made from fiber/epoxy composite material. Two types of specimens, each consists of two components, e. g. skin and frame. were manufactured by co-curing and secondary bonding. During the monotonic tension test, AE instrument was used to predict AE signal at the initial and middle stage of the damage propagation. The damage initiation and progression were monitored optically using m (Charge Coupled Device) camera. And the internal crack front profile was examined using ultrasonic C-scan. The results indicate that the loads representing the abrupt increase of the AE signal are within the error range of 5 percent comparing to the loads shown in the load-time curve. Also it is shown that the initiation of crack occurred in the noodle region for both co-cured and secondarily bonded specimen. The final failure occurred in the noodle region for the co-cured specimen. but at the skin/frame termination point for the secondarily bonded specimen. Based on the results, it was found that two kinds of specimen show different failure modes depending on the manufacturing methods.

• Journal of Biomedical Engineering Research
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• v.22 no.5
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• pp.419-424
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• 2001

We intended to evaluate the Young's modulus of trabecular bone of a human distal femur by spherical Indentation test and CT images and to quantify relationships between the direction of load, density. and Young's modulus. The specimens were scanned at 1 mm intervals on CT scanner After scanning the bones were sectioned with diamond saw. producing 8mm cubes of trabecular bone. The tubes were mechanically tested in inferior-superior(IS), anterior-posterior(AP). and medial-lateral(ML) direction with custom-made device. After testing, the real apparent density of specimens were measured. The results of this study showed that the IS modulus was significant1y greater than both the AP and ML modulus and the AP modulus was also greater than ML modulus significantly(p〈0.01) A significant Power relationship between the apparent density and the modulus was also found.

• Transactions of the Korean Society of Automotive Engineers
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• v.20 no.1
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• pp.95-105
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• 2012

The selective catalytic reduction (SCR) system is a highly-effective aftertreatment device for NOx reduction of diesel engines. Generally, the ammonia ($NH_3$) was generated from reaction mechanism of SCR in the SCR system using the liquid urea as the reluctant. Therefore, the precise urea dosing control is a very important key for NOx and $NH_3$ slip reduction in the SCR system. This paper investigated NOx and $NH_3$ emission characteristics of urea-SCR dosing system based on model-based control algorithm in order to reduce NOx. In the map-based control algorithm, target amount of urea solution was determined by mass flow rate of exhaust gas obtained from engine rpm, torque and $O_2$ for feed-back control NOx concentration should be measured by NOx sensor. Moreover, this algorithm can not estimate $NH_3$ absorbed on the catalyst. Hence, the urea injection can be too rich or too lean. In this study, the model-based control algorithm was developed and evaluated on the numerical model describing physical and chemical phenomena in SCR system. One channel thermo-fluid model coupled with finely tuned chemical reaction model was applied to this control algorithm. The vehicle test was carried out by using map-based and model-based control algorithms in the NEDC mode in order to evaluate the performance of the model based control algorithm.

• Transactions of the Korean Society of Automotive Engineers
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• v.17 no.5
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• pp.97-106
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• 2009

An objective of this study is to give practical information that could be used for calculating pollutant emission factors and fuel economy from Korean Inspection & Maintenance program, which has been using steady state acceleration simulation mode. Concentration results from I/M test is adequately converted to mass emission factors and fuel efficiency data, which have unit of g/km and km/L, respectively. Exhaust volume flow(EVF), which is for converting emission result from concentration to mass, is measured by tracer method in various vehicle speed - power condition. It is found that there is an apparent second order relationship between EVF and vehicle inertia weight. EVF is expressed in function of vehicle inertia weight in order to estimate EVF in I/M site without measuring device. Converted mass emission results from measured EVF and raw emission analyzer show a satisfactory agreement with those from conventional CVS-bag type measurement system. Mass emission factors and fuel efficiency from measured EVF and estimated EVF also show good agreement to each other. Considering that an I/M program has great advantages to recruit-based emission test in terms of the number of test vehicle, the information in this study can be used for developing an alternative procedure to collect more various data to establish national database of mobile emission factors and fuel economy, even though the driving cycle in I/M program is steady state cycle rather than transient cycle.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.181-181
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• 2016

Hydrogenated microcrystalline silicon (${\mu}c-Si:H$) films have attracted much attention as materials of the bottom-cells in Si thin film tandem photovoltaics due to their low bandgap and excellent stability against light soaking. However, in PECVD, the source gas $SiH_4$ must be highly diluted by $H_2$, which eventually results in low deposition rate. Moreover, it is known that high-rate ${\mu}c-Si:H$ growth is usually accompanied by a large number of dangling-bond (DB) defects in the resulting films, which act as recombination centers for photoexcited carriers, leading to a deterioration in the device performance. During film deposition, Si nanoparticles generated in $SiH_4$ discharges can be incorporated into films, and such incorporation may have effects on film properties depending on the size, structure, and volume fraction of nanoparticles incorporated into films. Here we report experimental results on the effects of nonoparticles incorporation at the different substrate temperature studied using a multi-hollow discharge plasma CVD method in which such incorporation can be significantly suppressed in upstream region by setting the gas flow velocity high enough to drive nanoparticles toward the downstream region. All experiments were performed with the multi-hollow discharge plasma CVD reactor at RT, 100, and $250^{\circ}C$, respectively. The gas flow rate ratio of $SiH_4$ to $H_2$ was 0.997. The total gas pressure P was kept at 2 Torr. The discharge frequency and power were 60 MHz, 180 W, respectively. Crystallinity Xc of resulting films was evaluated using Raman spectra. The defect densities of the films were measured with electron spin resonance (ESR). The defect density of fims deposited in the downstream region (with nonoparticles) is higher defect density than that in the upstream region (without nanoparticles) at low substrate temperature of RT and $100^{\circ}C$. This result indicates that nanoparticle incorporation can change considerably their film properties depending on the substrate temperature.

• Korean Journal of Materials Research
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• v.20 no.11
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• pp.600-605
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• 2010

In order to meet the requirements of faster speed and higher packing density for devices in the field of semiconductor manufacturing, the development of Cu/Low k device material is explored for use in multi-layer interconnection. SiOC(-H) thin films containing alkylgroup are considered the most promising among all the other low k candidate materials for Cu interconnection, which materials are intended to replace conventional Al wiring. Their promising character is due to their thermal and mechanical properties, which are superior to those of organic materials such as porous $SiO_2$, SiOF, polyimides, and poly (arylene ether). SiOC(-H) thin films containing alkylgroup are generally prepared by PECVD method using trimethoxysilane as precursor. Nano voids in the film originating from the sterichindrance of alkylgroup lower the dielectric constant of the film. In this study, methyltriphenylsilane containing bulky substitute was prepared and characterized by using NMR, single-crystal X-ray, GC-MS, GPC, FT-IR and TGA analyses. Solid-state NMR is utilized to investigate the insoluble samples and the chemical shift of $^{29}Si$. X-ray single crystal results confirm that methyltriphenylsilane is composed of one Si molecule, three phenyl rings and one methyl molecule. When methyltriphenylsilane decomposes, it produces radicals such as phenyl, diphenyl, phenylsilane, diphenylsilane, triphenylsilane, etc. From the analytical data, methyltriphenylsilane was found to be very efficient as a CVD or PECVD precursor.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.11 no.10
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• pp.3859-3865
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• 2010

Modeling a virtual reader and tags, the emulator system is realized by using a commercial signal generation device to make signal, a data collection equipment, and DSP board. By using a Virtual UHF RFID (860 ~ 960 [MHz]) reader/tags module, a developed RFID reader, protocol of tag, and properties of RF support to provide the way how to verify the suitability to international standards (ISO 18000-6 Type C, EPCglobal C1G2). In this paper, to implement a proposed model reader and tag model, Visual DSP is applied by using DSP board, composing the system's signal generators, signal analyzers and performance verification, the target readers or tags, RFID emulator control computesr and control programs.

• Journal of the Korean Association of Oral and Maxillofacial Surgeons
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• v.30 no.5
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• pp.391-399
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• 2004

Distraction osteogenesis has been thought to be promising technique for replacing bone graft in maxilla and mandible. The purpose of this study was to investigate the expression of osteonectin on distraction osteogenesis. Sixteen rabbits were used for this experiment. Osteotomy was performed between premolar and mental foramen. On the experimental group, distraction device was connected to the respective bone segments. On the control group, bone segments were fixed using plate and screws after osteotomy. Distraction was carried out at the rate of 0.7mm per day to obtain a 4.9mm elongation on the experimental group. After 3 days, 7 days, 14 days, and 28 days two rabbits of each group were sacrificed. The results obtained from this study were as follow : Experimental group was observed that the gaps between the distracted bone edges were occupied by new bone. Expression of Osteonectin were detected throughout the experiment in both groups and Expression of Osteonectin were markedly increased during distraction and consolidation period in experimental group than control group. From these results, it could be stated that distraction was shown to improve and accelerate bone formation and mechanical stress like distraction has considerable effects on osteonectin.