Synthesis and Characterization of Methyltriphenylsilane for SiOC(-H) Thin Film
![]() ![]() |
Han, Doug-Young
(Seoul Center, Korea Basic Science Institute)
Park Klepeis, Jae-Hyun (Advanced Light Source, UC Berkeley) Lee, Yoon-Joo (Energy Materials Center, Korea Institute of Ceramic Engineering and Technology (KICET)) Lee, Jung-Hyun (Energy Materials Center, Korea Institute of Ceramic Engineering and Technology (KICET)) Kim, Soo-Ryong (Energy Materials Center, Korea Institute of Ceramic Engineering and Technology (KICET)) Kim, Young-Hee (Energy Materials Center, Korea Institute of Ceramic Engineering and Technology (KICET)) |
1 | C. S. Yang and C. K. Choi, Sae Mulli, The Korean Physical Society, 51, 1 (2005) (in Korean). |
2 | H. W. Rhee and S. K. Min, Polymer Science and Technology, 16(1), 29 (2005) (in Korean). ISSN : 1225-0260. |
3 | Q. M. Wang, US Patent 6,649,540. |
4 | S. K. Kwak, K. H. Jeong and S. W. Rhee, J. Electrochem. Soc., 151(2), F11 (2004). DOI ScienceOn |
5 | A. S. Jung, R. Navamathavan, K. M. Lee and C. K. Choi, Surf. Coating. Tech., 202, 5693 (2008). DOI ScienceOn |
6 | Y. J. Lee, J. H. Lee, S. R. Kim, W. T. Kwon, H. Oh, J. P. Klepeis, S. J. Teat and Y. H. Kim, J. Mater. Sci., 45, 1025 (2010). DOI ScienceOn |
7 | T. Kaneko, Y. Hosokawa, T. Suga and N. Miyakawa, Microelectronic Engineering, 83, 41 (2006). DOI ScienceOn |
8 | D. H. Shin, J. H. Kim, D. S. Lim and C. B. Kim, Kor. J. Mater. Res. 19(2), 90 (2009) (in Korean) DOI ScienceOn |
9 | T. Kuckmann, H. W. Lerner and M. Bolte, Acta Crystallogr. E, E61, o3030 (2005). |
![]() |