• 한국진공학회:학술대회논문집
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• 한국진공학회 2014년도 제46회 동계 정기학술대회 초록집
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• pp.150.1-150.1
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• 2014

Showerhead is used as a main part in the semiconductor equipment. The face plate flatness should remain constant and the cleaning performance must be gained to keep the uniformity level of etching or deposition in chemical vapor deposition process. High operating temperature or long period of thermal loading could lead the showerhead to be deformed thermally. In some case, the thermal deformation appears very sensitive to showerhead performance. This paper describes the methods for robust design using computational fluid dynamics. To reveal the influence of the post distribution on flow pattern in the showerhead cavity, numerical simulation was performed for several post distributions. The flow structure appears similar to an impinging flow near a centered baffle in showerhead cavity. We took the structure as an index to estimate diffusion path. A robust design to reduce the thermal deformation of showerhead can be achieved using post number increase without ill effect on flow. To prevent the showerhead deformation by heat loading, its face plate thickness was determined additionally using numerical simulation. The face plate has thousands of impinging holes. The design key is to keep pressure drop distribution on the showerhead face plate with the holes. This study reads the methodology to apply to a showerhead hole design. A Hagen-Poiseuille equation gives the pressure drop in a fluid flowing through such hole. The assumptions of the equation are the fluid is viscous-incompressible and the flow is laminar fully developed in a through hole. An equation can be expressed with radius R and length L related to the volume flow rate Q from the Hagen-Poiseuille equation, $Q={\pi}R4{\Delta}p/8{\mu}L$, where ${\mu}$ is the viscosity and ${\Delta}p$ is the pressure drop. In present case, each hole has steps at both the inlet and the outlet, and the fluid appears compressible. So we simplify the equation as $Q=C(R,L){\Delta}p$. A series of performance curves for a through hole with geometric parameters were obtained using two-dimensional numerical simulation. We obtained a relation between the hole diameter and hole length from the test cases to determine hole diameter at fixed hole length. A numerical simulation has been performed as a tool for enhancing showerhead robust design from flow structure. Geometric parameters for the design were post distribution and face plate thickness. The reinforced showerhead has been installed and its effective deposition profile is being shown in factory.

• 한국산학기술학회논문지
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• 제19권9호
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• pp.69-76
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• 2018

본 연구에서는 가스터빈 블레이드의 필름 냉각에서 45도 리브가 있는 냉각채널의 필름 홀 위치가 블레이드의 표면냉각 성능에 미치는 영향을 전산유체해석 기법을 통하여 분석하였다. 또한 냉각채널의 리브 유무의 영향을 동일 분사율에 대해서 고찰하였다. 수치해석 도메인은 3차원으로 구성하였고 상용코드(Fluent ver. 17.0)를 사용하여 정상상태 조건 하에서 수치해석을 진행하였다. 그 결과를 바탕으로 블레이드 표면에서의 냉각효율, 유속, 유선, 압력 계수를 비교 분석하였고 홀 위치의 변화가 리브 구조에 의해 유발되는 이차 유동의 토출에 미치는 영향을 고찰하였다. 수치해석 결과로부터 리브가 설치되어 있는 경우 냉각채널의 내부유동은 상부에서 반시계 방향 및 하부에서 시계 방향의 와류쌍을 형성하는 것을 확인할 수 있었다. 리브가 있는 채널의 경우 리브에 의하여 발생한 와류유동이 홀 출구 부근에서 더 높은 압력 차이를 유발하여 리브가 없는 경우보다 최소 12% 이상의 높은 냉각 효율을 나타냈다. 또한 리브가 있는 채널 중에서 홀이 좌측에 위치한 경우(Rib-Left) 리브에 의하여 발생한 이차 유동이 홀 부근의 벽면에 부딪혀 홀 경사각 방향으로의 유동이 형성되는 것을 확인하였다. 블레이드 표면으로 토출된 냉각기체가 주 유동 경계층 내부에서 머무는 영역이 다른 케이스에 비하여 넓기 때문인 것으로 사료된다. 또한 이 경우 홀 출구 부근에서 가장 큰 압력 계수 차이를 나타내었고 이로 인하여 냉각기체의 토출이 촉진되어 냉각효율이 다소 증가하였다.

• 마이크로전자및패키징학회지
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• 제14권3호
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• pp.29-36
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• 2007

본 논문에서는 펨토초 레이저를 사용하여 정밀하고 효과적인 레이저 어블레이션 작업이 가능한지를 확인하기위한 수치 해석 및 가공 작업을 수행하였다. 이를 위하여 Si 재료 내부의 에너지 전달 메커니즘에 대한 수치해석을 실시하였으며, Si 웨이퍼에 각각 다른 조건으로 적용된 레이저 플루언스 값으로 $100\;{\mu}m$ 직경의 미세 관통 홀을 형성한 후, 광학현미경과 3차원 표면 형상 측정 장비를 사용하여 형성된 미세 관통 홀의 가공성과 열영향부의 발생 정도를 관찰하고 분석하였다. 실험 결과를 통해 레이저 플루언스 조건에 따른 열영향부의 발생 정도를 분석하였으며, 또한 최소한의 열영향부를 가지며 우수한 홀 가공성을 보이는 최적의 미세 관통 홀 가공 조건을 도출하였다.

• 소성∙가공
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• 제24권1호
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• pp.37-43
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• 2015

The purpose of the current study is to improve the clinching joint strength of aluminum and fiber metal laminates (FMLs) comprised of three layers. The joining of FML and Al 5052 by a conventional clinching joint has some disadvantages such as necking of the upper sheet, lack of interlocking, defects caused by the vertical load, and especially loss of strength of the composite material due to the low ductility. In the current study, a tapered-hole clinching method is proposed as an alternative for the joining of Al 5052 and FMLs. A hole with a tapered shape is formed before the joining process. The design parameters were evaluated using the Taguchi method for the geometry of the tapered hole in order to determine the maximum separation load. The diameter of the punch corner, clearance, punch stroke and the tapered length were used as the main variables in the Taguchi method. In conclusion, the contribution ratio for each of the fours variable examined was 35.07%, 22.44%, 21.32% and 14.11%, respectively. In addition, the appropriate combination of the design parameters can make a 5% improvement in the vertical direction joint strength.

• 한국분무공학회지
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• 제5권3호
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• pp.17-26
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• 2000

The main parameter commonly used to evaluate spray distribution is spray angle. Spray angle is important because it influences the axial and radial distribution of the fuel. Spray angles were measured and compared for the two non-air assisted injectors such as 2hole-2stream 4hole-1stream injectors used for port fuel injection gasoline engines with n-heptane as a fuel by three different measuring techniques, i.e., digital image processing, shadowgraphy, and spray patternator, respectively. Fuel was injected with the injection pressures of 0.2-0.35 MPa into the room temperature and atmospheric pressure environment. In digital image processing approach, the selection of the transmittance level is critical to obtain the edge of spray and hence to measure the spray angle. From the measurement results by the shadowgraphy technique, it is dear that the spray angle is varied during the spray injection period. The measurement results from spray patternator show that the different spray angles exist in different region. Spray angle increases with the increase in the injection pressure. it is suggested that the spray angle and stream separated angle should be specified when spray is characterized for 2hole-2stream injector, because spray angle is much different though stream separated angle is same. It was also considerably affected by the measurement techniques introduced in this experimental work. However, the optimal axial distance for measuring the spray angle seems to be at least 60-80 mm from the injector tip for two non-air assisted injectors.

• Journal of Mechanical Science and Technology
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• 제18권9호
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• pp.1623-1629
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• 2004

The objective of this study is the rapid bulk combustion of mixture in a constant volume chamber with a tiny sub-chamber. Some narrow passage holes were arranged to induce simultaneous multi-point ignition in the main chamber by jet of burned and unburned gases including radicals from the sub-chamber, and the equivalence ratios of pre-mixture in the main chamber and the sub-chamber were the same. The principal factors of the Radical Induced Auto-Ignition (RIAI) method are the diameter of the passage holes and the volume of sub-chamber. The relationship between the sub-chamber and diameter of passage hole was represented by the ratios of sub-chamber volume to passage hole volume. The ratios are non-dimensional coefficients for sub-chamber characteristics. As a result, the RIAI method reduced the combustion period, which expanded the lean limit in comparison with SI method.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.1749-1752
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• 2005

High speed machining has become the main issue of metal cutting. Due to increase of the rotational speed of the spindle, problems, such as the run-out errors, reduced stiffness, must be overcome to improve the machining accuracy. In order to solve the problems, it is important to determine the appropriate clamping unit and tooling system. This paper presents an investigation into an evaluation of contact interval which is the interface between spindle taper hole and tool holder shank of the spindle. Finite element analysis is performed by using a commercial code ANSYS according to variation of clamping forces and rotational speeds. This paper proposed fit tolerance in order to evaluate the effects of clamping force and rotational speed on the contact interval in the spindle interface. From the finite element results, it has been shown that the rotational speed rather than clamping force mostly influence on the variation of the contact interval.

• 한국정밀공학회지
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• 제22권3호
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• pp.15-20
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• 2005

This paper describes the PCB drilling using an ultra high-speed air bearing spindle system and micro drill. For this research, we have developed the ultra high-speed air bearing spindle of 125,000 rpm and made an experiment for the application possibility in the PCB drilling. In order to estimate the drilling performance, we have investigated the size and damage of drilled hole, and the wear of drill at 90,000rpm. Results are as follows; we have confirmed the possibility in the PCB drilling of air bearing spindle. In case of micro-drilling PCB at $0.1mm\sim0.3mm$, the increase in the number of drilling has resulted in a bigger size of holes and also a bigger size of damage. It has been found that the wear of micro drill tends to concentrate in the main cutting edge.

• 한국정밀공학회지
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• 제23권3호
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• pp.147-155
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• 2006

High speed machining has become the main issue of metal rutting. Due to increase of the rotational speed of the spindle, problems, such as the run-out errors, reduced stiffness, must be overcome to improve the machining accuracy. In order to solve the problems, it is important to determine the appropriate clamping unit and tooling system. This paper presents an investigation into an evolution of contact interval which is the interface between spindle taper hole and tool holder shank of the spindle. Finite element analysis is performed by using a commercial code ANSYS according to variation of clamping forces and rotational speeds. This paper proposed fit tolerance in order to evaluate the effects of clamping force and rotational speed on the contact interval in the spindle interface. From the finite element results, it has been shown that the rotational speed rather than clamping force mostly influence on the variation of the contact interval.

• 대한기계학회논문집B
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• 제31권1호
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• pp.76-82
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• 2007

The present study investigated the effects of channel rotation and bleed flow on heat/mass transfer in a square channel with $45^{\circ}$ rib turbulators. The bleed holes were located between the rib turbulators on the leading surface and those on the trailing surface case by case. The tests were conducted under the conditions of various bleed ratios (0.0, 0.2, 0.4) and rotation numbers (0.0, 0.2, 0.4) at Re=10,000. The results suggested that heat/mass transfer characteristics were influenced by the Coriolis force, decrement of main flow rate, secondary flow by angled ribs and bleed hole location. As the bleed ratio (BR) increased, the heat/mass transfer decreased on both surfaces due to the reduction of main flow rate. With increment of the rotation number, heat/mass transfer also decreased and almost the same because the reattachment of the secondary flow induced by angled ribs was weakened on the leading surface and the secondary flow was disturbed on the trailing surface by the Coriolis force.