• Proceedings of the KSME Conference
• /
• 2008.11a
• /
• pp.1842-1846
• /
• 2008

This work reports development of novel liquid-level sensors based on the $3{\omega}$ method. The sensors determine the liquid level by measuring the thermal response as in the conventional hot-wire technique. However the sensors employ an AC heating method to enhance the sensitivity, noise resistance and time response. Also, the microfabricated thin-film structure of the sensor provides mass-producibility as well as improved sensor performance owing to the increase in the surface-volume ratio of the sensor. Two different types of the sensor are developed: one for point detection of the fluid phase and the other for monitoring continuous variation of liquid level. Notable is that the performance of the sensor is not considerably affected by the liquid flow.

• Journal of the Semiconductor & Display Technology
• /
• v.20 no.3
• /
• pp.27-31
• /
• 2021

VI probe, which is one of various in-situ plasma monitoring sensor, is frequently used for in-situ process monitoring in mass production environment. In this paper, we correlated the plasma etch results with VI probe data with the small amount of gas flow rate changes to propose usefulness of the VI probe in real-time process monitoring. Several different sized contact holes were employed for the etch experiment, and the etched profiles were measured by scanning electron microscope (SEM). Although the shape of etched hole did not show satisfactory relationship with VI probe data, the chamber status changed along the incremental/decremental modification of the amount of gas flow was successfully observed in terms of impedance monitoring.

• Transactions of the Korean Society of Automotive Engineers
• /
• v.11 no.2
• /
• pp.40-47
• /
• 2003

This paper presents a new evaporative system monitoring method using a virtual HC sensor for an automotive on-board diagnosis. A development was made at providing mathematical expressions from the lambda control information to estimate the HC mass flow purged into the intake manifold from the canister for implementing a virtual HC sensor. The change of the lambda averagevalue reflected the influence of the additional fuel from purging results the sensor estimation of the purged HC amount. Based on this virtual HC sensor, a new evaporative system monitoring method was proposed comparing the amount of purged HC amount with the amount of the HC gas evaporated from the fuel tank and absorbed into the canister. Finally, the method was validated with a simulation using the data logged from the retail car.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
• /
• v.20 no.7
• /
• pp.508-516
• /
• 2008

Fault detection and diagnosis(FDD) system is beneficial in equipment management by providing the operator with tools which can help find out a failure of the system. An experimental study has been performed on fault detection and diagnosis method for a water chiller. Bayes classifier, which is one of classical pattern classifiers, is adopted in deciding whether fault occurred or not. Failure modes in this study include refrigerant leakage, decrease in mass flow rate of the chilled water and cooling water, and sensor error of the cooling water inlet temperature. It is possible to detect and diagnose faults in this study by adopting FDD algorithm using only four parameters(compressor outlet temperature, chilled water inlet temperature, cooling water outlet temperature and compressor power consumption). Refrigerant leakage failure is detected at 20% of refrigerant leakage. When mass flow rate of the chilled and cooling water decrease more than 8% or 12%, FDD algorithm can detect the faults. The deviation of temperature sensor over $0.6^{\circ}C$ can be detected as fault.

• Journal of the Korean Society of Propulsion Engineers
• /
• v.22 no.3
• /
• pp.14-20
• /
• 2018

An estimation law of air mass flow rate for high speed engine control is presented. The variables of mass estimation equations are modified to measurable variables which can be obtained during flight, and the effectiveness of each variable to the estimation accuracy is evaluated. The equation is modified to a simplified form, and the uncertainty is evaluated. In addition, reference data for the selection of estimation methods is suggested by considering the sensitivity analysis of sensor error.

• Journal of Mechanical Science and Technology
• /
• v.15 no.3
• /
• pp.291-299
• /
• 2001

Recently, severe wear on the shutdown rod cladding of Ulchin Nuclear Power Plant #1, #2 were observed by the Eddy Current Test(E.C.T.). In particular, the wear at the sixth card location was up to 75%. The test results indicated that the Flow Induced Vibration(F.I.V.) might be the cause of the fretting wear resulting from the contact between Rod Cluster Control Assemblies(RCCAs) and their spacing cards(guide plates) arranged in the guide tube. From reviewing RCCAs fretting wear repots and analyzing the general characteristics of F.I.V. mechanism in the reactor, geometric layout and flow conditions around the control rod, it is concluded that the turbulence excitation is the most probable vibration mechanism of RCCA. To identify the governing mechanism of RCCA vibration, an experiment was performed for a representative rod position in which the most serious fretting wear experienced among the six rod positions. The experimental rig was designed and set up to satisfy the governing nondimensional numbers which are Reynolds number and mass damping parameter. The vibration amplitude measurement by the non-contact laser displacement sensor showed good agreements in the frequency and the maximum wearing(vibration) location with Ulchin E.C.T. results and Framatome report, respectively. The sudden increase in the vibration amplitude was sensed around the 6th guide plate with mass flow rate variation. Comparing the similitude rod behaviour with the idealized response of a cylinder in flow induced vibration, it was found that he dominant mechanism of vibration was transferred from turbulence excitation to periodic shedding at the mass flow ate 90ι/min. Also the critical velocity of the vibration in RCCAs was determined and the vibration can be prevented by reducing the bypass flow rate below the critical velocity.

• 제어로봇시스템학회:학술대회논문집
• /
• 2003.10a
• /
• pp.1295-1299
• /
• 2003

The Mass Flow Controller(MFC) has become crucial in semiconductor manufacturing equipments. It is an important element because the quality and the yield of a semiconductor process are decided by the accurate flow control of gas. Therefore, the demand for the high speed and the highly accurate control of MFCs has been requested. It is hard to find an article of the control algorithm applied to MFCs. But, it is known that commercially available MFCs have PID control algorithms. Particularly, when the system detects the flow by way of heat transfer, MFC control problem contains the time delay and the nonlinearity. In this presentation, MFC control algorithm with the superior performance to the conventional PID algorithm is discussed and the superiority is demonstrated through the experiment. Fuzzy controller was utilized in order to compensate the nonlinearity and the time delay, and the performance is compared with that of a product currently available in the market. The control system, in this presentation, consists of a personal computer, the data acquisition board and the control algorithm carried out by LabWindows/CVI program on the PC. In addition, the method of estimating an actual flow from sensor output containing the time delay and the nonlinearity is presented. In conclusion, according to the result of the experiment, the proposed algorithm shows better accuracy and is faster than the conventional controller.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.6 no.5
• /
• pp.373-377
• /
• 2005

In this paper the gas leakage controller in processing chamber for semiconductor manufacturing is proposed. A pressure sensor is connected between the final valve and the numeric valve. A pressure sensor signal and a numeric valve signal are controlled by a proposed digital circuit module. Gas leakage condition, producing by 2nd plasticity in semiconductor process, display at LED. The proposed controller module is useful for monitoring the gas flow for preventing the critical process gas leakage.

• Journal of the Korea Academia-Industrial cooperation Society
• /
• v.18 no.6
• /
• pp.692-696
• /
• 2017

The shape of press components is becoming increasingly complex due to customer demands, process shortening and cost savings. In addition, the stability of the pressing process frequently varies during mass production due to the influence of many factors. In order to ensure the process stability, it is necessary to establish a process in which reproducibility is realized in tolerance, which is sufficient for advance study of shape, material, press, mold and lubrication. However, unforeseen changes in process parameters cause disruptions in production line shutdowns and production planning. In this paper, we introduce a method to monitor a real time process by applying a sensor to a press mold. A non-contact type sensor for measuring the flow of a sheet material and an example of an experiment using the optical sensor which is highly applicable to mass production are presented. An optical sensor was installed in a cylindrical drawing mold to test its potential application while changing the material, blank holder force, and drawing ratio. We also quantitatively determined that the flow of other sheet materials was quantified locally using a square drawing die and that the measured value was always smaller than the drawing depth due to the material elongation. Finally, we propose a field that can be used by attaching the sensor to the press mold. We hope that the consequent cost reduction will contribute to increasing global mold competitiveness.

• Journal of Power System Engineering
• /
• v.12 no.1
• /
• pp.72-79
• /
• 2008

This paper designs a looper-tension controller for mass-flow stabilization in hot strip finishing mills. By Newton's 2nd law and Hooke's law, nonlinear dynamic equations on the looper-tension system are firstly derived, and linearized by a linearization algorithm using a Taylor's series expansion. Moreover, a tension calculation model is obtained from the nonlinear dynamic equations which is called as a soft sensor of strip tension between two neighboring stands. Next, a looper-tension servo controller is designed by an ILQ(Inverse Linear Quadratic optimal control) algorithm, and it is combined with a minimal disturbance observer which to attenuate speed disturbances by AGC and operator interventions, etc.. Finally, it is shown from by a computer simulation that the proposed ILQ controller with a disturbance observer is very effective in stabilizing the strip mass-flow under some disturbances, moreover it has a good command following performance.