A Study on Improvement of Etching Characteristics by Spray Characteristics Analysis with Nozzle Geometries in Wet Etching Process (습식 에칭공정에서 노즐 형상에 따른 분무특성 분석을 통한 에칭특성의 향상에 관한 연구)
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- Transactions of the Korean Society of Mechanical Engineers B
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- v.28 no.7
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- pp.842-849
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- 2004