• Journal of the Korean Vacuum Society
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• v.6 no.4
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• pp.308-313
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• 1997

TDS (Thermal Lkso~ption Spectroscopy)system, for diagnosis of CRT manufacturing process, was designed and constructed. Outgassings and themla1 desorptions from the part or materials of CRT can be measured and analysed with this system at various temperatures. The system is consisted of 3 pirrts. vacuum chamher and pumping system with variable conductance, sample heating stages & their controller, and outgassing measurement devices, like as ion gauge or quadrupole mass spectrometer. The ultimate pressure of the system was under $1\times10^{-7}$ Pa. With the variable conductance system, the effective pumping speed of the chamber could he controlled from sub 11s to 100 11s. The effective pumping speed values were determined by dynamic flow measurement principle. The temperatures and ramp rate of sample were controlled by tungsten heater and PID controller up to $600^{\circ}C$ within t $\pm 1^{\circ}C$$difference to setting value. Ion gauge & QMS were calibrated for quantitative measurements. Some examples of TDS measurement data ;ind application on the CRT process analysis were shown.

• Korean Journal of Air-Conditioning and Refrigeration Engineering
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• v.26 no.12
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• pp.579-587
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• 2014

This paper deals with precise analytical state equation modeling of a variable speed refrigeration system (VSRS) for optimum control in state space. The VSRS is described as multi-input and multi-output (MIMO) system, which has two controlled variables and two control inputs. First, the Navier-Stokes equation and mass flow rate were applied to each component of the basic refrigeration cycle to build a dynamic model. The dynamic model, represented by a differential equation, was transformed into the state equation formula. Next, a full-order state observer was built to estimate all of the state variables to compose an optimum control system. Then, an optimum controller was designed to minimize an evaluation function that has input energy and control error. Finally, simulations and experiments were conducted to verify the validity of the proposed modeling and designed optimum controller to regulate target temperature and superheat in a 1RT oil cooler system. The results show that the proposed method, state equation modeling and optimum control, is efficient to ensure optimal control performance of the VSRS.

• Journal of Mechanical Science and Technology
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• v.18 no.7
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• pp.1062-1073
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• 2004

We describe a looper controller design for a hot strip finishing mill in steel plants. The main function of the looper system is to balance the mass flow of the strip by accumulating material in the middle of the stands. Another function is to control the strip tension which influences the width of the strip. To ensure strip quality, it is very important to control the tension of the hot strip finishing mill. However, because there is a mutual interaction between the looper angle and the strip tension, it is difficult to control the looper system. Previous researches examined only the operation of a single stand. But it is not sufficient to examine the operation and effect of whole stands because the operation is wholly interdependent. In this paper, we present a full model of the hot strip finishing mill in order to more effectively control strip tension. We propose several control methods for the full-stand hot strip finishing mill, denoted as conventional PI, PI with cross gain, and coefficient diagram method (CDM) PID control. In the real plants, there are some problems by using higher order controllers such as LQ, LQG and H$\_$$\infty$/. By comparison, the PID controller is very simple and easy to apply to all real plants. To that end, we present our findings on PID controls and their potential use in the hot strip finishing mill.

• Journal of Advanced Marine Engineering and Technology
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• v.28 no.3
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• pp.475-481
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• 2004

Recently it is strongly required on lower fuel consumption. lower exhaust emission, higher engine performance. and social demands in a spark ignition gasoline engine. In this study. the experimental engine used at test. it has been modified the lean burn gasoline engine. and used the programmable engine management system, and connected the controller circuit which is designed for the engine control. At the parametric study of the engine experiment, it has been controlled with fuel injection, ignition timing. swirl mode, equivalence ratio engine dynamometer load and speed as the important factors governing the engine performance adaptively. It has been found the combustion characteristics to overcome the hysteresis phenomena between normal and lean air-fuel mixing ranges. by mean of the look-up table set up the mapping values. at the optimum conditions during the engine operation. As the result, it is found that the strength of the swirl flow with the variation of engine speed and load is effective on combustion characteristics to reduce the bandwidth of the hysteresis regions. The results show that mass fraction burned and heat release rate pattern with crank angle are reduced much rather, and brake specific fuel consumption is also reduced simultaneously.

• JSTS:Journal of Semiconductor Technology and Science
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• v.13 no.4
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• pp.395-401
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• 2013

In-situ optical emission spectroscopy (OES) is employed for leak detection in plasma etching system. A misprocessing is reported for significantly reduced silicon etch rate with chlorine gas, and OES is used as a supplementary sensor to analyze the gas phase species that reside in the process chamber. Potential cause of misprocessing reaches to chamber O-ring wear out, MFC leaks, and/or leak at gas delivery line, and experiments are performed to funnel down the potential of the cause. While monitoring the plasma chemistry of the process chamber using OES, the emission trace for nitrogen species is observed at the chlorine gas supply. No trace of nitrogen species is found in other than chlorine gas supply, and we found that the amount of chlorine gas is slightly fluctuating. We successfully found the root cause of the reported misprocessing which may jeopardize the quality of thin film processing. Based on a quantitative analysis of the amount of nitrogen observed in the chamber, we conclude that the source of the leak is the fitting of the chlorine mass flow controller with the amount of around 2-5 sccm.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.24 no.12
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• pp.1608-1614
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• 2000

For the purpose of obtaining fundamental data which is needed to develope combustion system of LPG engine, we made constant volume chamber and analyzed flame propagation characteristics under different intial temperature, initial pressure and equivalence ratio which affect combustion of LPG. We investigated flame propagation speed of each fuel using laser deflection method and compared with the investigated flame propagation speed of each fuel using laser deflection method and compared with the results of image processing of flame. As a result, the maximum flame propagation speed was found at equivalence ratio 1.0 and 1.1 for LPG and gasoline, respectively. In the lean region, we can see that flame propagation speed of LPG surpasses that of gasoline. On the contrary, flame propagation speed of gasoline surpasses LPG in the rich region. As initial temperature and initial pressure were higher, flame propagation speed was faster. And, as equivalence ratio was larger and initial temperature was higher, combustion duration was shorter and maximum combustion pressure was higher.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.309-309
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• 2012

Heteroepitaxial growth remains as one of the continuously growing interests, because the heterogeneous crystallization on different substrates is a common feature in the fabrication processes of many semiconductor materials and devices, such as molecular beam epitaxy, pulsed laser deposition, sputtering, chemical bath deposition, chemical vapor deposition, hydrothermal synthesis, vapor phase transport and so on [1,2]. By using the R.F. sputtering system, ZnO thin films were deposited on graphene 4 and 6 mono layers, which is grown on 400 nm and 600 nm $SiO_2$ substrates, respectively. The ZnO thin layer was deposited at various temperatures by using a ZnO target. In this experimental, the working power and pressure were $3{\times}10^{-3}$ Torr and 50 W, respectively. The base pressure of the chamber was kept at a pressure around $10^{-6}$ Torr by using a turbo molecular pump. The oxygen and argon gas flows were controlled around 5 and 10 sccm by using a mass flow controller system, respectively. The structural properties of the samples were analyzed by XRD measurement. The film surface and carrier concentration were analyzed by an atomic force microscope and Hall measurement system. The surface morphologies were observed using field emission scanning electron microscope (FE-SEM).

• International Journal of Air-Conditioning and Refrigeration
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• v.8 no.1
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• pp.14-28
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• 2000

The frequency response characteristics of a condenser were numerically studied for the control of refrigeration and air conditioning systems. The important parameters, such as the refrigerant flow rate, refrigerant temperature, air velocity, and air temperature at the condenser inlet, were analyzed. Superheated vapor, two phase, and subcooled liquid domain in condenser can be described by using the energy balance equation and the mass balance equation in refrigerant and tube wall, the basic equation for describing the dynamic characteristics of condenser can be derived. The transfer function for describing dynamic response of the condenser to disturbances can be obtained from using linearizations and Laplace transformations of the equation. From this transfer function, analytical investigation which affects the frequency responses of condenser has been made. Block diagrams were made based on the analytic transfer function; dynamic responses were evaluated in Bode diagrams on the frequency response. Through this study, it became possible that the information about the dynamic characteristics of air-cooled condenser is offered. The results may be used for determining the optimum design parameters in actual components and entire systems. Also, the mathematical models, frequency response may be used to help understanding, evaluate optimum design parameters, design control systems and determine on setting the best controller for the refrigeration and air-conditioning systems.

• Transactions on Electrical and Electronic Materials
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• v.1 no.2
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• pp.12-17
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• 2000

Helicon waves were excited by a Nagoya type III antenna in magnetized plasma, and hydrogen and methane are fed through a Mass Flow Controller(MFC). We made a diagnosis of properties of helicon plasma by H$_2$gaseous discharge, and fabricated the diamond thin film. The maximum measured electron density was 1${\times}$10$\^$10/ cm$\^$-3/. Diamond films have been growo on (100) silicon substrate using the helicon plasma chemical vapor deposition. Diamond films were deposited at a pressure of 0.1 Torr, deposition time of 40~80 h, a substrate temperature of 700$^{\circ}C$ and methane concentrations of 0.5~2.5%. The growth characteristics were investigated by means of X-ray Photoelectron (XPS) and X-ray Diffraction(XRD), XRD and XPS analysis revealed that SiC was formed, and finally diamond particles were definitely deposited on it. With increasing deposition time, the thickness and crystallization of the daimond thin film increased, For this system the optimum condition of methane concentration was estimated to near to 1.5%.

• Journal of the Korean Society for Aeronautical & Space Sciences
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• v.41 no.7
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• pp.539-546
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• 2013

Surge phenomenon can be occurred in a compressor when compressor performance of turbofan engine for an aircraft is changed considerably in a short time on the cases like take-off phase and changing of RPM from idle to maximum, because performance of aircraft engine is changed suddenly. This study is aimed to avoid surge in a compressor. Dynamic simulation in a compressor is modeled by simulink in specific condition. Fuel flow is control input, rpm and air mass flow are expressed in terms of transfer function. Surge margin is obtained by using compressor performance map from NPSS. VIGV(Variable Inlet Guide Vane) is controlled by PD controller with difference between surge margin and reference. Finally this paper verifies IGV can prevent surge phenomenon in a compressor.